6/1/2012	12:00:21 AM	Helium valve closed
6/1/2012	12:00:21 AM	H2 valve closed
6/1/2012	12:00:21 AM	BCl3 valve closed
6/1/2012	12:00:21 AM	PH3 valve closed
6/1/2012	12:00:21 AM	SiCl4 pre valve closed
6/1/2012	12:00:21 AM	SiCl4 post valve closed
6/1/2012	12:00:21 AM	Bypass valve closed
6/1/2012	12:00:21 AM	Bubbler valve closed
6/1/2012	12:00:21 AM	Main Vac valve opened
6/1/2012	12:00:21 AM	Helium MFC set to  0.000000
6/1/2012	12:00:21 AM	H2 MFC set to  0.000000
6/1/2012	12:00:21 AM	BCl3 MFC set to  0.000000
6/1/2012	12:00:21 AM	PH3 MFC set to  0.000000
6/1/2012	12:00:21 AM	SiCl4 MFC set to  0.000000
6/1/2012	12:00:21 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:00:21 AM	Tube furnace set to 0
6/1/2012	12:00:51 AM	H2 valve closed
6/1/2012	12:00:51 AM	BCl3 valve closed
6/1/2012	12:00:51 AM	PH3 valve closed
6/1/2012	12:00:51 AM	SiCl4 pre valve closed
6/1/2012	12:00:51 AM	SiCl4 post valve closed
6/1/2012	12:00:51 AM	Bypass valve closed
6/1/2012	12:00:51 AM	Bubbler valve closed
6/1/2012	12:00:51 AM	Helium valve opened
6/1/2012	12:00:51 AM	Main Vac valve opened
6/1/2012	12:00:51 AM	Helium MFC set to  20.000000
6/1/2012	12:00:51 AM	H2 MFC set to  0.000000
6/1/2012	12:00:51 AM	BCl3 MFC set to  0.000000
6/1/2012	12:00:51 AM	PH3 MFC set to  0.000000
6/1/2012	12:00:51 AM	SiCl4 MFC set to  0.000000
6/1/2012	12:00:51 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:00:51 AM	Tube furnace set to 0
6/1/2012	12:01:22 AM	Helium valve closed
6/1/2012	12:01:22 AM	H2 valve closed
6/1/2012	12:01:22 AM	BCl3 valve closed
6/1/2012	12:01:22 AM	PH3 valve closed
6/1/2012	12:01:22 AM	SiCl4 pre valve closed
6/1/2012	12:01:22 AM	SiCl4 post valve closed
6/1/2012	12:01:22 AM	Bypass valve closed
6/1/2012	12:01:22 AM	Bubbler valve closed
6/1/2012	12:01:22 AM	Main Vac valve opened
6/1/2012	12:01:22 AM	Helium MFC set to  0.000000
6/1/2012	12:01:22 AM	H2 MFC set to  0.000000
6/1/2012	12:01:22 AM	BCl3 MFC set to  0.000000
6/1/2012	12:01:22 AM	PH3 MFC set to  0.000000
6/1/2012	12:01:22 AM	SiCl4 MFC set to  0.000000
6/1/2012	12:01:22 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:01:22 AM	Tube furnace set to 0
6/1/2012	12:01:52 AM	H2 valve closed
6/1/2012	12:01:52 AM	BCl3 valve closed
6/1/2012	12:01:52 AM	PH3 valve closed
6/1/2012	12:01:52 AM	SiCl4 pre valve closed
6/1/2012	12:01:52 AM	SiCl4 post valve closed
6/1/2012	12:01:52 AM	Bypass valve closed
6/1/2012	12:01:52 AM	Bubbler valve closed
6/1/2012	12:01:52 AM	Helium valve opened
6/1/2012	12:01:52 AM	Main Vac valve opened
6/1/2012	12:01:52 AM	Helium MFC set to  20.000000
6/1/2012	12:01:52 AM	H2 MFC set to  0.000000
6/1/2012	12:01:52 AM	BCl3 MFC set to  0.000000
6/1/2012	12:01:52 AM	PH3 MFC set to  0.000000
6/1/2012	12:01:52 AM	SiCl4 MFC set to  0.000000
6/1/2012	12:01:52 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:01:52 AM	Tube furnace set to 0
6/1/2012	12:02:22 AM	Helium valve closed
6/1/2012	12:02:22 AM	H2 valve closed
6/1/2012	12:02:22 AM	BCl3 valve closed
6/1/2012	12:02:22 AM	PH3 valve closed
6/1/2012	12:02:22 AM	SiCl4 pre valve closed
6/1/2012	12:02:22 AM	SiCl4 post valve closed
6/1/2012	12:02:22 AM	Bypass valve closed
6/1/2012	12:02:22 AM	Bubbler valve closed
6/1/2012	12:02:22 AM	Main Vac valve opened
6/1/2012	12:02:22 AM	Helium MFC set to  0.000000
6/1/2012	12:02:22 AM	H2 MFC set to  0.000000
6/1/2012	12:02:22 AM	BCl3 MFC set to  0.000000
6/1/2012	12:02:22 AM	PH3 MFC set to  0.000000
6/1/2012	12:02:22 AM	SiCl4 MFC set to  0.000000
6/1/2012	12:02:22 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:02:22 AM	Tube furnace set to 0
6/1/2012	12:02:52 AM	H2 valve closed
6/1/2012	12:02:52 AM	BCl3 valve closed
6/1/2012	12:02:52 AM	PH3 valve closed
6/1/2012	12:02:52 AM	SiCl4 pre valve closed
6/1/2012	12:02:52 AM	SiCl4 post valve closed
6/1/2012	12:02:52 AM	Bypass valve closed
6/1/2012	12:02:52 AM	Bubbler valve closed
6/1/2012	12:02:52 AM	Helium valve opened
6/1/2012	12:02:52 AM	Main Vac valve opened
6/1/2012	12:02:52 AM	Helium MFC set to  20.000000
6/1/2012	12:02:52 AM	H2 MFC set to  0.000000
6/1/2012	12:02:52 AM	BCl3 MFC set to  0.000000
6/1/2012	12:02:52 AM	PH3 MFC set to  0.000000
6/1/2012	12:02:52 AM	SiCl4 MFC set to  0.000000
6/1/2012	12:02:52 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:02:52 AM	Tube furnace set to 0
6/1/2012	12:03:22 AM	Helium valve closed
6/1/2012	12:03:22 AM	H2 valve closed
6/1/2012	12:03:22 AM	BCl3 valve closed
6/1/2012	12:03:22 AM	PH3 valve closed
6/1/2012	12:03:22 AM	SiCl4 pre valve closed
6/1/2012	12:03:22 AM	SiCl4 post valve closed
6/1/2012	12:03:23 AM	Bypass valve closed
6/1/2012	12:03:23 AM	Bubbler valve closed
6/1/2012	12:03:23 AM	Main Vac valve opened
6/1/2012	12:03:23 AM	Helium MFC set to  0.000000
6/1/2012	12:03:23 AM	H2 MFC set to  0.000000
6/1/2012	12:03:23 AM	BCl3 MFC set to  0.000000
6/1/2012	12:03:23 AM	PH3 MFC set to  0.000000
6/1/2012	12:03:23 AM	SiCl4 MFC set to  0.000000
6/1/2012	12:03:23 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:03:23 AM	Tube furnace set to 0
6/1/2012	12:03:53 AM	H2 valve closed
6/1/2012	12:03:53 AM	BCl3 valve closed
6/1/2012	12:03:53 AM	PH3 valve closed
6/1/2012	12:03:53 AM	SiCl4 pre valve closed
6/1/2012	12:03:53 AM	SiCl4 post valve closed
6/1/2012	12:03:53 AM	Bypass valve closed
6/1/2012	12:03:53 AM	Bubbler valve closed
6/1/2012	12:03:53 AM	Helium valve opened
6/1/2012	12:03:53 AM	Main Vac valve opened
6/1/2012	12:03:53 AM	Helium MFC set to  20.000000
6/1/2012	12:03:53 AM	H2 MFC set to  0.000000
6/1/2012	12:03:53 AM	BCl3 MFC set to  0.000000
6/1/2012	12:03:53 AM	PH3 MFC set to  0.000000
6/1/2012	12:03:53 AM	SiCl4 MFC set to  0.000000
6/1/2012	12:03:53 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:03:53 AM	Tube furnace set to 0
6/1/2012	12:04:23 AM	Helium valve closed
6/1/2012	12:04:23 AM	H2 valve closed
6/1/2012	12:04:23 AM	BCl3 valve closed
6/1/2012	12:04:23 AM	PH3 valve closed
6/1/2012	12:04:23 AM	SiCl4 pre valve closed
6/1/2012	12:04:23 AM	SiCl4 post valve closed
6/1/2012	12:04:23 AM	Bypass valve closed
6/1/2012	12:04:23 AM	Bubbler valve closed
6/1/2012	12:04:23 AM	Main Vac valve opened
6/1/2012	12:04:23 AM	Helium MFC set to  0.000000
6/1/2012	12:04:23 AM	H2 MFC set to  0.000000
6/1/2012	12:04:23 AM	BCl3 MFC set to  0.000000
6/1/2012	12:04:23 AM	PH3 MFC set to  0.000000
6/1/2012	12:04:23 AM	SiCl4 MFC set to  0.000000
6/1/2012	12:04:23 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:04:23 AM	Tube furnace set to 0
6/1/2012	12:04:53 AM	H2 valve closed
6/1/2012	12:04:53 AM	BCl3 valve closed
6/1/2012	12:04:53 AM	PH3 valve closed
6/1/2012	12:04:53 AM	SiCl4 pre valve closed
6/1/2012	12:04:53 AM	SiCl4 post valve closed
6/1/2012	12:04:53 AM	Bypass valve closed
6/1/2012	12:04:53 AM	Bubbler valve closed
6/1/2012	12:04:53 AM	Helium valve opened
6/1/2012	12:04:53 AM	Main Vac valve opened
6/1/2012	12:04:53 AM	Helium MFC set to  20.000000
6/1/2012	12:04:53 AM	H2 MFC set to  0.000000
6/1/2012	12:04:53 AM	BCl3 MFC set to  0.000000
6/1/2012	12:04:53 AM	PH3 MFC set to  0.000000
6/1/2012	12:04:53 AM	SiCl4 MFC set to  0.000000
6/1/2012	12:04:53 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:04:53 AM	Tube furnace set to 0
6/1/2012	12:05:23 AM	Helium valve closed
6/1/2012	12:05:23 AM	H2 valve closed
6/1/2012	12:05:23 AM	BCl3 valve closed
6/1/2012	12:05:23 AM	PH3 valve closed
6/1/2012	12:05:23 AM	SiCl4 pre valve closed
6/1/2012	12:05:23 AM	SiCl4 post valve closed
6/1/2012	12:05:23 AM	Bypass valve closed
6/1/2012	12:05:23 AM	Bubbler valve closed
6/1/2012	12:05:23 AM	Main Vac valve opened
6/1/2012	12:05:23 AM	Helium MFC set to  0.000000
6/1/2012	12:05:23 AM	H2 MFC set to  0.000000
6/1/2012	12:05:23 AM	BCl3 MFC set to  0.000000
6/1/2012	12:05:23 AM	PH3 MFC set to  0.000000
6/1/2012	12:05:23 AM	SiCl4 MFC set to  0.000000
6/1/2012	12:05:23 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:05:24 AM	Tube furnace set to 0
6/1/2012	12:05:54 AM	H2 valve closed
6/1/2012	12:05:54 AM	BCl3 valve closed
6/1/2012	12:05:54 AM	PH3 valve closed
6/1/2012	12:05:54 AM	SiCl4 pre valve closed
6/1/2012	12:05:54 AM	SiCl4 post valve closed
6/1/2012	12:05:54 AM	Bypass valve closed
6/1/2012	12:05:54 AM	Bubbler valve closed
6/1/2012	12:05:54 AM	Helium valve opened
6/1/2012	12:05:54 AM	Main Vac valve opened
6/1/2012	12:05:54 AM	Helium MFC set to  20.000000
6/1/2012	12:05:54 AM	H2 MFC set to  0.000000
6/1/2012	12:05:54 AM	BCl3 MFC set to  0.000000
6/1/2012	12:05:54 AM	PH3 MFC set to  0.000000
6/1/2012	12:05:54 AM	SiCl4 MFC set to  0.000000
6/1/2012	12:05:54 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:05:54 AM	Tube furnace set to 0
6/1/2012	12:06:24 AM	Helium valve closed
6/1/2012	12:06:24 AM	H2 valve closed
6/1/2012	12:06:24 AM	BCl3 valve closed
6/1/2012	12:06:24 AM	PH3 valve closed
6/1/2012	12:06:24 AM	SiCl4 pre valve closed
6/1/2012	12:06:24 AM	SiCl4 post valve closed
6/1/2012	12:06:24 AM	Bypass valve closed
6/1/2012	12:06:24 AM	Bubbler valve closed
6/1/2012	12:06:24 AM	Main Vac valve opened
6/1/2012	12:06:24 AM	Helium MFC set to  0.000000
6/1/2012	12:06:24 AM	H2 MFC set to  0.000000
6/1/2012	12:06:24 AM	BCl3 MFC set to  0.000000
6/1/2012	12:06:24 AM	PH3 MFC set to  0.000000
6/1/2012	12:06:24 AM	SiCl4 MFC set to  0.000000
6/1/2012	12:06:24 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:06:24 AM	Tube furnace set to 0
6/1/2012	12:06:54 AM	H2 valve closed
6/1/2012	12:06:54 AM	BCl3 valve closed
6/1/2012	12:06:54 AM	PH3 valve closed
6/1/2012	12:06:54 AM	SiCl4 pre valve closed
6/1/2012	12:06:54 AM	SiCl4 post valve closed
6/1/2012	12:06:54 AM	Bypass valve closed
6/1/2012	12:06:54 AM	Bubbler valve closed
6/1/2012	12:06:54 AM	Helium valve opened
6/1/2012	12:06:54 AM	Main Vac valve opened
6/1/2012	12:06:54 AM	Helium MFC set to  20.000000
6/1/2012	12:06:54 AM	H2 MFC set to  0.000000
6/1/2012	12:06:54 AM	BCl3 MFC set to  0.000000
6/1/2012	12:06:54 AM	PH3 MFC set to  0.000000
6/1/2012	12:06:54 AM	SiCl4 MFC set to  0.000000
6/1/2012	12:06:54 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:06:54 AM	Tube furnace set to 0
6/1/2012	12:07:24 AM	Helium valve closed
6/1/2012	12:07:24 AM	H2 valve closed
6/1/2012	12:07:24 AM	BCl3 valve closed
6/1/2012	12:07:24 AM	PH3 valve closed
6/1/2012	12:07:24 AM	SiCl4 pre valve closed
6/1/2012	12:07:24 AM	SiCl4 post valve closed
6/1/2012	12:07:24 AM	Bypass valve closed
6/1/2012	12:07:24 AM	Bubbler valve closed
6/1/2012	12:07:24 AM	Main Vac valve opened
6/1/2012	12:07:24 AM	Helium MFC set to  0.000000
6/1/2012	12:07:24 AM	H2 MFC set to  0.000000
6/1/2012	12:07:24 AM	BCl3 MFC set to  0.000000
6/1/2012	12:07:24 AM	PH3 MFC set to  0.000000
6/1/2012	12:07:24 AM	SiCl4 MFC set to  0.000000
6/1/2012	12:07:24 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:07:25 AM	Tube furnace set to 200
6/1/2012	12:07:55 AM	H2 valve closed
6/1/2012	12:07:55 AM	BCl3 valve closed
6/1/2012	12:07:55 AM	PH3 valve closed
6/1/2012	12:07:55 AM	SiCl4 pre valve closed
6/1/2012	12:07:55 AM	SiCl4 post valve closed
6/1/2012	12:07:55 AM	Bypass valve closed
6/1/2012	12:07:55 AM	Bubbler valve closed
6/1/2012	12:07:55 AM	Helium valve opened
6/1/2012	12:07:55 AM	Main Vac valve opened
6/1/2012	12:07:55 AM	Helium MFC set to  20.000000
6/1/2012	12:07:55 AM	H2 MFC set to  0.000000
6/1/2012	12:07:55 AM	BCl3 MFC set to  0.000000
6/1/2012	12:07:55 AM	PH3 MFC set to  0.000000
6/1/2012	12:07:55 AM	SiCl4 MFC set to  0.000000
6/1/2012	12:07:55 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:07:55 AM	Tube furnace set to 200
6/1/2012	12:08:25 AM	Helium valve closed
6/1/2012	12:08:25 AM	H2 valve closed
6/1/2012	12:08:25 AM	BCl3 valve closed
6/1/2012	12:08:25 AM	PH3 valve closed
6/1/2012	12:08:25 AM	SiCl4 pre valve closed
6/1/2012	12:08:25 AM	SiCl4 post valve closed
6/1/2012	12:08:25 AM	Bypass valve closed
6/1/2012	12:08:25 AM	Bubbler valve closed
6/1/2012	12:08:25 AM	Main Vac valve opened
6/1/2012	12:08:25 AM	Helium MFC set to  0.000000
6/1/2012	12:08:25 AM	H2 MFC set to  0.000000
6/1/2012	12:08:25 AM	BCl3 MFC set to  0.000000
6/1/2012	12:08:25 AM	PH3 MFC set to  0.000000
6/1/2012	12:08:25 AM	SiCl4 MFC set to  0.000000
6/1/2012	12:08:25 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:08:25 AM	Tube furnace set to 200
6/1/2012	12:08:55 AM	H2 valve closed
6/1/2012	12:08:55 AM	BCl3 valve closed
6/1/2012	12:08:55 AM	PH3 valve closed
6/1/2012	12:08:55 AM	SiCl4 pre valve closed
6/1/2012	12:08:55 AM	SiCl4 post valve closed
6/1/2012	12:08:55 AM	Bypass valve closed
6/1/2012	12:08:55 AM	Bubbler valve closed
6/1/2012	12:08:55 AM	Helium valve opened
6/1/2012	12:08:55 AM	Main Vac valve opened
6/1/2012	12:08:55 AM	Helium MFC set to  20.000000
6/1/2012	12:08:55 AM	H2 MFC set to  0.000000
6/1/2012	12:08:55 AM	BCl3 MFC set to  0.000000
6/1/2012	12:08:55 AM	PH3 MFC set to  0.000000
6/1/2012	12:08:55 AM	SiCl4 MFC set to  0.000000
6/1/2012	12:08:55 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:08:55 AM	Tube furnace set to 200
6/1/2012	12:09:25 AM	Helium valve closed
6/1/2012	12:09:25 AM	H2 valve closed
6/1/2012	12:09:25 AM	BCl3 valve closed
6/1/2012	12:09:25 AM	PH3 valve closed
6/1/2012	12:09:25 AM	SiCl4 pre valve closed
6/1/2012	12:09:25 AM	SiCl4 post valve closed
6/1/2012	12:09:25 AM	Bypass valve closed
6/1/2012	12:09:25 AM	Bubbler valve closed
6/1/2012	12:09:25 AM	Main Vac valve opened
6/1/2012	12:09:25 AM	Helium MFC set to  0.000000
6/1/2012	12:09:25 AM	H2 MFC set to  0.000000
6/1/2012	12:09:25 AM	BCl3 MFC set to  0.000000
6/1/2012	12:09:25 AM	PH3 MFC set to  0.000000
6/1/2012	12:09:25 AM	SiCl4 MFC set to  0.000000
6/1/2012	12:09:25 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:09:26 AM	Tube furnace set to 200
6/1/2012	12:09:56 AM	H2 valve closed
6/1/2012	12:09:56 AM	BCl3 valve closed
6/1/2012	12:09:56 AM	PH3 valve closed
6/1/2012	12:09:56 AM	SiCl4 pre valve closed
6/1/2012	12:09:56 AM	SiCl4 post valve closed
6/1/2012	12:09:56 AM	Bypass valve closed
6/1/2012	12:09:56 AM	Bubbler valve closed
6/1/2012	12:09:56 AM	Helium valve opened
6/1/2012	12:09:56 AM	Main Vac valve opened
6/1/2012	12:09:56 AM	Helium MFC set to  20.000000
6/1/2012	12:09:56 AM	H2 MFC set to  0.000000
6/1/2012	12:09:56 AM	BCl3 MFC set to  0.000000
6/1/2012	12:09:56 AM	PH3 MFC set to  0.000000
6/1/2012	12:09:56 AM	SiCl4 MFC set to  0.000000
6/1/2012	12:09:56 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:09:56 AM	Tube furnace set to 200
6/1/2012	12:10:26 AM	Helium valve closed
6/1/2012	12:10:26 AM	H2 valve closed
6/1/2012	12:10:26 AM	BCl3 valve closed
6/1/2012	12:10:26 AM	PH3 valve closed
6/1/2012	12:10:26 AM	SiCl4 pre valve closed
6/1/2012	12:10:26 AM	SiCl4 post valve closed
6/1/2012	12:10:26 AM	Bypass valve closed
6/1/2012	12:10:26 AM	Bubbler valve closed
6/1/2012	12:10:26 AM	Main Vac valve opened
6/1/2012	12:10:26 AM	Helium MFC set to  0.000000
6/1/2012	12:10:26 AM	H2 MFC set to  0.000000
6/1/2012	12:10:26 AM	BCl3 MFC set to  0.000000
6/1/2012	12:10:26 AM	PH3 MFC set to  0.000000
6/1/2012	12:10:26 AM	SiCl4 MFC set to  0.000000
6/1/2012	12:10:26 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:10:26 AM	Tube furnace set to 200
6/1/2012	12:10:56 AM	H2 valve closed
6/1/2012	12:10:56 AM	BCl3 valve closed
6/1/2012	12:10:56 AM	PH3 valve closed
6/1/2012	12:10:56 AM	SiCl4 pre valve closed
6/1/2012	12:10:56 AM	SiCl4 post valve closed
6/1/2012	12:10:56 AM	Bypass valve closed
6/1/2012	12:10:56 AM	Bubbler valve closed
6/1/2012	12:10:56 AM	Helium valve opened
6/1/2012	12:10:56 AM	Main Vac valve opened
6/1/2012	12:10:56 AM	Helium MFC set to  20.000000
6/1/2012	12:10:56 AM	H2 MFC set to  0.000000
6/1/2012	12:10:56 AM	BCl3 MFC set to  0.000000
6/1/2012	12:10:56 AM	PH3 MFC set to  0.000000
6/1/2012	12:10:56 AM	SiCl4 MFC set to  0.000000
6/1/2012	12:10:56 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:10:56 AM	Tube furnace set to 200
6/1/2012	12:11:26 AM	Helium valve closed
6/1/2012	12:11:26 AM	H2 valve closed
6/1/2012	12:11:26 AM	BCl3 valve closed
6/1/2012	12:11:26 AM	PH3 valve closed
6/1/2012	12:11:26 AM	SiCl4 pre valve closed
6/1/2012	12:11:26 AM	SiCl4 post valve closed
6/1/2012	12:11:26 AM	Bypass valve closed
6/1/2012	12:11:26 AM	Bubbler valve closed
6/1/2012	12:11:26 AM	Main Vac valve opened
6/1/2012	12:11:26 AM	Helium MFC set to  0.000000
6/1/2012	12:11:26 AM	H2 MFC set to  0.000000
6/1/2012	12:11:26 AM	BCl3 MFC set to  0.000000
6/1/2012	12:11:26 AM	PH3 MFC set to  0.000000
6/1/2012	12:11:26 AM	SiCl4 MFC set to  0.000000
6/1/2012	12:11:26 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:11:26 AM	Tube furnace set to 200
6/1/2012	12:11:56 AM	H2 valve closed
6/1/2012	12:11:56 AM	BCl3 valve closed
6/1/2012	12:11:56 AM	PH3 valve closed
6/1/2012	12:11:56 AM	SiCl4 pre valve closed
6/1/2012	12:11:56 AM	SiCl4 post valve closed
6/1/2012	12:11:57 AM	Bypass valve closed
6/1/2012	12:11:57 AM	Bubbler valve closed
6/1/2012	12:11:57 AM	Helium valve opened
6/1/2012	12:11:57 AM	Main Vac valve opened
6/1/2012	12:11:57 AM	Helium MFC set to  20.000000
6/1/2012	12:11:57 AM	H2 MFC set to  0.000000
6/1/2012	12:11:57 AM	BCl3 MFC set to  0.000000
6/1/2012	12:11:57 AM	PH3 MFC set to  0.000000
6/1/2012	12:11:57 AM	SiCl4 MFC set to  0.000000
6/1/2012	12:11:57 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:11:57 AM	Tube furnace set to 200
6/1/2012	12:12:25 AM	Helium valve closed
6/1/2012	12:12:25 AM	H2 valve closed
6/1/2012	12:12:25 AM	BCl3 valve closed
6/1/2012	12:12:25 AM	PH3 valve closed
6/1/2012	12:12:25 AM	SiCl4 pre valve closed
6/1/2012	12:12:25 AM	SiCl4 post valve closed
6/1/2012	12:12:25 AM	Bypass valve closed
6/1/2012	12:12:25 AM	Bubbler valve closed
6/1/2012	12:12:25 AM	Main Vac valve opened
6/1/2012	12:12:25 AM	Helium MFC set to  0.000000
6/1/2012	12:12:25 AM	H2 MFC set to  0.000000
6/1/2012	12:12:25 AM	BCl3 MFC set to  0.000000
6/1/2012	12:12:25 AM	PH3 MFC set to  0.000000
6/1/2012	12:12:25 AM	SiCl4 MFC set to  0.000000
6/1/2012	12:12:25 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:12:25 AM	Tube furnace set to 200
6/1/2012	12:12:26 AM	H2 valve closed
6/1/2012	12:12:26 AM	BCl3 valve closed
6/1/2012	12:12:26 AM	PH3 valve closed
6/1/2012	12:12:26 AM	SiCl4 pre valve closed
6/1/2012	12:12:26 AM	SiCl4 post valve closed
6/1/2012	12:12:26 AM	Bypass valve closed
6/1/2012	12:12:26 AM	Bubbler valve closed
6/1/2012	12:12:26 AM	Helium valve opened
6/1/2012	12:12:26 AM	Main Vac valve opened
6/1/2012	12:12:26 AM	Helium MFC set to  20.000000
6/1/2012	12:12:26 AM	H2 MFC set to  0.000000
6/1/2012	12:12:26 AM	BCl3 MFC set to  0.000000
6/1/2012	12:12:26 AM	PH3 MFC set to  0.000000
6/1/2012	12:12:26 AM	SiCl4 MFC set to  0.000000
6/1/2012	12:12:26 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:12:26 AM	Tube furnace set to 200
6/1/2012	12:12:56 AM	Helium valve closed
6/1/2012	12:12:56 AM	H2 valve closed
6/1/2012	12:12:56 AM	BCl3 valve closed
6/1/2012	12:12:56 AM	PH3 valve closed
6/1/2012	12:12:56 AM	SiCl4 pre valve closed
6/1/2012	12:12:56 AM	SiCl4 post valve closed
6/1/2012	12:12:56 AM	Bypass valve closed
6/1/2012	12:12:56 AM	Bubbler valve closed
6/1/2012	12:12:56 AM	Main Vac valve opened
6/1/2012	12:12:56 AM	Helium MFC set to  0.000000
6/1/2012	12:12:56 AM	H2 MFC set to  0.000000
6/1/2012	12:12:56 AM	BCl3 MFC set to  0.000000
6/1/2012	12:12:56 AM	PH3 MFC set to  0.000000
6/1/2012	12:12:56 AM	SiCl4 MFC set to  0.000000
6/1/2012	12:12:56 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:12:56 AM	Tube furnace set to 0
6/1/2012	12:12:57 AM	Run finished at 12:12 AM
6/1/2012	12:41:14 AM	Recipe started at 12:41 AM
6/1/2012	12:41:14 AM	Helium valve closed
6/1/2012	12:41:14 AM	H2 valve closed
6/1/2012	12:41:14 AM	BCl3 valve closed
6/1/2012	12:41:14 AM	PH3 valve closed
6/1/2012	12:41:14 AM	SiCl4 pre valve closed
6/1/2012	12:41:14 AM	SiCl4 post valve closed
6/1/2012	12:41:14 AM	Bypass valve closed
6/1/2012	12:41:14 AM	Bubbler valve closed
6/1/2012	12:41:14 AM	Main Vac valve opened
6/1/2012	12:41:14 AM	Helium MFC set to  0.000000
6/1/2012	12:41:14 AM	H2 MFC set to  0.000000
6/1/2012	12:41:14 AM	BCl3 MFC set to  0.000000
6/1/2012	12:41:14 AM	PH3 MFC set to  0.000000
6/1/2012	12:41:14 AM	SiCl4 MFC set to  0.000000
6/1/2012	12:41:14 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:41:14 AM	Tube furnace set to 0
6/1/2012	12:41:44 AM	H2 valve closed
6/1/2012	12:41:44 AM	BCl3 valve closed
6/1/2012	12:41:44 AM	PH3 valve closed
6/1/2012	12:41:44 AM	SiCl4 pre valve closed
6/1/2012	12:41:44 AM	SiCl4 post valve closed
6/1/2012	12:41:44 AM	Bypass valve closed
6/1/2012	12:41:44 AM	Bubbler valve closed
6/1/2012	12:41:44 AM	Helium valve opened
6/1/2012	12:41:44 AM	Main Vac valve opened
6/1/2012	12:41:44 AM	Helium MFC set to  20.000000
6/1/2012	12:41:44 AM	H2 MFC set to  0.000000
6/1/2012	12:41:44 AM	BCl3 MFC set to  0.000000
6/1/2012	12:41:44 AM	PH3 MFC set to  0.000000
6/1/2012	12:41:44 AM	SiCl4 MFC set to  0.000000
6/1/2012	12:41:44 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:41:45 AM	Tube furnace set to 0
6/1/2012	12:42:15 AM	Helium valve closed
6/1/2012	12:42:15 AM	H2 valve closed
6/1/2012	12:42:15 AM	BCl3 valve closed
6/1/2012	12:42:15 AM	PH3 valve closed
6/1/2012	12:42:15 AM	SiCl4 pre valve closed
6/1/2012	12:42:15 AM	SiCl4 post valve closed
6/1/2012	12:42:15 AM	Bypass valve closed
6/1/2012	12:42:15 AM	Bubbler valve closed
6/1/2012	12:42:15 AM	Main Vac valve opened
6/1/2012	12:42:15 AM	Helium MFC set to  0.000000
6/1/2012	12:42:15 AM	H2 MFC set to  0.000000
6/1/2012	12:42:15 AM	BCl3 MFC set to  0.000000
6/1/2012	12:42:15 AM	PH3 MFC set to  0.000000
6/1/2012	12:42:15 AM	SiCl4 MFC set to  0.000000
6/1/2012	12:42:15 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:42:15 AM	Tube furnace set to 0
6/1/2012	12:42:45 AM	H2 valve closed
6/1/2012	12:42:45 AM	BCl3 valve closed
6/1/2012	12:42:45 AM	PH3 valve closed
6/1/2012	12:42:45 AM	SiCl4 pre valve closed
6/1/2012	12:42:45 AM	SiCl4 post valve closed
6/1/2012	12:42:45 AM	Bypass valve closed
6/1/2012	12:42:45 AM	Bubbler valve closed
6/1/2012	12:42:45 AM	Helium valve opened
6/1/2012	12:42:45 AM	Main Vac valve opened
6/1/2012	12:42:45 AM	Helium MFC set to  20.000000
6/1/2012	12:42:45 AM	H2 MFC set to  0.000000
6/1/2012	12:42:45 AM	BCl3 MFC set to  0.000000
6/1/2012	12:42:45 AM	PH3 MFC set to  0.000000
6/1/2012	12:42:45 AM	SiCl4 MFC set to  0.000000
6/1/2012	12:42:45 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:42:45 AM	Tube furnace set to 0
6/1/2012	12:43:15 AM	Helium valve closed
6/1/2012	12:43:15 AM	H2 valve closed
6/1/2012	12:43:15 AM	BCl3 valve closed
6/1/2012	12:43:15 AM	PH3 valve closed
6/1/2012	12:43:15 AM	SiCl4 pre valve closed
6/1/2012	12:43:15 AM	SiCl4 post valve closed
6/1/2012	12:43:15 AM	Bypass valve closed
6/1/2012	12:43:15 AM	Bubbler valve closed
6/1/2012	12:43:15 AM	Main Vac valve opened
6/1/2012	12:43:15 AM	Helium MFC set to  0.000000
6/1/2012	12:43:15 AM	H2 MFC set to  0.000000
6/1/2012	12:43:15 AM	BCl3 MFC set to  0.000000
6/1/2012	12:43:15 AM	PH3 MFC set to  0.000000
6/1/2012	12:43:15 AM	SiCl4 MFC set to  0.000000
6/1/2012	12:43:15 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:43:15 AM	Tube furnace set to 0
6/1/2012	12:43:45 AM	H2 valve closed
6/1/2012	12:43:45 AM	BCl3 valve closed
6/1/2012	12:43:45 AM	PH3 valve closed
6/1/2012	12:43:45 AM	SiCl4 pre valve closed
6/1/2012	12:43:45 AM	SiCl4 post valve closed
6/1/2012	12:43:45 AM	Bypass valve closed
6/1/2012	12:43:45 AM	Bubbler valve closed
6/1/2012	12:43:45 AM	Helium valve opened
6/1/2012	12:43:45 AM	Main Vac valve opened
6/1/2012	12:43:45 AM	Helium MFC set to  20.000000
6/1/2012	12:43:45 AM	H2 MFC set to  0.000000
6/1/2012	12:43:45 AM	BCl3 MFC set to  0.000000
6/1/2012	12:43:45 AM	PH3 MFC set to  0.000000
6/1/2012	12:43:45 AM	SiCl4 MFC set to  0.000000
6/1/2012	12:43:45 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:43:46 AM	Tube furnace set to 0
6/1/2012	12:44:16 AM	Helium valve closed
6/1/2012	12:44:16 AM	H2 valve closed
6/1/2012	12:44:16 AM	BCl3 valve closed
6/1/2012	12:44:16 AM	PH3 valve closed
6/1/2012	12:44:16 AM	SiCl4 pre valve closed
6/1/2012	12:44:16 AM	SiCl4 post valve closed
6/1/2012	12:44:16 AM	Bypass valve closed
6/1/2012	12:44:16 AM	Bubbler valve closed
6/1/2012	12:44:16 AM	Main Vac valve opened
6/1/2012	12:44:16 AM	Helium MFC set to  0.000000
6/1/2012	12:44:16 AM	H2 MFC set to  0.000000
6/1/2012	12:44:16 AM	BCl3 MFC set to  0.000000
6/1/2012	12:44:16 AM	PH3 MFC set to  0.000000
6/1/2012	12:44:16 AM	SiCl4 MFC set to  0.000000
6/1/2012	12:44:16 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:44:16 AM	Tube furnace set to 0
6/1/2012	12:44:46 AM	H2 valve closed
6/1/2012	12:44:46 AM	BCl3 valve closed
6/1/2012	12:44:46 AM	PH3 valve closed
6/1/2012	12:44:46 AM	SiCl4 pre valve closed
6/1/2012	12:44:46 AM	SiCl4 post valve closed
6/1/2012	12:44:46 AM	Bypass valve closed
6/1/2012	12:44:46 AM	Bubbler valve closed
6/1/2012	12:44:46 AM	Helium valve opened
6/1/2012	12:44:46 AM	Main Vac valve opened
6/1/2012	12:44:46 AM	Helium MFC set to  20.000000
6/1/2012	12:44:46 AM	H2 MFC set to  0.000000
6/1/2012	12:44:46 AM	BCl3 MFC set to  0.000000
6/1/2012	12:44:46 AM	PH3 MFC set to  0.000000
6/1/2012	12:44:46 AM	SiCl4 MFC set to  0.000000
6/1/2012	12:44:46 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:44:46 AM	Tube furnace set to 0
6/1/2012	12:45:16 AM	Helium valve closed
6/1/2012	12:45:16 AM	H2 valve closed
6/1/2012	12:45:16 AM	BCl3 valve closed
6/1/2012	12:45:16 AM	PH3 valve closed
6/1/2012	12:45:16 AM	SiCl4 pre valve closed
6/1/2012	12:45:16 AM	SiCl4 post valve closed
6/1/2012	12:45:16 AM	Bypass valve closed
6/1/2012	12:45:16 AM	Bubbler valve closed
6/1/2012	12:45:16 AM	Main Vac valve opened
6/1/2012	12:45:16 AM	Helium MFC set to  0.000000
6/1/2012	12:45:16 AM	H2 MFC set to  0.000000
6/1/2012	12:45:16 AM	BCl3 MFC set to  0.000000
6/1/2012	12:45:16 AM	PH3 MFC set to  0.000000
6/1/2012	12:45:16 AM	SiCl4 MFC set to  0.000000
6/1/2012	12:45:16 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:45:16 AM	Tube furnace set to 0
6/1/2012	12:45:46 AM	H2 valve closed
6/1/2012	12:45:46 AM	BCl3 valve closed
6/1/2012	12:45:46 AM	PH3 valve closed
6/1/2012	12:45:46 AM	SiCl4 pre valve closed
6/1/2012	12:45:46 AM	SiCl4 post valve closed
6/1/2012	12:45:46 AM	Bypass valve closed
6/1/2012	12:45:46 AM	Bubbler valve closed
6/1/2012	12:45:46 AM	Helium valve opened
6/1/2012	12:45:46 AM	Main Vac valve opened
6/1/2012	12:45:46 AM	Helium MFC set to  20.000000
6/1/2012	12:45:46 AM	H2 MFC set to  0.000000
6/1/2012	12:45:46 AM	BCl3 MFC set to  0.000000
6/1/2012	12:45:46 AM	PH3 MFC set to  0.000000
6/1/2012	12:45:46 AM	SiCl4 MFC set to  0.000000
6/1/2012	12:45:46 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:45:46 AM	Tube furnace set to 0
6/1/2012	12:46:16 AM	Helium valve closed
6/1/2012	12:46:17 AM	H2 valve closed
6/1/2012	12:46:17 AM	BCl3 valve closed
6/1/2012	12:46:17 AM	PH3 valve closed
6/1/2012	12:46:17 AM	SiCl4 pre valve closed
6/1/2012	12:46:17 AM	SiCl4 post valve closed
6/1/2012	12:46:17 AM	Bypass valve closed
6/1/2012	12:46:17 AM	Bubbler valve closed
6/1/2012	12:46:17 AM	Main Vac valve opened
6/1/2012	12:46:17 AM	Helium MFC set to  0.000000
6/1/2012	12:46:17 AM	H2 MFC set to  0.000000
6/1/2012	12:46:17 AM	BCl3 MFC set to  0.000000
6/1/2012	12:46:17 AM	PH3 MFC set to  0.000000
6/1/2012	12:46:17 AM	SiCl4 MFC set to  0.000000
6/1/2012	12:46:17 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:46:17 AM	Tube furnace set to 0
6/1/2012	12:46:47 AM	H2 valve closed
6/1/2012	12:46:47 AM	BCl3 valve closed
6/1/2012	12:46:47 AM	PH3 valve closed
6/1/2012	12:46:47 AM	SiCl4 pre valve closed
6/1/2012	12:46:47 AM	SiCl4 post valve closed
6/1/2012	12:46:47 AM	Bypass valve closed
6/1/2012	12:46:47 AM	Bubbler valve closed
6/1/2012	12:46:47 AM	Helium valve opened
6/1/2012	12:46:47 AM	Main Vac valve opened
6/1/2012	12:46:47 AM	Helium MFC set to  20.000000
6/1/2012	12:46:47 AM	H2 MFC set to  0.000000
6/1/2012	12:46:47 AM	BCl3 MFC set to  0.000000
6/1/2012	12:46:47 AM	PH3 MFC set to  0.000000
6/1/2012	12:46:47 AM	SiCl4 MFC set to  0.000000
6/1/2012	12:46:47 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:46:47 AM	Tube furnace set to 0
6/1/2012	12:47:17 AM	Helium valve closed
6/1/2012	12:47:17 AM	H2 valve closed
6/1/2012	12:47:17 AM	BCl3 valve closed
6/1/2012	12:47:17 AM	PH3 valve closed
6/1/2012	12:47:17 AM	SiCl4 pre valve closed
6/1/2012	12:47:17 AM	SiCl4 post valve closed
6/1/2012	12:47:17 AM	Bypass valve closed
6/1/2012	12:47:17 AM	Bubbler valve closed
6/1/2012	12:47:17 AM	Main Vac valve opened
6/1/2012	12:47:17 AM	Helium MFC set to  0.000000
6/1/2012	12:47:17 AM	H2 MFC set to  0.000000
6/1/2012	12:47:17 AM	BCl3 MFC set to  0.000000
6/1/2012	12:47:17 AM	PH3 MFC set to  0.000000
6/1/2012	12:47:17 AM	SiCl4 MFC set to  0.000000
6/1/2012	12:47:17 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:47:17 AM	Tube furnace set to 0
6/1/2012	12:47:47 AM	H2 valve closed
6/1/2012	12:47:47 AM	BCl3 valve closed
6/1/2012	12:47:47 AM	PH3 valve closed
6/1/2012	12:47:47 AM	SiCl4 pre valve closed
6/1/2012	12:47:47 AM	SiCl4 post valve closed
6/1/2012	12:47:47 AM	Bypass valve closed
6/1/2012	12:47:47 AM	Bubbler valve closed
6/1/2012	12:47:47 AM	Helium valve opened
6/1/2012	12:47:47 AM	Main Vac valve opened
6/1/2012	12:47:47 AM	Helium MFC set to  20.000000
6/1/2012	12:47:47 AM	H2 MFC set to  0.000000
6/1/2012	12:47:47 AM	BCl3 MFC set to  0.000000
6/1/2012	12:47:47 AM	PH3 MFC set to  0.000000
6/1/2012	12:47:47 AM	SiCl4 MFC set to  0.000000
6/1/2012	12:47:47 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:47:47 AM	Tube furnace set to 0
6/1/2012	12:48:17 AM	Helium valve closed
6/1/2012	12:48:17 AM	H2 valve closed
6/1/2012	12:48:17 AM	BCl3 valve closed
6/1/2012	12:48:17 AM	PH3 valve closed
6/1/2012	12:48:17 AM	SiCl4 pre valve closed
6/1/2012	12:48:17 AM	SiCl4 post valve closed
6/1/2012	12:48:17 AM	Bypass valve closed
6/1/2012	12:48:17 AM	Bubbler valve closed
6/1/2012	12:48:17 AM	Main Vac valve opened
6/1/2012	12:48:17 AM	Helium MFC set to  0.000000
6/1/2012	12:48:17 AM	H2 MFC set to  0.000000
6/1/2012	12:48:17 AM	BCl3 MFC set to  0.000000
6/1/2012	12:48:17 AM	PH3 MFC set to  0.000000
6/1/2012	12:48:17 AM	SiCl4 MFC set to  0.000000
6/1/2012	12:48:17 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:48:18 AM	Tube furnace set to 0
6/1/2012	12:48:48 AM	H2 valve closed
6/1/2012	12:48:48 AM	BCl3 valve closed
6/1/2012	12:48:48 AM	PH3 valve closed
6/1/2012	12:48:48 AM	SiCl4 pre valve closed
6/1/2012	12:48:48 AM	SiCl4 post valve closed
6/1/2012	12:48:48 AM	Bypass valve closed
6/1/2012	12:48:48 AM	Bubbler valve closed
6/1/2012	12:48:48 AM	Helium valve opened
6/1/2012	12:48:48 AM	Main Vac valve opened
6/1/2012	12:48:48 AM	Helium MFC set to  20.000000
6/1/2012	12:48:48 AM	H2 MFC set to  0.000000
6/1/2012	12:48:48 AM	BCl3 MFC set to  0.000000
6/1/2012	12:48:48 AM	PH3 MFC set to  0.000000
6/1/2012	12:48:48 AM	SiCl4 MFC set to  0.000000
6/1/2012	12:48:48 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:48:48 AM	Tube furnace set to 0
6/1/2012	12:49:18 AM	Helium valve closed
6/1/2012	12:49:18 AM	H2 valve closed
6/1/2012	12:49:18 AM	BCl3 valve closed
6/1/2012	12:49:18 AM	PH3 valve closed
6/1/2012	12:49:18 AM	SiCl4 pre valve closed
6/1/2012	12:49:18 AM	SiCl4 post valve closed
6/1/2012	12:49:18 AM	Bypass valve closed
6/1/2012	12:49:18 AM	Bubbler valve closed
6/1/2012	12:49:18 AM	Main Vac valve opened
6/1/2012	12:49:18 AM	Helium MFC set to  0.000000
6/1/2012	12:49:18 AM	H2 MFC set to  0.000000
6/1/2012	12:49:18 AM	BCl3 MFC set to  0.000000
6/1/2012	12:49:18 AM	PH3 MFC set to  0.000000
6/1/2012	12:49:18 AM	SiCl4 MFC set to  0.000000
6/1/2012	12:49:18 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:49:18 AM	Tube furnace set to 0
6/1/2012	12:49:48 AM	H2 valve closed
6/1/2012	12:49:48 AM	BCl3 valve closed
6/1/2012	12:49:48 AM	PH3 valve closed
6/1/2012	12:49:48 AM	SiCl4 pre valve closed
6/1/2012	12:49:48 AM	SiCl4 post valve closed
6/1/2012	12:49:48 AM	Bypass valve closed
6/1/2012	12:49:48 AM	Bubbler valve closed
6/1/2012	12:49:48 AM	Helium valve opened
6/1/2012	12:49:48 AM	Main Vac valve opened
6/1/2012	12:49:48 AM	Helium MFC set to  20.000000
6/1/2012	12:49:48 AM	H2 MFC set to  0.000000
6/1/2012	12:49:48 AM	BCl3 MFC set to  0.000000
6/1/2012	12:49:48 AM	PH3 MFC set to  0.000000
6/1/2012	12:49:48 AM	SiCl4 MFC set to  0.000000
6/1/2012	12:49:48 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:49:48 AM	Tube furnace set to 0
6/1/2012	12:50:18 AM	Helium valve closed
6/1/2012	12:50:18 AM	H2 valve closed
6/1/2012	12:50:18 AM	BCl3 valve closed
6/1/2012	12:50:18 AM	PH3 valve closed
6/1/2012	12:50:18 AM	SiCl4 pre valve closed
6/1/2012	12:50:18 AM	SiCl4 post valve closed
6/1/2012	12:50:18 AM	Bypass valve closed
6/1/2012	12:50:18 AM	Bubbler valve closed
6/1/2012	12:50:18 AM	Main Vac valve opened
6/1/2012	12:50:18 AM	Helium MFC set to  0.000000
6/1/2012	12:50:18 AM	H2 MFC set to  0.000000
6/1/2012	12:50:18 AM	BCl3 MFC set to  0.000000
6/1/2012	12:50:18 AM	PH3 MFC set to  0.000000
6/1/2012	12:50:18 AM	SiCl4 MFC set to  0.000000
6/1/2012	12:50:18 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:50:19 AM	Tube furnace set to 200
6/1/2012	12:50:49 AM	H2 valve closed
6/1/2012	12:50:49 AM	BCl3 valve closed
6/1/2012	12:50:49 AM	PH3 valve closed
6/1/2012	12:50:49 AM	SiCl4 pre valve closed
6/1/2012	12:50:49 AM	SiCl4 post valve closed
6/1/2012	12:50:49 AM	Bypass valve closed
6/1/2012	12:50:49 AM	Bubbler valve closed
6/1/2012	12:50:49 AM	Helium valve opened
6/1/2012	12:50:49 AM	Main Vac valve opened
6/1/2012	12:50:49 AM	Helium MFC set to  20.000000
6/1/2012	12:50:49 AM	H2 MFC set to  0.000000
6/1/2012	12:50:49 AM	BCl3 MFC set to  0.000000
6/1/2012	12:50:49 AM	PH3 MFC set to  0.000000
6/1/2012	12:50:49 AM	SiCl4 MFC set to  0.000000
6/1/2012	12:50:49 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:50:49 AM	Tube furnace set to 200
6/1/2012	12:51:19 AM	Helium valve closed
6/1/2012	12:51:19 AM	H2 valve closed
6/1/2012	12:51:19 AM	BCl3 valve closed
6/1/2012	12:51:19 AM	PH3 valve closed
6/1/2012	12:51:19 AM	SiCl4 pre valve closed
6/1/2012	12:51:19 AM	SiCl4 post valve closed
6/1/2012	12:51:19 AM	Bypass valve closed
6/1/2012	12:51:19 AM	Bubbler valve closed
6/1/2012	12:51:19 AM	Main Vac valve opened
6/1/2012	12:51:19 AM	Helium MFC set to  0.000000
6/1/2012	12:51:19 AM	H2 MFC set to  0.000000
6/1/2012	12:51:19 AM	BCl3 MFC set to  0.000000
6/1/2012	12:51:19 AM	PH3 MFC set to  0.000000
6/1/2012	12:51:19 AM	SiCl4 MFC set to  0.000000
6/1/2012	12:51:19 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:51:19 AM	Tube furnace set to 200
6/1/2012	12:51:49 AM	H2 valve closed
6/1/2012	12:51:49 AM	BCl3 valve closed
6/1/2012	12:51:49 AM	PH3 valve closed
6/1/2012	12:51:49 AM	SiCl4 pre valve closed
6/1/2012	12:51:49 AM	SiCl4 post valve closed
6/1/2012	12:51:49 AM	Bypass valve closed
6/1/2012	12:51:49 AM	Bubbler valve closed
6/1/2012	12:51:49 AM	Helium valve opened
6/1/2012	12:51:49 AM	Main Vac valve opened
6/1/2012	12:51:49 AM	Helium MFC set to  20.000000
6/1/2012	12:51:49 AM	H2 MFC set to  0.000000
6/1/2012	12:51:49 AM	BCl3 MFC set to  0.000000
6/1/2012	12:51:49 AM	PH3 MFC set to  0.000000
6/1/2012	12:51:49 AM	SiCl4 MFC set to  0.000000
6/1/2012	12:51:49 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:51:49 AM	Tube furnace set to 200
6/1/2012	12:52:19 AM	Helium valve closed
6/1/2012	12:52:19 AM	H2 valve closed
6/1/2012	12:52:19 AM	BCl3 valve closed
6/1/2012	12:52:19 AM	PH3 valve closed
6/1/2012	12:52:19 AM	SiCl4 pre valve closed
6/1/2012	12:52:19 AM	SiCl4 post valve closed
6/1/2012	12:52:19 AM	Bypass valve closed
6/1/2012	12:52:19 AM	Bubbler valve closed
6/1/2012	12:52:19 AM	Main Vac valve opened
6/1/2012	12:52:19 AM	Helium MFC set to  0.000000
6/1/2012	12:52:19 AM	H2 MFC set to  0.000000
6/1/2012	12:52:19 AM	BCl3 MFC set to  0.000000
6/1/2012	12:52:19 AM	PH3 MFC set to  0.000000
6/1/2012	12:52:19 AM	SiCl4 MFC set to  0.000000
6/1/2012	12:52:19 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:52:20 AM	Tube furnace set to 200
6/1/2012	12:52:50 AM	H2 valve closed
6/1/2012	12:52:50 AM	BCl3 valve closed
6/1/2012	12:52:50 AM	PH3 valve closed
6/1/2012	12:52:50 AM	SiCl4 pre valve closed
6/1/2012	12:52:50 AM	SiCl4 post valve closed
6/1/2012	12:52:50 AM	Bypass valve closed
6/1/2012	12:52:50 AM	Bubbler valve closed
6/1/2012	12:52:50 AM	Helium valve opened
6/1/2012	12:52:50 AM	Main Vac valve opened
6/1/2012	12:52:50 AM	Helium MFC set to  20.000000
6/1/2012	12:52:50 AM	H2 MFC set to  0.000000
6/1/2012	12:52:50 AM	BCl3 MFC set to  0.000000
6/1/2012	12:52:50 AM	PH3 MFC set to  0.000000
6/1/2012	12:52:50 AM	SiCl4 MFC set to  0.000000
6/1/2012	12:52:50 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:52:50 AM	Tube furnace set to 200
6/1/2012	12:53:20 AM	Helium valve closed
6/1/2012	12:53:20 AM	H2 valve closed
6/1/2012	12:53:20 AM	BCl3 valve closed
6/1/2012	12:53:20 AM	PH3 valve closed
6/1/2012	12:53:20 AM	SiCl4 pre valve closed
6/1/2012	12:53:20 AM	SiCl4 post valve closed
6/1/2012	12:53:20 AM	Bypass valve closed
6/1/2012	12:53:20 AM	Bubbler valve closed
6/1/2012	12:53:20 AM	Main Vac valve opened
6/1/2012	12:53:20 AM	Helium MFC set to  0.000000
6/1/2012	12:53:20 AM	H2 MFC set to  0.000000
6/1/2012	12:53:20 AM	BCl3 MFC set to  0.000000
6/1/2012	12:53:20 AM	PH3 MFC set to  0.000000
6/1/2012	12:53:20 AM	SiCl4 MFC set to  0.000000
6/1/2012	12:53:20 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:53:20 AM	Tube furnace set to 200
6/1/2012	12:53:50 AM	H2 valve closed
6/1/2012	12:53:50 AM	BCl3 valve closed
6/1/2012	12:53:50 AM	PH3 valve closed
6/1/2012	12:53:50 AM	SiCl4 pre valve closed
6/1/2012	12:53:50 AM	SiCl4 post valve closed
6/1/2012	12:53:50 AM	Bypass valve closed
6/1/2012	12:53:50 AM	Bubbler valve closed
6/1/2012	12:53:50 AM	Helium valve opened
6/1/2012	12:53:50 AM	Main Vac valve opened
6/1/2012	12:53:50 AM	Helium MFC set to  20.000000
6/1/2012	12:53:50 AM	H2 MFC set to  0.000000
6/1/2012	12:53:50 AM	BCl3 MFC set to  0.000000
6/1/2012	12:53:50 AM	PH3 MFC set to  0.000000
6/1/2012	12:53:50 AM	SiCl4 MFC set to  0.000000
6/1/2012	12:53:50 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:53:50 AM	Tube furnace set to 200
6/1/2012	12:54:20 AM	Helium valve closed
6/1/2012	12:54:20 AM	H2 valve closed
6/1/2012	12:54:20 AM	BCl3 valve closed
6/1/2012	12:54:20 AM	PH3 valve closed
6/1/2012	12:54:20 AM	SiCl4 pre valve closed
6/1/2012	12:54:20 AM	SiCl4 post valve closed
6/1/2012	12:54:20 AM	Bypass valve closed
6/1/2012	12:54:20 AM	Bubbler valve closed
6/1/2012	12:54:20 AM	Main Vac valve opened
6/1/2012	12:54:20 AM	Helium MFC set to  0.000000
6/1/2012	12:54:20 AM	H2 MFC set to  0.000000
6/1/2012	12:54:20 AM	BCl3 MFC set to  0.000000
6/1/2012	12:54:20 AM	PH3 MFC set to  0.000000
6/1/2012	12:54:20 AM	SiCl4 MFC set to  0.000000
6/1/2012	12:54:20 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:54:20 AM	Tube furnace set to 200
6/1/2012	12:54:51 AM	H2 valve closed
6/1/2012	12:54:51 AM	BCl3 valve closed
6/1/2012	12:54:51 AM	PH3 valve closed
6/1/2012	12:54:51 AM	SiCl4 pre valve closed
6/1/2012	12:54:51 AM	SiCl4 post valve closed
6/1/2012	12:54:51 AM	Bypass valve closed
6/1/2012	12:54:51 AM	Bubbler valve closed
6/1/2012	12:54:51 AM	Helium valve opened
6/1/2012	12:54:51 AM	Main Vac valve opened
6/1/2012	12:54:51 AM	Helium MFC set to  20.000000
6/1/2012	12:54:51 AM	H2 MFC set to  0.000000
6/1/2012	12:54:51 AM	BCl3 MFC set to  0.000000
6/1/2012	12:54:51 AM	PH3 MFC set to  0.000000
6/1/2012	12:54:51 AM	SiCl4 MFC set to  0.000000
6/1/2012	12:54:51 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:54:51 AM	Tube furnace set to 200
6/1/2012	12:55:21 AM	Helium valve closed
6/1/2012	12:55:21 AM	H2 valve closed
6/1/2012	12:55:21 AM	BCl3 valve closed
6/1/2012	12:55:21 AM	PH3 valve closed
6/1/2012	12:55:21 AM	SiCl4 pre valve closed
6/1/2012	12:55:21 AM	SiCl4 post valve closed
6/1/2012	12:55:21 AM	Bypass valve closed
6/1/2012	12:55:21 AM	Bubbler valve closed
6/1/2012	12:55:21 AM	Main Vac valve opened
6/1/2012	12:55:21 AM	Helium MFC set to  0.000000
6/1/2012	12:55:21 AM	H2 MFC set to  0.000000
6/1/2012	12:55:21 AM	BCl3 MFC set to  0.000000
6/1/2012	12:55:21 AM	PH3 MFC set to  0.000000
6/1/2012	12:55:21 AM	SiCl4 MFC set to  0.000000
6/1/2012	12:55:21 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:55:21 AM	Tube furnace set to 200
6/1/2012	12:55:51 AM	H2 valve closed
6/1/2012	12:55:51 AM	BCl3 valve closed
6/1/2012	12:55:51 AM	PH3 valve closed
6/1/2012	12:55:51 AM	SiCl4 pre valve closed
6/1/2012	12:55:51 AM	SiCl4 post valve closed
6/1/2012	12:55:51 AM	Bypass valve closed
6/1/2012	12:55:51 AM	Bubbler valve closed
6/1/2012	12:55:51 AM	Helium valve opened
6/1/2012	12:55:51 AM	Main Vac valve opened
6/1/2012	12:55:51 AM	Helium MFC set to  20.000000
6/1/2012	12:55:51 AM	H2 MFC set to  0.000000
6/1/2012	12:55:51 AM	BCl3 MFC set to  0.000000
6/1/2012	12:55:51 AM	PH3 MFC set to  0.000000
6/1/2012	12:55:51 AM	SiCl4 MFC set to  0.000000
6/1/2012	12:55:51 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:55:51 AM	Tube furnace set to 200
6/1/2012	12:56:21 AM	Helium valve closed
6/1/2012	12:56:21 AM	H2 valve closed
6/1/2012	12:56:21 AM	BCl3 valve closed
6/1/2012	12:56:21 AM	PH3 valve closed
6/1/2012	12:56:21 AM	SiCl4 pre valve closed
6/1/2012	12:56:21 AM	SiCl4 post valve closed
6/1/2012	12:56:21 AM	Bypass valve closed
6/1/2012	12:56:21 AM	Bubbler valve closed
6/1/2012	12:56:21 AM	Main Vac valve opened
6/1/2012	12:56:21 AM	Helium MFC set to  0.000000
6/1/2012	12:56:21 AM	H2 MFC set to  0.000000
6/1/2012	12:56:21 AM	BCl3 MFC set to  0.000000
6/1/2012	12:56:21 AM	PH3 MFC set to  0.000000
6/1/2012	12:56:21 AM	SiCl4 MFC set to  0.000000
6/1/2012	12:56:21 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:56:21 AM	Tube furnace set to 0
6/1/2012	12:56:22 AM	Run finished at 12:56 AM
6/1/2012	1:08:30 AM	Main Vac valve closed
6/1/2012	1:08:54 AM	Main Vac valve opened
6/1/2012	1:11:33 AM	Recipe started at 1:11 AM
6/1/2012	1:11:33 AM	Helium valve closed
6/1/2012	1:11:33 AM	H2 valve closed
6/1/2012	1:11:33 AM	BCl3 valve closed
6/1/2012	1:11:33 AM	PH3 valve closed
6/1/2012	1:11:33 AM	SiCl4 pre valve closed
6/1/2012	1:11:33 AM	SiCl4 post valve closed
6/1/2012	1:11:33 AM	Main Vac valve closed
6/1/2012	1:11:33 AM	Bypass valve closed
6/1/2012	1:11:33 AM	Bubbler valve closed
6/1/2012	1:11:33 AM	Helium MFC set to  0.000000
6/1/2012	1:11:33 AM	H2 MFC set to  0.000000
6/1/2012	1:11:33 AM	BCl3 MFC set to  0.000000
6/1/2012	1:11:33 AM	PH3 MFC set to  0.000000
6/1/2012	1:11:33 AM	SiCl4 MFC set to  0.000000
6/1/2012	1:11:33 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	1:11:33 AM	Tube furnace set to 0
6/1/2012	1:11:36 AM	Helium valve closed
6/1/2012	1:11:36 AM	BCl3 valve closed
6/1/2012	1:11:36 AM	PH3 valve closed
6/1/2012	1:11:36 AM	SiCl4 pre valve closed
6/1/2012	1:11:36 AM	SiCl4 post valve closed
6/1/2012	1:11:36 AM	Main Vac valve closed
6/1/2012	1:11:36 AM	Bypass valve closed
6/1/2012	1:11:36 AM	Bubbler valve closed
6/1/2012	1:11:36 AM	H2 valve opened
6/1/2012	1:11:36 AM	Helium MFC set to  0.000000
6/1/2012	1:11:36 AM	H2 MFC set to  500.000000
6/1/2012	1:11:36 AM	BCl3 MFC set to  0.000000
6/1/2012	1:11:36 AM	PH3 MFC set to  0.000000
6/1/2012	1:11:36 AM	SiCl4 MFC set to  0.000000
6/1/2012	1:11:36 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	1:11:36 AM	Tube furnace set to 0
6/1/2012	1:12:48 AM	Helium valve closed
6/1/2012	1:12:49 AM	BCl3 valve closed
6/1/2012	1:12:49 AM	PH3 valve closed
6/1/2012	1:12:49 AM	SiCl4 pre valve closed
6/1/2012	1:12:49 AM	SiCl4 post valve closed
6/1/2012	1:12:49 AM	Main Vac valve closed
6/1/2012	1:12:49 AM	Bypass valve closed
6/1/2012	1:12:49 AM	H2 valve opened
6/1/2012	1:12:49 AM	Bubbler valve opened
6/1/2012	1:12:49 AM	Helium MFC set to  0.000000
6/1/2012	1:12:49 AM	H2 MFC set to  500.000000
6/1/2012	1:12:49 AM	BCl3 MFC set to  0.000000
6/1/2012	1:12:49 AM	PH3 MFC set to  0.000000
6/1/2012	1:12:49 AM	SiCl4 MFC set to  0.000000
6/1/2012	1:12:49 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	1:12:49 AM	Tube furnace set to 0
6/1/2012	1:12:50 AM	Helium valve closed
6/1/2012	1:12:50 AM	BCl3 valve closed
6/1/2012	1:12:50 AM	PH3 valve closed
6/1/2012	1:12:50 AM	SiCl4 pre valve closed
6/1/2012	1:12:50 AM	SiCl4 post valve closed
6/1/2012	1:12:50 AM	Main Vac valve closed
6/1/2012	1:12:50 AM	Bypass valve closed
6/1/2012	1:12:50 AM	H2 valve opened
6/1/2012	1:12:50 AM	Bubbler valve opened
6/1/2012	1:12:50 AM	Helium MFC set to  0.000000
6/1/2012	1:12:50 AM	H2 MFC set to  500.000000
6/1/2012	1:12:50 AM	BCl3 MFC set to  0.000000
6/1/2012	1:12:50 AM	PH3 MFC set to  0.000000
6/1/2012	1:12:50 AM	SiCl4 MFC set to  0.000000
6/1/2012	1:12:50 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	1:12:50 AM	Tube furnace set to 1000
6/1/2012	1:32:50 AM	Helium valve closed
6/1/2012	1:32:50 AM	BCl3 valve closed
6/1/2012	1:32:50 AM	Main Vac valve closed
6/1/2012	1:32:50 AM	Bypass valve closed
6/1/2012	1:32:50 AM	H2 valve opened
6/1/2012	1:32:50 AM	PH3 valve opened
6/1/2012	1:32:50 AM	SiCl4 pre valve opened
6/1/2012	1:32:50 AM	SiCl4 post valve opened
6/1/2012	1:32:50 AM	Bubbler valve opened
6/1/2012	1:32:50 AM	Helium MFC set to  0.000000
6/1/2012	1:32:50 AM	H2 MFC set to  500.000000
6/1/2012	1:32:50 AM	BCl3 MFC set to  0.000000
6/1/2012	1:32:50 AM	PH3 MFC set to  20.000000
6/1/2012	1:32:50 AM	SiCl4 MFC set to  25.000000
6/1/2012	1:32:50 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	1:32:50 AM	Tube furnace set to 1000
6/1/2012	1:34:20 AM	Helium valve closed
6/1/2012	1:34:20 AM	BCl3 valve closed
6/1/2012	1:34:20 AM	PH3 valve closed
6/1/2012	1:34:20 AM	Main Vac valve closed
6/1/2012	1:34:20 AM	Bypass valve closed
6/1/2012	1:34:20 AM	H2 valve opened
6/1/2012	1:34:20 AM	SiCl4 pre valve opened
6/1/2012	1:34:20 AM	SiCl4 post valve opened
6/1/2012	1:34:20 AM	Bubbler valve opened
6/1/2012	1:34:20 AM	Helium MFC set to  0.000000
6/1/2012	1:34:20 AM	H2 MFC set to  500.000000
6/1/2012	1:34:20 AM	BCl3 MFC set to  0.000000
6/1/2012	1:34:20 AM	PH3 MFC set to  0.000000
6/1/2012	1:34:20 AM	SiCl4 MFC set to  25.000000
6/1/2012	1:34:20 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	1:34:20 AM	Tube furnace set to 1000
6/1/2012	1:59:20 AM	Helium valve closed
6/1/2012	1:59:20 AM	BCl3 valve closed
6/1/2012	1:59:20 AM	PH3 valve closed
6/1/2012	1:59:20 AM	SiCl4 pre valve closed
6/1/2012	1:59:20 AM	SiCl4 post valve closed
6/1/2012	1:59:20 AM	Main Vac valve closed
6/1/2012	1:59:20 AM	Bypass valve closed
6/1/2012	1:59:20 AM	H2 valve opened
6/1/2012	1:59:20 AM	Bubbler valve opened
6/1/2012	1:59:20 AM	Helium MFC set to  0.000000
6/1/2012	1:59:20 AM	H2 MFC set to  500.000000
6/1/2012	1:59:20 AM	BCl3 MFC set to  0.000000
6/1/2012	1:59:20 AM	PH3 MFC set to  0.000000
6/1/2012	1:59:20 AM	SiCl4 MFC set to  0.000000
6/1/2012	1:59:20 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	1:59:21 AM	Tube furnace set to 950
6/1/2012	2:01:21 AM	Helium valve closed
6/1/2012	2:01:21 AM	BCl3 valve closed
6/1/2012	2:01:21 AM	PH3 valve closed
6/1/2012	2:01:21 AM	SiCl4 pre valve closed
6/1/2012	2:01:21 AM	SiCl4 post valve closed
6/1/2012	2:01:21 AM	Main Vac valve closed
6/1/2012	2:01:21 AM	Bypass valve closed
6/1/2012	2:01:21 AM	H2 valve opened
6/1/2012	2:01:21 AM	Bubbler valve opened
6/1/2012	2:01:21 AM	Helium MFC set to  0.000000
6/1/2012	2:01:21 AM	H2 MFC set to  500.000000
6/1/2012	2:01:21 AM	BCl3 MFC set to  0.000000
6/1/2012	2:01:21 AM	PH3 MFC set to  0.000000
6/1/2012	2:01:21 AM	SiCl4 MFC set to  0.000000
6/1/2012	2:01:21 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	2:01:21 AM	Tube furnace set to 900
6/1/2012	2:03:21 AM	Helium valve closed
6/1/2012	2:03:21 AM	BCl3 valve closed
6/1/2012	2:03:21 AM	PH3 valve closed
6/1/2012	2:03:21 AM	SiCl4 pre valve closed
6/1/2012	2:03:21 AM	SiCl4 post valve closed
6/1/2012	2:03:21 AM	Main Vac valve closed
6/1/2012	2:03:21 AM	Bypass valve closed
6/1/2012	2:03:21 AM	H2 valve opened
6/1/2012	2:03:21 AM	Bubbler valve opened
6/1/2012	2:03:21 AM	Helium MFC set to  0.000000
6/1/2012	2:03:21 AM	H2 MFC set to  500.000000
6/1/2012	2:03:21 AM	BCl3 MFC set to  0.000000
6/1/2012	2:03:21 AM	PH3 MFC set to  0.000000
6/1/2012	2:03:21 AM	SiCl4 MFC set to  0.000000
6/1/2012	2:03:21 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	2:03:21 AM	Tube furnace set to 850
6/1/2012	2:05:21 AM	H2 valve closed
6/1/2012	2:05:21 AM	BCl3 valve closed
6/1/2012	2:05:21 AM	PH3 valve closed
6/1/2012	2:05:21 AM	SiCl4 pre valve closed
6/1/2012	2:05:21 AM	SiCl4 post valve closed
6/1/2012	2:05:21 AM	Main Vac valve closed
6/1/2012	2:05:21 AM	Bypass valve closed
6/1/2012	2:05:21 AM	Helium valve opened
6/1/2012	2:05:21 AM	Bubbler valve opened
6/1/2012	2:05:21 AM	Helium MFC set to  500.000000
6/1/2012	2:05:21 AM	H2 MFC set to  0.000000
6/1/2012	2:05:21 AM	BCl3 MFC set to  0.000000
6/1/2012	2:05:21 AM	PH3 MFC set to  0.000000
6/1/2012	2:05:21 AM	SiCl4 MFC set to  0.000000
6/1/2012	2:05:21 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	2:05:21 AM	Tube furnace set to 800
6/1/2012	2:07:21 AM	H2 valve closed
6/1/2012	2:07:21 AM	BCl3 valve closed
6/1/2012	2:07:21 AM	PH3 valve closed
6/1/2012	2:07:21 AM	SiCl4 pre valve closed
6/1/2012	2:07:21 AM	SiCl4 post valve closed
6/1/2012	2:07:21 AM	Main Vac valve closed
6/1/2012	2:07:21 AM	Bypass valve closed
6/1/2012	2:07:21 AM	Helium valve opened
6/1/2012	2:07:21 AM	Bubbler valve opened
6/1/2012	2:07:21 AM	Helium MFC set to  500.000000
6/1/2012	2:07:21 AM	H2 MFC set to  0.000000
6/1/2012	2:07:21 AM	BCl3 MFC set to  0.000000
6/1/2012	2:07:21 AM	PH3 MFC set to  0.000000
6/1/2012	2:07:21 AM	SiCl4 MFC set to  0.000000
6/1/2012	2:07:21 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	2:07:22 AM	Tube furnace set to 750
6/1/2012	2:09:22 AM	H2 valve closed
6/1/2012	2:09:22 AM	BCl3 valve closed
6/1/2012	2:09:22 AM	PH3 valve closed
6/1/2012	2:09:22 AM	SiCl4 pre valve closed
6/1/2012	2:09:22 AM	SiCl4 post valve closed
6/1/2012	2:09:22 AM	Main Vac valve closed
6/1/2012	2:09:22 AM	Bypass valve closed
6/1/2012	2:09:22 AM	Helium valve opened
6/1/2012	2:09:22 AM	Bubbler valve opened
6/1/2012	2:09:22 AM	Helium MFC set to  500.000000
6/1/2012	2:09:22 AM	H2 MFC set to  0.000000
6/1/2012	2:09:22 AM	BCl3 MFC set to  0.000000
6/1/2012	2:09:22 AM	PH3 MFC set to  0.000000
6/1/2012	2:09:22 AM	SiCl4 MFC set to  0.000000
6/1/2012	2:09:22 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	2:09:22 AM	Tube furnace set to 0
6/1/2012	2:29:22 AM	Helium valve closed
6/1/2012	2:29:22 AM	H2 valve closed
6/1/2012	2:29:22 AM	BCl3 valve closed
6/1/2012	2:29:22 AM	PH3 valve closed
6/1/2012	2:29:22 AM	SiCl4 pre valve closed
6/1/2012	2:29:22 AM	SiCl4 post valve closed
6/1/2012	2:29:22 AM	Main Vac valve closed
6/1/2012	2:29:22 AM	Bypass valve closed
6/1/2012	2:29:22 AM	Bubbler valve closed
6/1/2012	2:29:22 AM	Helium MFC set to  0.000000
6/1/2012	2:29:22 AM	H2 MFC set to  0.000000
6/1/2012	2:29:22 AM	BCl3 MFC set to  0.000000
6/1/2012	2:29:22 AM	PH3 MFC set to  0.000000
6/1/2012	2:29:22 AM	SiCl4 MFC set to  0.000000
6/1/2012	2:29:22 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	2:29:22 AM	Tube furnace set to 0
6/1/2012	2:29:23 AM	Run finished at 2:29 AM
6/1/2012	2:34:03 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/1/2012	2:34:04 AM	Recipe started at 2:34 AM
6/1/2012	2:34:04 AM	Helium valve closed
6/1/2012	2:34:04 AM	H2 valve closed
6/1/2012	2:34:04 AM	BCl3 valve closed
6/1/2012	2:34:04 AM	PH3 valve closed
6/1/2012	2:34:04 AM	SiCl4 pre valve closed
6/1/2012	2:34:04 AM	SiCl4 post valve closed
6/1/2012	2:34:04 AM	Main Vac valve closed
6/1/2012	2:34:04 AM	Bypass valve closed
6/1/2012	2:34:04 AM	Bubbler valve closed
6/1/2012	2:34:04 AM	Helium MFC set to  0.000000
6/1/2012	2:34:04 AM	H2 MFC set to  0.000000
6/1/2012	2:34:04 AM	BCl3 MFC set to  0.000000
6/1/2012	2:34:04 AM	PH3 MFC set to  0.000000
6/1/2012	2:34:04 AM	SiCl4 MFC set to  0.000000
6/1/2012	2:34:04 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	2:34:04 AM	Tube furnace set to 0
6/1/2012	2:34:07 AM	H2 valve closed
6/1/2012	2:34:07 AM	BCl3 valve closed
6/1/2012	2:34:07 AM	PH3 valve closed
6/1/2012	2:34:07 AM	SiCl4 pre valve closed
6/1/2012	2:34:07 AM	SiCl4 post valve closed
6/1/2012	2:34:07 AM	Main Vac valve closed
6/1/2012	2:34:07 AM	Bypass valve closed
6/1/2012	2:34:07 AM	Bubbler valve closed
6/1/2012	2:34:07 AM	Helium valve opened
6/1/2012	2:34:07 AM	Helium MFC set to  500.000000
6/1/2012	2:34:07 AM	H2 MFC set to  0.000000
6/1/2012	2:34:07 AM	BCl3 MFC set to  0.000000
6/1/2012	2:34:07 AM	PH3 MFC set to  0.000000
6/1/2012	2:34:07 AM	SiCl4 MFC set to  0.000000
6/1/2012	2:34:07 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	2:34:08 AM	Tube furnace set to 0
6/1/2012	2:34:08 AM	Helium valve closed
6/1/2012	2:34:08 AM	H2 valve closed
6/1/2012	2:34:08 AM	BCl3 valve closed
6/1/2012	2:34:08 AM	PH3 valve closed
6/1/2012	2:34:08 AM	SiCl4 pre valve closed
6/1/2012	2:34:08 AM	SiCl4 post valve closed
6/1/2012	2:34:08 AM	Main Vac valve closed
6/1/2012	2:34:08 AM	Bypass valve closed
6/1/2012	2:34:08 AM	Bubbler valve closed
6/1/2012	2:34:08 AM	Helium MFC set to  0.000000
6/1/2012	2:34:08 AM	H2 MFC set to  0.000000
6/1/2012	2:34:08 AM	BCl3 MFC set to  0.000000
6/1/2012	2:34:08 AM	PH3 MFC set to  0.000000
6/1/2012	2:34:08 AM	SiCl4 MFC set to  0.000000
6/1/2012	2:34:08 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	2:34:08 AM	Tube furnace set to 0
6/1/2012	2:34:09 AM	Run finished at 2:34 AM
6/1/2012	2:34:09 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/1/2012	2:36:11 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/1/2012	2:36:12 AM	Recipe started at 2:36 AM
6/1/2012	2:36:12 AM	Helium valve closed
6/1/2012	2:36:12 AM	H2 valve closed
6/1/2012	2:36:12 AM	BCl3 valve closed
6/1/2012	2:36:12 AM	PH3 valve closed
6/1/2012	2:36:12 AM	SiCl4 pre valve closed
6/1/2012	2:36:12 AM	SiCl4 post valve closed
6/1/2012	2:36:12 AM	Main Vac valve closed
6/1/2012	2:36:12 AM	Bubbler valve closed
6/1/2012	2:36:12 AM	Bypass valve opened
6/1/2012	2:36:12 AM	Helium MFC set to  0.000000
6/1/2012	2:36:12 AM	H2 MFC set to  0.000000
6/1/2012	2:36:12 AM	BCl3 MFC set to  0.000000
6/1/2012	2:36:12 AM	PH3 MFC set to  0.000000
6/1/2012	2:36:12 AM	SiCl4 MFC set to  0.000000
6/1/2012	2:36:12 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	2:36:12 AM	Tube furnace set to 0
6/1/2012	2:37:15 AM	Helium valve closed
6/1/2012	2:37:15 AM	H2 valve closed
6/1/2012	2:37:15 AM	BCl3 valve closed
6/1/2012	2:37:15 AM	PH3 valve closed
6/1/2012	2:37:15 AM	SiCl4 pre valve closed
6/1/2012	2:37:15 AM	SiCl4 post valve closed
6/1/2012	2:37:15 AM	Main Vac valve closed
6/1/2012	2:37:15 AM	Bubbler valve closed
6/1/2012	2:37:15 AM	Bypass valve opened
6/1/2012	2:37:15 AM	Helium MFC set to  0.000000
6/1/2012	2:37:15 AM	H2 MFC set to  0.000000
6/1/2012	2:37:15 AM	BCl3 MFC set to  0.000000
6/1/2012	2:37:15 AM	PH3 MFC set to  0.000000
6/1/2012	2:37:15 AM	SiCl4 MFC set to  0.000000
6/1/2012	2:37:15 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	2:37:15 AM	Tube furnace set to 0
6/1/2012	2:38:15 AM	Helium valve closed
6/1/2012	2:38:15 AM	H2 valve closed
6/1/2012	2:38:15 AM	BCl3 valve closed
6/1/2012	2:38:15 AM	PH3 valve closed
6/1/2012	2:38:15 AM	SiCl4 pre valve closed
6/1/2012	2:38:15 AM	SiCl4 post valve closed
6/1/2012	2:38:15 AM	Bypass valve closed
6/1/2012	2:38:15 AM	Bubbler valve closed
6/1/2012	2:38:15 AM	Main Vac valve opened
6/1/2012	2:38:15 AM	Helium MFC set to  0.000000
6/1/2012	2:38:15 AM	H2 MFC set to  0.000000
6/1/2012	2:38:15 AM	BCl3 MFC set to  0.000000
6/1/2012	2:38:15 AM	PH3 MFC set to  0.000000
6/1/2012	2:38:15 AM	SiCl4 MFC set to  0.000000
6/1/2012	2:38:15 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	2:38:15 AM	Tube furnace set to 0
6/1/2012	2:38:16 AM	Run finished at 2:38 AM
6/1/2012	2:38:16 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/1/2012	9:15:34 AM	Recipe started at 9:15 AM
6/1/2012	9:15:34 AM	Helium valve closed
6/1/2012	9:15:34 AM	H2 valve closed
6/1/2012	9:15:34 AM	BCl3 valve closed
6/1/2012	9:15:34 AM	PH3 valve closed
6/1/2012	9:15:34 AM	SiCl4 pre valve closed
6/1/2012	9:15:34 AM	SiCl4 post valve closed
6/1/2012	9:15:34 AM	Bypass valve closed
6/1/2012	9:15:34 AM	Bubbler valve closed
6/1/2012	9:15:34 AM	Main Vac valve opened
6/1/2012	9:15:34 AM	Helium MFC set to  0.000000
6/1/2012	9:15:34 AM	H2 MFC set to  0.000000
6/1/2012	9:15:34 AM	BCl3 MFC set to  0.000000
6/1/2012	9:15:34 AM	PH3 MFC set to  0.000000
6/1/2012	9:15:34 AM	SiCl4 MFC set to  0.000000
6/1/2012	9:15:34 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	9:15:34 AM	Tube furnace set to 0
6/1/2012	9:15:36 AM	H2 valve closed
6/1/2012	9:15:36 AM	BCl3 valve closed
6/1/2012	9:15:36 AM	PH3 valve closed
6/1/2012	9:15:36 AM	SiCl4 pre valve closed
6/1/2012	9:15:36 AM	SiCl4 post valve closed
6/1/2012	9:15:36 AM	Bypass valve closed
6/1/2012	9:15:36 AM	Bubbler valve closed
6/1/2012	9:15:36 AM	Helium valve opened
6/1/2012	9:15:36 AM	Main Vac valve opened
6/1/2012	9:15:36 AM	Helium MFC set to  20.000000
6/1/2012	9:15:36 AM	H2 MFC set to  0.000000
6/1/2012	9:15:36 AM	BCl3 MFC set to  0.000000
6/1/2012	9:15:36 AM	PH3 MFC set to  0.000000
6/1/2012	9:15:37 AM	SiCl4 MFC set to  0.000000
6/1/2012	9:15:37 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	9:15:37 AM	Tube furnace set to 0
6/1/2012	9:15:37 AM	Helium valve closed
6/1/2012	9:15:37 AM	H2 valve closed
6/1/2012	9:15:37 AM	BCl3 valve closed
6/1/2012	9:15:37 AM	PH3 valve closed
6/1/2012	9:15:37 AM	SiCl4 pre valve closed
6/1/2012	9:15:37 AM	SiCl4 post valve closed
6/1/2012	9:15:37 AM	Bypass valve closed
6/1/2012	9:15:37 AM	Bubbler valve closed
6/1/2012	9:15:37 AM	Main Vac valve opened
6/1/2012	9:15:37 AM	Helium MFC set to  0.000000
6/1/2012	9:15:37 AM	H2 MFC set to  0.000000
6/1/2012	9:15:37 AM	BCl3 MFC set to  0.000000
6/1/2012	9:15:37 AM	PH3 MFC set to  0.000000
6/1/2012	9:15:37 AM	SiCl4 MFC set to  0.000000
6/1/2012	9:15:37 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	9:15:37 AM	Tube furnace set to 0
6/1/2012	9:15:38 AM	H2 valve closed
6/1/2012	9:15:38 AM	BCl3 valve closed
6/1/2012	9:15:38 AM	PH3 valve closed
6/1/2012	9:15:38 AM	SiCl4 pre valve closed
6/1/2012	9:15:38 AM	SiCl4 post valve closed
6/1/2012	9:15:38 AM	Bypass valve closed
6/1/2012	9:15:38 AM	Bubbler valve closed
6/1/2012	9:15:38 AM	Helium valve opened
6/1/2012	9:15:38 AM	Main Vac valve opened
6/1/2012	9:15:38 AM	Helium MFC set to  20.000000
6/1/2012	9:15:38 AM	H2 MFC set to  0.000000
6/1/2012	9:15:38 AM	BCl3 MFC set to  0.000000
6/1/2012	9:15:38 AM	PH3 MFC set to  0.000000
6/1/2012	9:15:38 AM	SiCl4 MFC set to  0.000000
6/1/2012	9:15:38 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	9:15:38 AM	Tube furnace set to 0
6/1/2012	9:15:38 AM	Helium valve closed
6/1/2012	9:15:38 AM	H2 valve closed
6/1/2012	9:15:38 AM	BCl3 valve closed
6/1/2012	9:15:38 AM	PH3 valve closed
6/1/2012	9:15:38 AM	SiCl4 pre valve closed
6/1/2012	9:15:38 AM	SiCl4 post valve closed
6/1/2012	9:15:38 AM	Bypass valve closed
6/1/2012	9:15:38 AM	Bubbler valve closed
6/1/2012	9:15:38 AM	Main Vac valve opened
6/1/2012	9:15:38 AM	Helium MFC set to  0.000000
6/1/2012	9:15:38 AM	H2 MFC set to  0.000000
6/1/2012	9:15:38 AM	BCl3 MFC set to  0.000000
6/1/2012	9:15:38 AM	PH3 MFC set to  0.000000
6/1/2012	9:15:38 AM	SiCl4 MFC set to  0.000000
6/1/2012	9:15:38 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	9:15:39 AM	Tube furnace set to 0
6/1/2012	9:15:39 AM	H2 valve closed
6/1/2012	9:15:39 AM	BCl3 valve closed
6/1/2012	9:15:39 AM	PH3 valve closed
6/1/2012	9:15:39 AM	SiCl4 pre valve closed
6/1/2012	9:15:39 AM	SiCl4 post valve closed
6/1/2012	9:15:39 AM	Bypass valve closed
6/1/2012	9:15:39 AM	Bubbler valve closed
6/1/2012	9:15:39 AM	Helium valve opened
6/1/2012	9:15:39 AM	Main Vac valve opened
6/1/2012	9:15:39 AM	Helium MFC set to  20.000000
6/1/2012	9:15:39 AM	H2 MFC set to  0.000000
6/1/2012	9:15:39 AM	BCl3 MFC set to  0.000000
6/1/2012	9:15:39 AM	PH3 MFC set to  0.000000
6/1/2012	9:15:39 AM	SiCl4 MFC set to  0.000000
6/1/2012	9:15:39 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	9:15:39 AM	Tube furnace set to 0
6/1/2012	9:15:40 AM	Helium valve closed
6/1/2012	9:15:40 AM	H2 valve closed
6/1/2012	9:15:40 AM	BCl3 valve closed
6/1/2012	9:15:40 AM	PH3 valve closed
6/1/2012	9:15:40 AM	SiCl4 pre valve closed
6/1/2012	9:15:40 AM	SiCl4 post valve closed
6/1/2012	9:15:40 AM	Bypass valve closed
6/1/2012	9:15:40 AM	Bubbler valve closed
6/1/2012	9:15:40 AM	Main Vac valve opened
6/1/2012	9:15:40 AM	Helium MFC set to  0.000000
6/1/2012	9:15:40 AM	H2 MFC set to  0.000000
6/1/2012	9:15:40 AM	BCl3 MFC set to  0.000000
6/1/2012	9:15:40 AM	PH3 MFC set to  0.000000
6/1/2012	9:15:40 AM	SiCl4 MFC set to  0.000000
6/1/2012	9:15:40 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	9:15:40 AM	Tube furnace set to 0
6/1/2012	9:15:40 AM	H2 valve closed
6/1/2012	9:15:40 AM	BCl3 valve closed
6/1/2012	9:15:40 AM	PH3 valve closed
6/1/2012	9:15:40 AM	SiCl4 pre valve closed
6/1/2012	9:15:40 AM	SiCl4 post valve closed
6/1/2012	9:15:40 AM	Bypass valve closed
6/1/2012	9:15:40 AM	Bubbler valve closed
6/1/2012	9:15:40 AM	Helium valve opened
6/1/2012	9:15:40 AM	Main Vac valve opened
6/1/2012	9:15:40 AM	Helium MFC set to  20.000000
6/1/2012	9:15:40 AM	H2 MFC set to  0.000000
6/1/2012	9:15:40 AM	BCl3 MFC set to  0.000000
6/1/2012	9:15:40 AM	PH3 MFC set to  0.000000
6/1/2012	9:15:40 AM	SiCl4 MFC set to  0.000000
6/1/2012	9:15:40 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	9:15:40 AM	Tube furnace set to 0
6/1/2012	9:15:41 AM	Helium valve closed
6/1/2012	9:15:41 AM	H2 valve closed
6/1/2012	9:15:41 AM	BCl3 valve closed
6/1/2012	9:15:41 AM	PH3 valve closed
6/1/2012	9:15:41 AM	SiCl4 pre valve closed
6/1/2012	9:15:41 AM	SiCl4 post valve closed
6/1/2012	9:15:41 AM	Bypass valve closed
6/1/2012	9:15:41 AM	Bubbler valve closed
6/1/2012	9:15:41 AM	Main Vac valve opened
6/1/2012	9:15:41 AM	Helium MFC set to  0.000000
6/1/2012	9:15:41 AM	H2 MFC set to  0.000000
6/1/2012	9:15:41 AM	BCl3 MFC set to  0.000000
6/1/2012	9:15:41 AM	PH3 MFC set to  0.000000
6/1/2012	9:15:41 AM	SiCl4 MFC set to  0.000000
6/1/2012	9:15:41 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	9:15:41 AM	Tube furnace set to 0
6/1/2012	9:15:41 AM	H2 valve closed
6/1/2012	9:15:41 AM	BCl3 valve closed
6/1/2012	9:15:41 AM	PH3 valve closed
6/1/2012	9:15:41 AM	SiCl4 pre valve closed
6/1/2012	9:15:41 AM	SiCl4 post valve closed
6/1/2012	9:15:41 AM	Bypass valve closed
6/1/2012	9:15:41 AM	Bubbler valve closed
6/1/2012	9:15:41 AM	Helium valve opened
6/1/2012	9:15:41 AM	Main Vac valve opened
6/1/2012	9:15:41 AM	Helium MFC set to  20.000000
6/1/2012	9:15:41 AM	H2 MFC set to  0.000000
6/1/2012	9:15:41 AM	BCl3 MFC set to  0.000000
6/1/2012	9:15:41 AM	PH3 MFC set to  0.000000
6/1/2012	9:15:41 AM	SiCl4 MFC set to  0.000000
6/1/2012	9:15:41 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	9:15:42 AM	Tube furnace set to 0
6/1/2012	9:15:42 AM	Helium valve closed
6/1/2012	9:15:42 AM	H2 valve closed
6/1/2012	9:15:42 AM	BCl3 valve closed
6/1/2012	9:15:42 AM	PH3 valve closed
6/1/2012	9:15:42 AM	SiCl4 pre valve closed
6/1/2012	9:15:42 AM	SiCl4 post valve closed
6/1/2012	9:15:42 AM	Bypass valve closed
6/1/2012	9:15:42 AM	Bubbler valve closed
6/1/2012	9:15:42 AM	Main Vac valve opened
6/1/2012	9:15:42 AM	Helium MFC set to  0.000000
6/1/2012	9:15:42 AM	H2 MFC set to  0.000000
6/1/2012	9:15:42 AM	BCl3 MFC set to  0.000000
6/1/2012	9:15:42 AM	PH3 MFC set to  0.000000
6/1/2012	9:15:42 AM	SiCl4 MFC set to  0.000000
6/1/2012	9:15:42 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	9:15:42 AM	Tube furnace set to 0
6/1/2012	9:15:43 AM	H2 valve closed
6/1/2012	9:15:43 AM	BCl3 valve closed
6/1/2012	9:15:43 AM	PH3 valve closed
6/1/2012	9:15:43 AM	SiCl4 pre valve closed
6/1/2012	9:15:43 AM	SiCl4 post valve closed
6/1/2012	9:15:43 AM	Bypass valve closed
6/1/2012	9:15:43 AM	Bubbler valve closed
6/1/2012	9:15:43 AM	Helium valve opened
6/1/2012	9:15:43 AM	Main Vac valve opened
6/1/2012	9:15:43 AM	Helium MFC set to  20.000000
6/1/2012	9:15:43 AM	H2 MFC set to  0.000000
6/1/2012	9:15:43 AM	BCl3 MFC set to  0.000000
6/1/2012	9:15:43 AM	PH3 MFC set to  0.000000
6/1/2012	9:15:43 AM	SiCl4 MFC set to  0.000000
6/1/2012	9:15:43 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	9:15:43 AM	Tube furnace set to 0
6/1/2012	9:15:45 AM	Helium valve closed
6/1/2012	9:15:45 AM	H2 valve closed
6/1/2012	9:15:45 AM	BCl3 valve closed
6/1/2012	9:15:45 AM	PH3 valve closed
6/1/2012	9:15:45 AM	SiCl4 pre valve closed
6/1/2012	9:15:45 AM	SiCl4 post valve closed
6/1/2012	9:15:45 AM	Bypass valve closed
6/1/2012	9:15:45 AM	Bubbler valve closed
6/1/2012	9:15:45 AM	Main Vac valve opened
6/1/2012	9:15:45 AM	Helium MFC set to  0.000000
6/1/2012	9:15:45 AM	H2 MFC set to  0.000000
6/1/2012	9:15:45 AM	BCl3 MFC set to  0.000000
6/1/2012	9:15:45 AM	PH3 MFC set to  0.000000
6/1/2012	9:15:45 AM	SiCl4 MFC set to  0.000000
6/1/2012	9:15:45 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	9:15:45 AM	Tube furnace set to 0
6/1/2012	9:15:46 AM	H2 valve closed
6/1/2012	9:15:46 AM	BCl3 valve closed
6/1/2012	9:15:46 AM	PH3 valve closed
6/1/2012	9:15:46 AM	SiCl4 pre valve closed
6/1/2012	9:15:46 AM	SiCl4 post valve closed
6/1/2012	9:15:46 AM	Bypass valve closed
6/1/2012	9:15:46 AM	Bubbler valve closed
6/1/2012	9:15:46 AM	Helium valve opened
6/1/2012	9:15:46 AM	Main Vac valve opened
6/1/2012	9:15:46 AM	Helium MFC set to  20.000000
6/1/2012	9:15:46 AM	H2 MFC set to  0.000000
6/1/2012	9:15:46 AM	BCl3 MFC set to  0.000000
6/1/2012	9:15:46 AM	PH3 MFC set to  0.000000
6/1/2012	9:15:46 AM	SiCl4 MFC set to  0.000000
6/1/2012	9:15:46 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	9:15:46 AM	Tube furnace set to 0
6/1/2012	9:15:46 AM	Helium valve closed
6/1/2012	9:15:46 AM	H2 valve closed
6/1/2012	9:15:46 AM	BCl3 valve closed
6/1/2012	9:15:46 AM	PH3 valve closed
6/1/2012	9:15:46 AM	SiCl4 pre valve closed
6/1/2012	9:15:46 AM	SiCl4 post valve closed
6/1/2012	9:15:46 AM	Bypass valve closed
6/1/2012	9:15:46 AM	Bubbler valve closed
6/1/2012	9:15:46 AM	Main Vac valve opened
6/1/2012	9:15:46 AM	Helium MFC set to  0.000000
6/1/2012	9:15:46 AM	H2 MFC set to  0.000000
6/1/2012	9:15:46 AM	BCl3 MFC set to  0.000000
6/1/2012	9:15:46 AM	PH3 MFC set to  0.000000
6/1/2012	9:15:46 AM	SiCl4 MFC set to  0.000000
6/1/2012	9:15:46 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	9:15:47 AM	Tube furnace set to 0
6/1/2012	9:15:47 AM	H2 valve closed
6/1/2012	9:15:47 AM	BCl3 valve closed
6/1/2012	9:15:47 AM	PH3 valve closed
6/1/2012	9:15:47 AM	SiCl4 pre valve closed
6/1/2012	9:15:47 AM	SiCl4 post valve closed
6/1/2012	9:15:47 AM	Bypass valve closed
6/1/2012	9:15:47 AM	Bubbler valve closed
6/1/2012	9:15:47 AM	Helium valve opened
6/1/2012	9:15:47 AM	Main Vac valve opened
6/1/2012	9:15:47 AM	Helium MFC set to  20.000000
6/1/2012	9:15:47 AM	H2 MFC set to  0.000000
6/1/2012	9:15:47 AM	BCl3 MFC set to  0.000000
6/1/2012	9:15:47 AM	PH3 MFC set to  0.000000
6/1/2012	9:15:47 AM	SiCl4 MFC set to  0.000000
6/1/2012	9:15:47 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	9:15:47 AM	Tube furnace set to 0
6/1/2012	9:16:17 AM	Helium valve closed
6/1/2012	9:16:17 AM	H2 valve closed
6/1/2012	9:16:17 AM	BCl3 valve closed
6/1/2012	9:16:17 AM	PH3 valve closed
6/1/2012	9:16:17 AM	SiCl4 pre valve closed
6/1/2012	9:16:17 AM	SiCl4 post valve closed
6/1/2012	9:16:17 AM	Bypass valve closed
6/1/2012	9:16:17 AM	Bubbler valve closed
6/1/2012	9:16:17 AM	Main Vac valve opened
6/1/2012	9:16:17 AM	Helium MFC set to  0.000000
6/1/2012	9:16:17 AM	H2 MFC set to  0.000000
6/1/2012	9:16:17 AM	BCl3 MFC set to  0.000000
6/1/2012	9:16:17 AM	PH3 MFC set to  0.000000
6/1/2012	9:16:17 AM	SiCl4 MFC set to  0.000000
6/1/2012	9:16:17 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	9:16:17 AM	Tube furnace set to 0
6/1/2012	9:16:48 AM	H2 valve closed
6/1/2012	9:16:48 AM	BCl3 valve closed
6/1/2012	9:16:48 AM	PH3 valve closed
6/1/2012	9:16:48 AM	SiCl4 pre valve closed
6/1/2012	9:16:48 AM	SiCl4 post valve closed
6/1/2012	9:16:48 AM	Bypass valve closed
6/1/2012	9:16:48 AM	Bubbler valve closed
6/1/2012	9:16:48 AM	Helium valve opened
6/1/2012	9:16:48 AM	Main Vac valve opened
6/1/2012	9:16:48 AM	Helium MFC set to  20.000000
6/1/2012	9:16:48 AM	H2 MFC set to  0.000000
6/1/2012	9:16:48 AM	BCl3 MFC set to  0.000000
6/1/2012	9:16:48 AM	PH3 MFC set to  0.000000
6/1/2012	9:16:48 AM	SiCl4 MFC set to  0.000000
6/1/2012	9:16:48 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	9:16:48 AM	Tube furnace set to 0
6/1/2012	9:17:18 AM	Helium valve closed
6/1/2012	9:17:18 AM	H2 valve closed
6/1/2012	9:17:18 AM	BCl3 valve closed
6/1/2012	9:17:18 AM	PH3 valve closed
6/1/2012	9:17:18 AM	SiCl4 pre valve closed
6/1/2012	9:17:18 AM	SiCl4 post valve closed
6/1/2012	9:17:18 AM	Bypass valve closed
6/1/2012	9:17:18 AM	Bubbler valve closed
6/1/2012	9:17:18 AM	Main Vac valve opened
6/1/2012	9:17:18 AM	Helium MFC set to  0.000000
6/1/2012	9:17:18 AM	H2 MFC set to  0.000000
6/1/2012	9:17:18 AM	BCl3 MFC set to  0.000000
6/1/2012	9:17:18 AM	PH3 MFC set to  0.000000
6/1/2012	9:17:18 AM	SiCl4 MFC set to  0.000000
6/1/2012	9:17:18 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	9:17:18 AM	Tube furnace set to 200
6/1/2012	9:17:48 AM	H2 valve closed
6/1/2012	9:17:48 AM	BCl3 valve closed
6/1/2012	9:17:48 AM	PH3 valve closed
6/1/2012	9:17:48 AM	SiCl4 pre valve closed
6/1/2012	9:17:48 AM	SiCl4 post valve closed
6/1/2012	9:17:48 AM	Bypass valve closed
6/1/2012	9:17:48 AM	Bubbler valve closed
6/1/2012	9:17:48 AM	Helium valve opened
6/1/2012	9:17:48 AM	Main Vac valve opened
6/1/2012	9:17:48 AM	Helium MFC set to  20.000000
6/1/2012	9:17:48 AM	H2 MFC set to  0.000000
6/1/2012	9:17:48 AM	BCl3 MFC set to  0.000000
6/1/2012	9:17:48 AM	PH3 MFC set to  0.000000
6/1/2012	9:17:48 AM	SiCl4 MFC set to  0.000000
6/1/2012	9:17:48 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	9:17:48 AM	Tube furnace set to 200
6/1/2012	9:18:18 AM	Helium valve closed
6/1/2012	9:18:18 AM	H2 valve closed
6/1/2012	9:18:18 AM	BCl3 valve closed
6/1/2012	9:18:18 AM	PH3 valve closed
6/1/2012	9:18:18 AM	SiCl4 pre valve closed
6/1/2012	9:18:18 AM	SiCl4 post valve closed
6/1/2012	9:18:18 AM	Bypass valve closed
6/1/2012	9:18:18 AM	Bubbler valve closed
6/1/2012	9:18:18 AM	Main Vac valve opened
6/1/2012	9:18:18 AM	Helium MFC set to  0.000000
6/1/2012	9:18:18 AM	H2 MFC set to  0.000000
6/1/2012	9:18:18 AM	BCl3 MFC set to  0.000000
6/1/2012	9:18:18 AM	PH3 MFC set to  0.000000
6/1/2012	9:18:18 AM	SiCl4 MFC set to  0.000000
6/1/2012	9:18:18 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	9:18:18 AM	Tube furnace set to 200
6/1/2012	9:18:48 AM	H2 valve closed
6/1/2012	9:18:48 AM	BCl3 valve closed
6/1/2012	9:18:48 AM	PH3 valve closed
6/1/2012	9:18:48 AM	SiCl4 pre valve closed
6/1/2012	9:18:48 AM	SiCl4 post valve closed
6/1/2012	9:18:48 AM	Bypass valve closed
6/1/2012	9:18:48 AM	Bubbler valve closed
6/1/2012	9:18:48 AM	Helium valve opened
6/1/2012	9:18:48 AM	Main Vac valve opened
6/1/2012	9:18:48 AM	Helium MFC set to  20.000000
6/1/2012	9:18:48 AM	H2 MFC set to  0.000000
6/1/2012	9:18:49 AM	BCl3 MFC set to  0.000000
6/1/2012	9:18:49 AM	PH3 MFC set to  0.000000
6/1/2012	9:18:49 AM	SiCl4 MFC set to  0.000000
6/1/2012	9:18:49 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	9:18:49 AM	Tube furnace set to 200
6/1/2012	9:19:19 AM	Helium valve closed
6/1/2012	9:19:19 AM	H2 valve closed
6/1/2012	9:19:19 AM	BCl3 valve closed
6/1/2012	9:19:19 AM	PH3 valve closed
6/1/2012	9:19:19 AM	SiCl4 pre valve closed
6/1/2012	9:19:19 AM	SiCl4 post valve closed
6/1/2012	9:19:19 AM	Bypass valve closed
6/1/2012	9:19:19 AM	Bubbler valve closed
6/1/2012	9:19:19 AM	Main Vac valve opened
6/1/2012	9:19:19 AM	Helium MFC set to  0.000000
6/1/2012	9:19:19 AM	H2 MFC set to  0.000000
6/1/2012	9:19:19 AM	BCl3 MFC set to  0.000000
6/1/2012	9:19:19 AM	PH3 MFC set to  0.000000
6/1/2012	9:19:19 AM	SiCl4 MFC set to  0.000000
6/1/2012	9:19:19 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	9:19:19 AM	Tube furnace set to 200
6/1/2012	9:19:49 AM	H2 valve closed
6/1/2012	9:19:49 AM	BCl3 valve closed
6/1/2012	9:19:49 AM	PH3 valve closed
6/1/2012	9:19:49 AM	SiCl4 pre valve closed
6/1/2012	9:19:49 AM	SiCl4 post valve closed
6/1/2012	9:19:49 AM	Bypass valve closed
6/1/2012	9:19:49 AM	Bubbler valve closed
6/1/2012	9:19:49 AM	Helium valve opened
6/1/2012	9:19:49 AM	Main Vac valve opened
6/1/2012	9:19:49 AM	Helium MFC set to  20.000000
6/1/2012	9:19:49 AM	H2 MFC set to  0.000000
6/1/2012	9:19:49 AM	BCl3 MFC set to  0.000000
6/1/2012	9:19:49 AM	PH3 MFC set to  0.000000
6/1/2012	9:19:49 AM	SiCl4 MFC set to  0.000000
6/1/2012	9:19:49 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	9:19:49 AM	Tube furnace set to 200
6/1/2012	9:20:19 AM	Helium valve closed
6/1/2012	9:20:19 AM	H2 valve closed
6/1/2012	9:20:19 AM	BCl3 valve closed
6/1/2012	9:20:19 AM	PH3 valve closed
6/1/2012	9:20:19 AM	SiCl4 pre valve closed
6/1/2012	9:20:19 AM	SiCl4 post valve closed
6/1/2012	9:20:19 AM	Bypass valve closed
6/1/2012	9:20:19 AM	Bubbler valve closed
6/1/2012	9:20:19 AM	Main Vac valve opened
6/1/2012	9:20:19 AM	Helium MFC set to  0.000000
6/1/2012	9:20:19 AM	H2 MFC set to  0.000000
6/1/2012	9:20:19 AM	BCl3 MFC set to  0.000000
6/1/2012	9:20:19 AM	PH3 MFC set to  0.000000
6/1/2012	9:20:19 AM	SiCl4 MFC set to  0.000000
6/1/2012	9:20:19 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	9:20:19 AM	Tube furnace set to 200
6/1/2012	9:20:49 AM	H2 valve closed
6/1/2012	9:20:49 AM	BCl3 valve closed
6/1/2012	9:20:49 AM	PH3 valve closed
6/1/2012	9:20:49 AM	SiCl4 pre valve closed
6/1/2012	9:20:49 AM	SiCl4 post valve closed
6/1/2012	9:20:49 AM	Bypass valve closed
6/1/2012	9:20:49 AM	Bubbler valve closed
6/1/2012	9:20:49 AM	Helium valve opened
6/1/2012	9:20:49 AM	Main Vac valve opened
6/1/2012	9:20:49 AM	Helium MFC set to  20.000000
6/1/2012	9:20:49 AM	H2 MFC set to  0.000000
6/1/2012	9:20:49 AM	BCl3 MFC set to  0.000000
6/1/2012	9:20:49 AM	PH3 MFC set to  0.000000
6/1/2012	9:20:49 AM	SiCl4 MFC set to  0.000000
6/1/2012	9:20:49 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	9:20:50 AM	Tube furnace set to 200
6/1/2012	9:21:20 AM	Helium valve closed
6/1/2012	9:21:20 AM	H2 valve closed
6/1/2012	9:21:20 AM	BCl3 valve closed
6/1/2012	9:21:20 AM	PH3 valve closed
6/1/2012	9:21:20 AM	SiCl4 pre valve closed
6/1/2012	9:21:20 AM	SiCl4 post valve closed
6/1/2012	9:21:20 AM	Bypass valve closed
6/1/2012	9:21:20 AM	Bubbler valve closed
6/1/2012	9:21:20 AM	Main Vac valve opened
6/1/2012	9:21:20 AM	Helium MFC set to  0.000000
6/1/2012	9:21:20 AM	H2 MFC set to  0.000000
6/1/2012	9:21:20 AM	BCl3 MFC set to  0.000000
6/1/2012	9:21:20 AM	PH3 MFC set to  0.000000
6/1/2012	9:21:20 AM	SiCl4 MFC set to  0.000000
6/1/2012	9:21:20 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	9:21:20 AM	Tube furnace set to 200
6/1/2012	9:21:50 AM	H2 valve closed
6/1/2012	9:21:50 AM	BCl3 valve closed
6/1/2012	9:21:50 AM	PH3 valve closed
6/1/2012	9:21:50 AM	SiCl4 pre valve closed
6/1/2012	9:21:50 AM	SiCl4 post valve closed
6/1/2012	9:21:50 AM	Bypass valve closed
6/1/2012	9:21:50 AM	Bubbler valve closed
6/1/2012	9:21:50 AM	Helium valve opened
6/1/2012	9:21:50 AM	Main Vac valve opened
6/1/2012	9:21:50 AM	Helium MFC set to  20.000000
6/1/2012	9:21:50 AM	H2 MFC set to  0.000000
6/1/2012	9:21:50 AM	BCl3 MFC set to  0.000000
6/1/2012	9:21:50 AM	PH3 MFC set to  0.000000
6/1/2012	9:21:50 AM	SiCl4 MFC set to  0.000000
6/1/2012	9:21:50 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	9:21:50 AM	Tube furnace set to 200
6/1/2012	9:22:20 AM	Helium valve closed
6/1/2012	9:22:20 AM	H2 valve closed
6/1/2012	9:22:20 AM	BCl3 valve closed
6/1/2012	9:22:20 AM	PH3 valve closed
6/1/2012	9:22:20 AM	SiCl4 pre valve closed
6/1/2012	9:22:20 AM	SiCl4 post valve closed
6/1/2012	9:22:20 AM	Bypass valve closed
6/1/2012	9:22:20 AM	Bubbler valve closed
6/1/2012	9:22:20 AM	Main Vac valve opened
6/1/2012	9:22:20 AM	Helium MFC set to  0.000000
6/1/2012	9:22:20 AM	H2 MFC set to  0.000000
6/1/2012	9:22:20 AM	BCl3 MFC set to  0.000000
6/1/2012	9:22:20 AM	PH3 MFC set to  0.000000
6/1/2012	9:22:20 AM	SiCl4 MFC set to  0.000000
6/1/2012	9:22:20 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	9:22:20 AM	Tube furnace set to 200
6/1/2012	9:22:50 AM	H2 valve closed
6/1/2012	9:22:50 AM	BCl3 valve closed
6/1/2012	9:22:50 AM	PH3 valve closed
6/1/2012	9:22:50 AM	SiCl4 pre valve closed
6/1/2012	9:22:50 AM	SiCl4 post valve closed
6/1/2012	9:22:50 AM	Bypass valve closed
6/1/2012	9:22:50 AM	Bubbler valve closed
6/1/2012	9:22:50 AM	Helium valve opened
6/1/2012	9:22:50 AM	Main Vac valve opened
6/1/2012	9:22:50 AM	Helium MFC set to  20.000000
6/1/2012	9:22:50 AM	H2 MFC set to  0.000000
6/1/2012	9:22:50 AM	BCl3 MFC set to  0.000000
6/1/2012	9:22:50 AM	PH3 MFC set to  0.000000
6/1/2012	9:22:50 AM	SiCl4 MFC set to  0.000000
6/1/2012	9:22:50 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	9:22:51 AM	Tube furnace set to 200
6/1/2012	9:23:21 AM	Helium valve closed
6/1/2012	9:23:21 AM	H2 valve closed
6/1/2012	9:23:21 AM	BCl3 valve closed
6/1/2012	9:23:21 AM	PH3 valve closed
6/1/2012	9:23:21 AM	SiCl4 pre valve closed
6/1/2012	9:23:21 AM	SiCl4 post valve closed
6/1/2012	9:23:21 AM	Bypass valve closed
6/1/2012	9:23:21 AM	Bubbler valve closed
6/1/2012	9:23:21 AM	Main Vac valve opened
6/1/2012	9:23:21 AM	Helium MFC set to  0.000000
6/1/2012	9:23:21 AM	H2 MFC set to  0.000000
6/1/2012	9:23:21 AM	BCl3 MFC set to  0.000000
6/1/2012	9:23:21 AM	PH3 MFC set to  0.000000
6/1/2012	9:23:21 AM	SiCl4 MFC set to  0.000000
6/1/2012	9:23:21 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	9:23:21 AM	Tube furnace set to 0
6/1/2012	9:23:22 AM	Run finished at 9:23 AM
6/1/2012	9:33:36 AM	Main Vac valve closed
6/1/2012	9:33:56 AM	Main Vac valve opened
6/1/2012	9:34:57 AM	Recipe started at 9:34 AM
6/1/2012	9:34:57 AM	Helium valve closed
6/1/2012	9:34:57 AM	H2 valve closed
6/1/2012	9:34:57 AM	BCl3 valve closed
6/1/2012	9:34:57 AM	PH3 valve closed
6/1/2012	9:34:57 AM	SiCl4 pre valve closed
6/1/2012	9:34:57 AM	SiCl4 post valve closed
6/1/2012	9:34:57 AM	Main Vac valve closed
6/1/2012	9:34:57 AM	Bypass valve closed
6/1/2012	9:34:57 AM	Bubbler valve closed
6/1/2012	9:34:57 AM	Helium MFC set to  0.000000
6/1/2012	9:34:57 AM	H2 MFC set to  0.000000
6/1/2012	9:34:57 AM	BCl3 MFC set to  0.000000
6/1/2012	9:34:57 AM	PH3 MFC set to  0.000000
6/1/2012	9:34:57 AM	SiCl4 MFC set to  0.000000
6/1/2012	9:34:57 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	9:34:57 AM	Tube furnace set to 0
6/1/2012	9:35:00 AM	Helium valve closed
6/1/2012	9:35:00 AM	BCl3 valve closed
6/1/2012	9:35:00 AM	PH3 valve closed
6/1/2012	9:35:00 AM	SiCl4 pre valve closed
6/1/2012	9:35:00 AM	SiCl4 post valve closed
6/1/2012	9:35:00 AM	Main Vac valve closed
6/1/2012	9:35:00 AM	Bypass valve closed
6/1/2012	9:35:00 AM	Bubbler valve closed
6/1/2012	9:35:00 AM	H2 valve opened
6/1/2012	9:35:00 AM	Helium MFC set to  0.000000
6/1/2012	9:35:00 AM	H2 MFC set to  500.000000
6/1/2012	9:35:00 AM	BCl3 MFC set to  0.000000
6/1/2012	9:35:00 AM	PH3 MFC set to  0.000000
6/1/2012	9:35:00 AM	SiCl4 MFC set to  0.000000
6/1/2012	9:35:00 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	9:35:00 AM	Tube furnace set to 0
6/1/2012	9:35:26 AM	Run aborted at 9:35 AM
6/1/2012	9:35:26 AM	Helium valve closed
6/1/2012	9:35:26 AM	H2 valve closed
6/1/2012	9:35:26 AM	BCl3 valve closed
6/1/2012	9:35:26 AM	PH3 valve closed
6/1/2012	9:35:26 AM	SiCl4 pre valve closed
6/1/2012	9:35:26 AM	SiCl4 post valve closed
6/1/2012	9:35:26 AM	Bypass valve closed
6/1/2012	9:35:26 AM	Main Vac valve closed
6/1/2012	9:35:26 AM	Bubbler valve closed
6/1/2012	9:35:26 AM	Helium MFC set to  0.000000
6/1/2012	9:35:26 AM	H2 MFC set to  0.000000
6/1/2012	9:35:26 AM	BCl3 MFC set to  0.000000
6/1/2012	9:35:26 AM	PH3 MFC set to  0.000000
6/1/2012	9:35:26 AM	SiCl4 MFC set to  0.000000
6/1/2012	9:35:26 AM	Tube furnace set to 0
6/1/2012	9:35:39 AM	Recipe started at 9:35 AM
6/1/2012	9:35:39 AM	Helium valve closed
6/1/2012	9:35:39 AM	H2 valve closed
6/1/2012	9:35:39 AM	BCl3 valve closed
6/1/2012	9:35:39 AM	PH3 valve closed
6/1/2012	9:35:39 AM	SiCl4 pre valve closed
6/1/2012	9:35:39 AM	SiCl4 post valve closed
6/1/2012	9:35:39 AM	Main Vac valve closed
6/1/2012	9:35:39 AM	Bypass valve closed
6/1/2012	9:35:39 AM	Bubbler valve closed
6/1/2012	9:35:39 AM	Helium MFC set to  0.000000
6/1/2012	9:35:39 AM	H2 MFC set to  0.000000
6/1/2012	9:35:39 AM	BCl3 MFC set to  0.000000
6/1/2012	9:35:39 AM	PH3 MFC set to  0.000000
6/1/2012	9:35:39 AM	SiCl4 MFC set to  0.000000
6/1/2012	9:35:39 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	9:35:39 AM	Tube furnace set to 0
6/1/2012	9:35:42 AM	Helium valve closed
6/1/2012	9:35:42 AM	BCl3 valve closed
6/1/2012	9:35:42 AM	PH3 valve closed
6/1/2012	9:35:42 AM	SiCl4 pre valve closed
6/1/2012	9:35:42 AM	SiCl4 post valve closed
6/1/2012	9:35:42 AM	Main Vac valve closed
6/1/2012	9:35:42 AM	Bypass valve closed
6/1/2012	9:35:42 AM	Bubbler valve closed
6/1/2012	9:35:42 AM	H2 valve opened
6/1/2012	9:35:42 AM	Helium MFC set to  0.000000
6/1/2012	9:35:42 AM	H2 MFC set to  500.000000
6/1/2012	9:35:42 AM	BCl3 MFC set to  0.000000
6/1/2012	9:35:42 AM	PH3 MFC set to  0.000000
6/1/2012	9:35:42 AM	SiCl4 MFC set to  0.000000
6/1/2012	9:35:42 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	9:35:42 AM	Tube furnace set to 0
6/1/2012	9:36:28 AM	Helium valve closed
6/1/2012	9:36:28 AM	BCl3 valve closed
6/1/2012	9:36:28 AM	PH3 valve closed
6/1/2012	9:36:28 AM	SiCl4 pre valve closed
6/1/2012	9:36:28 AM	SiCl4 post valve closed
6/1/2012	9:36:28 AM	Main Vac valve closed
6/1/2012	9:36:28 AM	Bypass valve closed
6/1/2012	9:36:28 AM	H2 valve opened
6/1/2012	9:36:28 AM	Bubbler valve opened
6/1/2012	9:36:28 AM	Helium MFC set to  0.000000
6/1/2012	9:36:28 AM	H2 MFC set to  500.000000
6/1/2012	9:36:28 AM	BCl3 MFC set to  0.000000
6/1/2012	9:36:28 AM	PH3 MFC set to  0.000000
6/1/2012	9:36:28 AM	SiCl4 MFC set to  0.000000
6/1/2012	9:36:28 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	9:36:29 AM	Tube furnace set to 0
6/1/2012	9:36:30 AM	Helium valve closed
6/1/2012	9:36:30 AM	BCl3 valve closed
6/1/2012	9:36:30 AM	PH3 valve closed
6/1/2012	9:36:30 AM	SiCl4 pre valve closed
6/1/2012	9:36:30 AM	SiCl4 post valve closed
6/1/2012	9:36:30 AM	Main Vac valve closed
6/1/2012	9:36:30 AM	Bypass valve closed
6/1/2012	9:36:30 AM	H2 valve opened
6/1/2012	9:36:30 AM	Bubbler valve opened
6/1/2012	9:36:30 AM	Helium MFC set to  0.000000
6/1/2012	9:36:30 AM	H2 MFC set to  500.000000
6/1/2012	9:36:30 AM	BCl3 MFC set to  0.000000
6/1/2012	9:36:30 AM	PH3 MFC set to  0.000000
6/1/2012	9:36:30 AM	SiCl4 MFC set to  0.000000
6/1/2012	9:36:30 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	9:36:30 AM	Tube furnace set to 1000
6/1/2012	9:56:30 AM	Helium valve closed
6/1/2012	9:56:30 AM	BCl3 valve closed
6/1/2012	9:56:30 AM	Main Vac valve closed
6/1/2012	9:56:30 AM	Bypass valve closed
6/1/2012	9:56:30 AM	H2 valve opened
6/1/2012	9:56:30 AM	PH3 valve opened
6/1/2012	9:56:30 AM	SiCl4 pre valve opened
6/1/2012	9:56:30 AM	SiCl4 post valve opened
6/1/2012	9:56:30 AM	Bubbler valve opened
6/1/2012	9:56:30 AM	Helium MFC set to  0.000000
6/1/2012	9:56:30 AM	H2 MFC set to  500.000000
6/1/2012	9:56:30 AM	BCl3 MFC set to  0.000000
6/1/2012	9:56:30 AM	PH3 MFC set to  20.000000
6/1/2012	9:56:30 AM	SiCl4 MFC set to  25.000000
6/1/2012	9:56:30 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	9:56:30 AM	Tube furnace set to 1000
6/1/2012	10:16:30 AM	Helium valve closed
6/1/2012	10:16:30 AM	BCl3 valve closed
6/1/2012	10:16:30 AM	PH3 valve closed
6/1/2012	10:16:30 AM	SiCl4 pre valve closed
6/1/2012	10:16:30 AM	SiCl4 post valve closed
6/1/2012	10:16:30 AM	Main Vac valve closed
6/1/2012	10:16:30 AM	Bypass valve closed
6/1/2012	10:16:30 AM	H2 valve opened
6/1/2012	10:16:30 AM	Bubbler valve opened
6/1/2012	10:16:30 AM	Helium MFC set to  0.000000
6/1/2012	10:16:30 AM	H2 MFC set to  500.000000
6/1/2012	10:16:30 AM	BCl3 MFC set to  0.000000
6/1/2012	10:16:30 AM	PH3 MFC set to  0.000000
6/1/2012	10:16:30 AM	SiCl4 MFC set to  0.000000
6/1/2012	10:16:30 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	10:16:30 AM	Tube furnace set to 950
6/1/2012	10:18:30 AM	Helium valve closed
6/1/2012	10:18:30 AM	BCl3 valve closed
6/1/2012	10:18:30 AM	PH3 valve closed
6/1/2012	10:18:30 AM	SiCl4 pre valve closed
6/1/2012	10:18:30 AM	SiCl4 post valve closed
6/1/2012	10:18:30 AM	Main Vac valve closed
6/1/2012	10:18:30 AM	Bypass valve closed
6/1/2012	10:18:30 AM	H2 valve opened
6/1/2012	10:18:30 AM	Bubbler valve opened
6/1/2012	10:18:30 AM	Helium MFC set to  0.000000
6/1/2012	10:18:30 AM	H2 MFC set to  500.000000
6/1/2012	10:18:30 AM	BCl3 MFC set to  0.000000
6/1/2012	10:18:30 AM	PH3 MFC set to  0.000000
6/1/2012	10:18:30 AM	SiCl4 MFC set to  0.000000
6/1/2012	10:18:30 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	10:18:30 AM	Tube furnace set to 900
6/1/2012	10:20:30 AM	Helium valve closed
6/1/2012	10:20:30 AM	BCl3 valve closed
6/1/2012	10:20:30 AM	PH3 valve closed
6/1/2012	10:20:30 AM	SiCl4 pre valve closed
6/1/2012	10:20:30 AM	SiCl4 post valve closed
6/1/2012	10:20:30 AM	Main Vac valve closed
6/1/2012	10:20:30 AM	Bypass valve closed
6/1/2012	10:20:30 AM	H2 valve opened
6/1/2012	10:20:30 AM	Bubbler valve opened
6/1/2012	10:20:30 AM	Helium MFC set to  0.000000
6/1/2012	10:20:30 AM	H2 MFC set to  500.000000
6/1/2012	10:20:30 AM	BCl3 MFC set to  0.000000
6/1/2012	10:20:30 AM	PH3 MFC set to  0.000000
6/1/2012	10:20:30 AM	SiCl4 MFC set to  0.000000
6/1/2012	10:20:30 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	10:20:31 AM	Tube furnace set to 850
6/1/2012	10:22:31 AM	H2 valve closed
6/1/2012	10:22:31 AM	BCl3 valve closed
6/1/2012	10:22:31 AM	PH3 valve closed
6/1/2012	10:22:31 AM	SiCl4 pre valve closed
6/1/2012	10:22:31 AM	SiCl4 post valve closed
6/1/2012	10:22:31 AM	Main Vac valve closed
6/1/2012	10:22:31 AM	Bypass valve closed
6/1/2012	10:22:31 AM	Helium valve opened
6/1/2012	10:22:31 AM	Bubbler valve opened
6/1/2012	10:22:31 AM	Helium MFC set to  500.000000
6/1/2012	10:22:31 AM	H2 MFC set to  0.000000
6/1/2012	10:22:31 AM	BCl3 MFC set to  0.000000
6/1/2012	10:22:31 AM	PH3 MFC set to  0.000000
6/1/2012	10:22:31 AM	SiCl4 MFC set to  0.000000
6/1/2012	10:22:31 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	10:22:31 AM	Tube furnace set to 800
6/1/2012	10:24:31 AM	H2 valve closed
6/1/2012	10:24:31 AM	BCl3 valve closed
6/1/2012	10:24:31 AM	PH3 valve closed
6/1/2012	10:24:31 AM	SiCl4 pre valve closed
6/1/2012	10:24:31 AM	SiCl4 post valve closed
6/1/2012	10:24:31 AM	Main Vac valve closed
6/1/2012	10:24:31 AM	Bypass valve closed
6/1/2012	10:24:31 AM	Helium valve opened
6/1/2012	10:24:31 AM	Bubbler valve opened
6/1/2012	10:24:31 AM	Helium MFC set to  500.000000
6/1/2012	10:24:31 AM	H2 MFC set to  0.000000
6/1/2012	10:24:31 AM	BCl3 MFC set to  0.000000
6/1/2012	10:24:31 AM	PH3 MFC set to  0.000000
6/1/2012	10:24:31 AM	SiCl4 MFC set to  0.000000
6/1/2012	10:24:31 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	10:24:31 AM	Tube furnace set to 750
6/1/2012	10:26:31 AM	H2 valve closed
6/1/2012	10:26:31 AM	BCl3 valve closed
6/1/2012	10:26:31 AM	PH3 valve closed
6/1/2012	10:26:31 AM	SiCl4 pre valve closed
6/1/2012	10:26:31 AM	SiCl4 post valve closed
6/1/2012	10:26:31 AM	Main Vac valve closed
6/1/2012	10:26:31 AM	Bypass valve closed
6/1/2012	10:26:31 AM	Helium valve opened
6/1/2012	10:26:31 AM	Bubbler valve opened
6/1/2012	10:26:31 AM	Helium MFC set to  500.000000
6/1/2012	10:26:31 AM	H2 MFC set to  0.000000
6/1/2012	10:26:31 AM	BCl3 MFC set to  0.000000
6/1/2012	10:26:31 AM	PH3 MFC set to  0.000000
6/1/2012	10:26:31 AM	SiCl4 MFC set to  0.000000
6/1/2012	10:26:31 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	10:26:31 AM	Tube furnace set to 0
6/1/2012	10:46:31 AM	Helium valve closed
6/1/2012	10:46:31 AM	H2 valve closed
6/1/2012	10:46:31 AM	BCl3 valve closed
6/1/2012	10:46:31 AM	PH3 valve closed
6/1/2012	10:46:31 AM	SiCl4 pre valve closed
6/1/2012	10:46:31 AM	SiCl4 post valve closed
6/1/2012	10:46:31 AM	Main Vac valve closed
6/1/2012	10:46:31 AM	Bypass valve closed
6/1/2012	10:46:31 AM	Bubbler valve closed
6/1/2012	10:46:31 AM	Helium MFC set to  0.000000
6/1/2012	10:46:31 AM	H2 MFC set to  0.000000
6/1/2012	10:46:31 AM	BCl3 MFC set to  0.000000
6/1/2012	10:46:31 AM	PH3 MFC set to  0.000000
6/1/2012	10:46:31 AM	SiCl4 MFC set to  0.000000
6/1/2012	10:46:31 AM	Bypass solenoid MFC set to  0.000000
6/1/2012	10:46:31 AM	Tube furnace set to 0
6/1/2012	10:46:33 AM	Run finished at 10:46 AM
6/1/2012	12:00:57 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/1/2012	12:00:57 PM	Recipe started at 12:00 PM
6/1/2012	12:00:57 PM	Helium valve closed
6/1/2012	12:00:57 PM	H2 valve closed
6/1/2012	12:00:57 PM	BCl3 valve closed
6/1/2012	12:00:57 PM	PH3 valve closed
6/1/2012	12:00:57 PM	SiCl4 pre valve closed
6/1/2012	12:00:57 PM	SiCl4 post valve closed
6/1/2012	12:00:57 PM	Main Vac valve closed
6/1/2012	12:00:57 PM	Bypass valve closed
6/1/2012	12:00:58 PM	Bubbler valve closed
6/1/2012	12:00:58 PM	Helium MFC set to  0.000000
6/1/2012	12:00:58 PM	H2 MFC set to  0.000000
6/1/2012	12:00:58 PM	BCl3 MFC set to  0.000000
6/1/2012	12:00:58 PM	PH3 MFC set to  0.000000
6/1/2012	12:00:58 PM	SiCl4 MFC set to  0.000000
6/1/2012	12:00:58 PM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:00:58 PM	Tube furnace set to 0
6/1/2012	12:01:01 PM	H2 valve closed
6/1/2012	12:01:01 PM	BCl3 valve closed
6/1/2012	12:01:01 PM	PH3 valve closed
6/1/2012	12:01:01 PM	SiCl4 pre valve closed
6/1/2012	12:01:01 PM	SiCl4 post valve closed
6/1/2012	12:01:01 PM	Main Vac valve closed
6/1/2012	12:01:01 PM	Bypass valve closed
6/1/2012	12:01:01 PM	Bubbler valve closed
6/1/2012	12:01:01 PM	Helium valve opened
6/1/2012	12:01:01 PM	Helium MFC set to  500.000000
6/1/2012	12:01:01 PM	H2 MFC set to  0.000000
6/1/2012	12:01:01 PM	BCl3 MFC set to  0.000000
6/1/2012	12:01:01 PM	PH3 MFC set to  0.000000
6/1/2012	12:01:01 PM	SiCl4 MFC set to  0.000000
6/1/2012	12:01:01 PM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:01:01 PM	Tube furnace set to 0
6/1/2012	12:01:04 PM	Helium valve closed
6/1/2012	12:01:04 PM	H2 valve closed
6/1/2012	12:01:04 PM	BCl3 valve closed
6/1/2012	12:01:04 PM	PH3 valve closed
6/1/2012	12:01:04 PM	SiCl4 pre valve closed
6/1/2012	12:01:04 PM	SiCl4 post valve closed
6/1/2012	12:01:04 PM	Main Vac valve closed
6/1/2012	12:01:04 PM	Bypass valve closed
6/1/2012	12:01:04 PM	Bubbler valve closed
6/1/2012	12:01:04 PM	Helium MFC set to  0.000000
6/1/2012	12:01:04 PM	H2 MFC set to  0.000000
6/1/2012	12:01:04 PM	BCl3 MFC set to  0.000000
6/1/2012	12:01:04 PM	PH3 MFC set to  0.000000
6/1/2012	12:01:04 PM	SiCl4 MFC set to  0.000000
6/1/2012	12:01:04 PM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:01:04 PM	Tube furnace set to 0
6/1/2012	12:01:05 PM	Run finished at 12:01 PM
6/1/2012	12:01:05 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/1/2012	12:02:59 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/1/2012	12:03:00 PM	Recipe started at 12:02 PM
6/1/2012	12:03:00 PM	Helium valve closed
6/1/2012	12:03:00 PM	H2 valve closed
6/1/2012	12:03:00 PM	BCl3 valve closed
6/1/2012	12:03:00 PM	PH3 valve closed
6/1/2012	12:03:00 PM	SiCl4 pre valve closed
6/1/2012	12:03:00 PM	SiCl4 post valve closed
6/1/2012	12:03:00 PM	Main Vac valve closed
6/1/2012	12:03:00 PM	Bubbler valve closed
6/1/2012	12:03:00 PM	Bypass valve opened
6/1/2012	12:03:00 PM	Helium MFC set to  0.000000
6/1/2012	12:03:00 PM	H2 MFC set to  0.000000
6/1/2012	12:03:00 PM	BCl3 MFC set to  0.000000
6/1/2012	12:03:00 PM	PH3 MFC set to  0.000000
6/1/2012	12:03:00 PM	SiCl4 MFC set to  0.000000
6/1/2012	12:03:00 PM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:03:00 PM	Tube furnace set to 0
6/1/2012	12:04:02 PM	Helium valve closed
6/1/2012	12:04:02 PM	H2 valve closed
6/1/2012	12:04:02 PM	BCl3 valve closed
6/1/2012	12:04:02 PM	PH3 valve closed
6/1/2012	12:04:02 PM	SiCl4 pre valve closed
6/1/2012	12:04:02 PM	SiCl4 post valve closed
6/1/2012	12:04:02 PM	Main Vac valve closed
6/1/2012	12:04:02 PM	Bubbler valve closed
6/1/2012	12:04:02 PM	Bypass valve opened
6/1/2012	12:04:02 PM	Helium MFC set to  0.000000
6/1/2012	12:04:02 PM	H2 MFC set to  0.000000
6/1/2012	12:04:02 PM	BCl3 MFC set to  0.000000
6/1/2012	12:04:02 PM	PH3 MFC set to  0.000000
6/1/2012	12:04:02 PM	SiCl4 MFC set to  0.000000
6/1/2012	12:04:02 PM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:04:03 PM	Tube furnace set to 0
6/1/2012	12:05:03 PM	Helium valve closed
6/1/2012	12:05:03 PM	H2 valve closed
6/1/2012	12:05:03 PM	BCl3 valve closed
6/1/2012	12:05:03 PM	PH3 valve closed
6/1/2012	12:05:03 PM	SiCl4 pre valve closed
6/1/2012	12:05:03 PM	SiCl4 post valve closed
6/1/2012	12:05:03 PM	Bypass valve closed
6/1/2012	12:05:03 PM	Bubbler valve closed
6/1/2012	12:05:03 PM	Main Vac valve opened
6/1/2012	12:05:03 PM	Helium MFC set to  0.000000
6/1/2012	12:05:03 PM	H2 MFC set to  0.000000
6/1/2012	12:05:03 PM	BCl3 MFC set to  0.000000
6/1/2012	12:05:03 PM	PH3 MFC set to  0.000000
6/1/2012	12:05:03 PM	SiCl4 MFC set to  0.000000
6/1/2012	12:05:03 PM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:05:03 PM	Tube furnace set to 0
6/1/2012	12:05:04 PM	Run finished at 12:05 PM
6/1/2012	12:05:04 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/1/2012	12:08:04 PM	Recipe started at 12:07 PM
6/1/2012	12:08:04 PM	Helium valve closed
6/1/2012	12:08:04 PM	H2 valve closed
6/1/2012	12:08:04 PM	BCl3 valve closed
6/1/2012	12:08:04 PM	PH3 valve closed
6/1/2012	12:08:04 PM	SiCl4 pre valve closed
6/1/2012	12:08:04 PM	SiCl4 post valve closed
6/1/2012	12:08:04 PM	Bypass valve closed
6/1/2012	12:08:04 PM	Bubbler valve closed
6/1/2012	12:08:04 PM	Main Vac valve opened
6/1/2012	12:08:04 PM	Helium MFC set to  0.000000
6/1/2012	12:08:04 PM	H2 MFC set to  0.000000
6/1/2012	12:08:04 PM	BCl3 MFC set to  0.000000
6/1/2012	12:08:04 PM	PH3 MFC set to  0.000000
6/1/2012	12:08:04 PM	SiCl4 MFC set to  0.000000
6/1/2012	12:08:04 PM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:08:04 PM	Tube furnace set to 0
6/1/2012	12:08:34 PM	H2 valve closed
6/1/2012	12:08:34 PM	BCl3 valve closed
6/1/2012	12:08:34 PM	PH3 valve closed
6/1/2012	12:08:34 PM	SiCl4 pre valve closed
6/1/2012	12:08:34 PM	SiCl4 post valve closed
6/1/2012	12:08:34 PM	Bypass valve closed
6/1/2012	12:08:34 PM	Bubbler valve closed
6/1/2012	12:08:34 PM	Helium valve opened
6/1/2012	12:08:34 PM	Main Vac valve opened
6/1/2012	12:08:34 PM	Helium MFC set to  20.000000
6/1/2012	12:08:34 PM	H2 MFC set to  0.000000
6/1/2012	12:08:34 PM	BCl3 MFC set to  0.000000
6/1/2012	12:08:34 PM	PH3 MFC set to  0.000000
6/1/2012	12:08:34 PM	SiCl4 MFC set to  0.000000
6/1/2012	12:08:34 PM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:08:34 PM	Tube furnace set to 0
6/1/2012	12:09:04 PM	Helium valve closed
6/1/2012	12:09:04 PM	H2 valve closed
6/1/2012	12:09:04 PM	BCl3 valve closed
6/1/2012	12:09:04 PM	PH3 valve closed
6/1/2012	12:09:04 PM	SiCl4 pre valve closed
6/1/2012	12:09:04 PM	SiCl4 post valve closed
6/1/2012	12:09:04 PM	Bypass valve closed
6/1/2012	12:09:04 PM	Bubbler valve closed
6/1/2012	12:09:04 PM	Main Vac valve opened
6/1/2012	12:09:04 PM	Helium MFC set to  0.000000
6/1/2012	12:09:04 PM	H2 MFC set to  0.000000
6/1/2012	12:09:04 PM	BCl3 MFC set to  0.000000
6/1/2012	12:09:04 PM	PH3 MFC set to  0.000000
6/1/2012	12:09:04 PM	SiCl4 MFC set to  0.000000
6/1/2012	12:09:04 PM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:09:04 PM	Tube furnace set to 0
6/1/2012	12:09:34 PM	H2 valve closed
6/1/2012	12:09:34 PM	BCl3 valve closed
6/1/2012	12:09:34 PM	PH3 valve closed
6/1/2012	12:09:34 PM	SiCl4 pre valve closed
6/1/2012	12:09:35 PM	SiCl4 post valve closed
6/1/2012	12:09:35 PM	Bypass valve closed
6/1/2012	12:09:35 PM	Bubbler valve closed
6/1/2012	12:09:35 PM	Helium valve opened
6/1/2012	12:09:35 PM	Main Vac valve opened
6/1/2012	12:09:35 PM	Helium MFC set to  20.000000
6/1/2012	12:09:35 PM	H2 MFC set to  0.000000
6/1/2012	12:09:35 PM	BCl3 MFC set to  0.000000
6/1/2012	12:09:35 PM	PH3 MFC set to  0.000000
6/1/2012	12:09:35 PM	SiCl4 MFC set to  0.000000
6/1/2012	12:09:35 PM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:09:35 PM	Tube furnace set to 0
6/1/2012	12:10:05 PM	Helium valve closed
6/1/2012	12:10:05 PM	H2 valve closed
6/1/2012	12:10:05 PM	BCl3 valve closed
6/1/2012	12:10:05 PM	PH3 valve closed
6/1/2012	12:10:05 PM	SiCl4 pre valve closed
6/1/2012	12:10:05 PM	SiCl4 post valve closed
6/1/2012	12:10:05 PM	Bypass valve closed
6/1/2012	12:10:05 PM	Bubbler valve closed
6/1/2012	12:10:05 PM	Main Vac valve opened
6/1/2012	12:10:05 PM	Helium MFC set to  0.000000
6/1/2012	12:10:05 PM	H2 MFC set to  0.000000
6/1/2012	12:10:05 PM	BCl3 MFC set to  0.000000
6/1/2012	12:10:05 PM	PH3 MFC set to  0.000000
6/1/2012	12:10:05 PM	SiCl4 MFC set to  0.000000
6/1/2012	12:10:05 PM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:10:05 PM	Tube furnace set to 0
6/1/2012	12:10:35 PM	H2 valve closed
6/1/2012	12:10:35 PM	BCl3 valve closed
6/1/2012	12:10:35 PM	PH3 valve closed
6/1/2012	12:10:35 PM	SiCl4 pre valve closed
6/1/2012	12:10:35 PM	SiCl4 post valve closed
6/1/2012	12:10:35 PM	Bypass valve closed
6/1/2012	12:10:35 PM	Bubbler valve closed
6/1/2012	12:10:35 PM	Helium valve opened
6/1/2012	12:10:35 PM	Main Vac valve opened
6/1/2012	12:10:35 PM	Helium MFC set to  20.000000
6/1/2012	12:10:35 PM	H2 MFC set to  0.000000
6/1/2012	12:10:35 PM	BCl3 MFC set to  0.000000
6/1/2012	12:10:35 PM	PH3 MFC set to  0.000000
6/1/2012	12:10:35 PM	SiCl4 MFC set to  0.000000
6/1/2012	12:10:35 PM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:10:35 PM	Tube furnace set to 0
6/1/2012	12:11:05 PM	Helium valve closed
6/1/2012	12:11:05 PM	H2 valve closed
6/1/2012	12:11:05 PM	BCl3 valve closed
6/1/2012	12:11:05 PM	PH3 valve closed
6/1/2012	12:11:05 PM	SiCl4 pre valve closed
6/1/2012	12:11:05 PM	SiCl4 post valve closed
6/1/2012	12:11:05 PM	Bypass valve closed
6/1/2012	12:11:05 PM	Bubbler valve closed
6/1/2012	12:11:05 PM	Main Vac valve opened
6/1/2012	12:11:05 PM	Helium MFC set to  0.000000
6/1/2012	12:11:05 PM	H2 MFC set to  0.000000
6/1/2012	12:11:05 PM	BCl3 MFC set to  0.000000
6/1/2012	12:11:05 PM	PH3 MFC set to  0.000000
6/1/2012	12:11:05 PM	SiCl4 MFC set to  0.000000
6/1/2012	12:11:05 PM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:11:05 PM	Tube furnace set to 0
6/1/2012	12:11:35 PM	H2 valve closed
6/1/2012	12:11:35 PM	BCl3 valve closed
6/1/2012	12:11:35 PM	PH3 valve closed
6/1/2012	12:11:35 PM	SiCl4 pre valve closed
6/1/2012	12:11:35 PM	SiCl4 post valve closed
6/1/2012	12:11:35 PM	Bypass valve closed
6/1/2012	12:11:35 PM	Bubbler valve closed
6/1/2012	12:11:35 PM	Helium valve opened
6/1/2012	12:11:35 PM	Main Vac valve opened
6/1/2012	12:11:35 PM	Helium MFC set to  20.000000
6/1/2012	12:11:35 PM	H2 MFC set to  0.000000
6/1/2012	12:11:35 PM	BCl3 MFC set to  0.000000
6/1/2012	12:11:35 PM	PH3 MFC set to  0.000000
6/1/2012	12:11:35 PM	SiCl4 MFC set to  0.000000
6/1/2012	12:11:35 PM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:11:36 PM	Tube furnace set to 0
6/1/2012	12:12:06 PM	Helium valve closed
6/1/2012	12:12:06 PM	H2 valve closed
6/1/2012	12:12:06 PM	BCl3 valve closed
6/1/2012	12:12:06 PM	PH3 valve closed
6/1/2012	12:12:06 PM	SiCl4 pre valve closed
6/1/2012	12:12:06 PM	SiCl4 post valve closed
6/1/2012	12:12:06 PM	Bypass valve closed
6/1/2012	12:12:06 PM	Bubbler valve closed
6/1/2012	12:12:06 PM	Main Vac valve opened
6/1/2012	12:12:06 PM	Helium MFC set to  0.000000
6/1/2012	12:12:06 PM	H2 MFC set to  0.000000
6/1/2012	12:12:06 PM	BCl3 MFC set to  0.000000
6/1/2012	12:12:06 PM	PH3 MFC set to  0.000000
6/1/2012	12:12:06 PM	SiCl4 MFC set to  0.000000
6/1/2012	12:12:06 PM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:12:06 PM	Tube furnace set to 0
6/1/2012	12:12:36 PM	H2 valve closed
6/1/2012	12:12:36 PM	BCl3 valve closed
6/1/2012	12:12:36 PM	PH3 valve closed
6/1/2012	12:12:36 PM	SiCl4 pre valve closed
6/1/2012	12:12:36 PM	SiCl4 post valve closed
6/1/2012	12:12:36 PM	Bypass valve closed
6/1/2012	12:12:36 PM	Bubbler valve closed
6/1/2012	12:12:36 PM	Helium valve opened
6/1/2012	12:12:36 PM	Main Vac valve opened
6/1/2012	12:12:36 PM	Helium MFC set to  20.000000
6/1/2012	12:12:36 PM	H2 MFC set to  0.000000
6/1/2012	12:12:36 PM	BCl3 MFC set to  0.000000
6/1/2012	12:12:36 PM	PH3 MFC set to  0.000000
6/1/2012	12:12:36 PM	SiCl4 MFC set to  0.000000
6/1/2012	12:12:36 PM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:12:36 PM	Tube furnace set to 0
6/1/2012	12:13:06 PM	Helium valve closed
6/1/2012	12:13:06 PM	H2 valve closed
6/1/2012	12:13:06 PM	BCl3 valve closed
6/1/2012	12:13:06 PM	PH3 valve closed
6/1/2012	12:13:06 PM	SiCl4 pre valve closed
6/1/2012	12:13:06 PM	SiCl4 post valve closed
6/1/2012	12:13:06 PM	Bypass valve closed
6/1/2012	12:13:06 PM	Bubbler valve closed
6/1/2012	12:13:06 PM	Main Vac valve opened
6/1/2012	12:13:06 PM	Helium MFC set to  0.000000
6/1/2012	12:13:06 PM	H2 MFC set to  0.000000
6/1/2012	12:13:06 PM	BCl3 MFC set to  0.000000
6/1/2012	12:13:06 PM	PH3 MFC set to  0.000000
6/1/2012	12:13:06 PM	SiCl4 MFC set to  0.000000
6/1/2012	12:13:06 PM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:13:06 PM	Tube furnace set to 0
6/1/2012	12:13:36 PM	H2 valve closed
6/1/2012	12:13:36 PM	BCl3 valve closed
6/1/2012	12:13:36 PM	PH3 valve closed
6/1/2012	12:13:36 PM	SiCl4 pre valve closed
6/1/2012	12:13:36 PM	SiCl4 post valve closed
6/1/2012	12:13:36 PM	Bypass valve closed
6/1/2012	12:13:36 PM	Bubbler valve closed
6/1/2012	12:13:36 PM	Helium valve opened
6/1/2012	12:13:36 PM	Main Vac valve opened
6/1/2012	12:13:36 PM	Helium MFC set to  20.000000
6/1/2012	12:13:36 PM	H2 MFC set to  0.000000
6/1/2012	12:13:36 PM	BCl3 MFC set to  0.000000
6/1/2012	12:13:36 PM	PH3 MFC set to  0.000000
6/1/2012	12:13:36 PM	SiCl4 MFC set to  0.000000
6/1/2012	12:13:36 PM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:13:37 PM	Tube furnace set to 0
6/1/2012	12:14:07 PM	Helium valve closed
6/1/2012	12:14:07 PM	H2 valve closed
6/1/2012	12:14:07 PM	BCl3 valve closed
6/1/2012	12:14:07 PM	PH3 valve closed
6/1/2012	12:14:07 PM	SiCl4 pre valve closed
6/1/2012	12:14:07 PM	SiCl4 post valve closed
6/1/2012	12:14:07 PM	Bypass valve closed
6/1/2012	12:14:07 PM	Bubbler valve closed
6/1/2012	12:14:07 PM	Main Vac valve opened
6/1/2012	12:14:07 PM	Helium MFC set to  0.000000
6/1/2012	12:14:07 PM	H2 MFC set to  0.000000
6/1/2012	12:14:07 PM	BCl3 MFC set to  0.000000
6/1/2012	12:14:07 PM	PH3 MFC set to  0.000000
6/1/2012	12:14:07 PM	SiCl4 MFC set to  0.000000
6/1/2012	12:14:07 PM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:14:07 PM	Tube furnace set to 0
6/1/2012	12:14:37 PM	H2 valve closed
6/1/2012	12:14:37 PM	BCl3 valve closed
6/1/2012	12:14:37 PM	PH3 valve closed
6/1/2012	12:14:37 PM	SiCl4 pre valve closed
6/1/2012	12:14:37 PM	SiCl4 post valve closed
6/1/2012	12:14:37 PM	Bypass valve closed
6/1/2012	12:14:37 PM	Bubbler valve closed
6/1/2012	12:14:37 PM	Helium valve opened
6/1/2012	12:14:37 PM	Main Vac valve opened
6/1/2012	12:14:37 PM	Helium MFC set to  20.000000
6/1/2012	12:14:37 PM	H2 MFC set to  0.000000
6/1/2012	12:14:37 PM	BCl3 MFC set to  0.000000
6/1/2012	12:14:37 PM	PH3 MFC set to  0.000000
6/1/2012	12:14:37 PM	SiCl4 MFC set to  0.000000
6/1/2012	12:14:37 PM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:14:37 PM	Tube furnace set to 0
6/1/2012	12:15:07 PM	Helium valve closed
6/1/2012	12:15:07 PM	H2 valve closed
6/1/2012	12:15:07 PM	BCl3 valve closed
6/1/2012	12:15:07 PM	PH3 valve closed
6/1/2012	12:15:07 PM	SiCl4 pre valve closed
6/1/2012	12:15:07 PM	SiCl4 post valve closed
6/1/2012	12:15:07 PM	Bypass valve closed
6/1/2012	12:15:07 PM	Bubbler valve closed
6/1/2012	12:15:07 PM	Main Vac valve opened
6/1/2012	12:15:07 PM	Helium MFC set to  0.000000
6/1/2012	12:15:07 PM	H2 MFC set to  0.000000
6/1/2012	12:15:07 PM	BCl3 MFC set to  0.000000
6/1/2012	12:15:07 PM	PH3 MFC set to  0.000000
6/1/2012	12:15:07 PM	SiCl4 MFC set to  0.000000
6/1/2012	12:15:07 PM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:15:07 PM	Tube furnace set to 0
6/1/2012	12:15:37 PM	H2 valve closed
6/1/2012	12:15:37 PM	BCl3 valve closed
6/1/2012	12:15:37 PM	PH3 valve closed
6/1/2012	12:15:37 PM	SiCl4 pre valve closed
6/1/2012	12:15:37 PM	SiCl4 post valve closed
6/1/2012	12:15:37 PM	Bypass valve closed
6/1/2012	12:15:37 PM	Bubbler valve closed
6/1/2012	12:15:37 PM	Helium valve opened
6/1/2012	12:15:37 PM	Main Vac valve opened
6/1/2012	12:15:37 PM	Helium MFC set to  20.000000
6/1/2012	12:15:37 PM	H2 MFC set to  0.000000
6/1/2012	12:15:37 PM	BCl3 MFC set to  0.000000
6/1/2012	12:15:37 PM	PH3 MFC set to  0.000000
6/1/2012	12:15:37 PM	SiCl4 MFC set to  0.000000
6/1/2012	12:15:37 PM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:15:38 PM	Tube furnace set to 0
6/1/2012	12:16:08 PM	Helium valve closed
6/1/2012	12:16:08 PM	H2 valve closed
6/1/2012	12:16:08 PM	BCl3 valve closed
6/1/2012	12:16:08 PM	PH3 valve closed
6/1/2012	12:16:08 PM	SiCl4 pre valve closed
6/1/2012	12:16:08 PM	SiCl4 post valve closed
6/1/2012	12:16:08 PM	Bypass valve closed
6/1/2012	12:16:08 PM	Bubbler valve closed
6/1/2012	12:16:08 PM	Main Vac valve opened
6/1/2012	12:16:08 PM	Helium MFC set to  0.000000
6/1/2012	12:16:08 PM	H2 MFC set to  0.000000
6/1/2012	12:16:08 PM	BCl3 MFC set to  0.000000
6/1/2012	12:16:08 PM	PH3 MFC set to  0.000000
6/1/2012	12:16:08 PM	SiCl4 MFC set to  0.000000
6/1/2012	12:16:08 PM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:16:08 PM	Tube furnace set to 0
6/1/2012	12:16:38 PM	H2 valve closed
6/1/2012	12:16:38 PM	BCl3 valve closed
6/1/2012	12:16:38 PM	PH3 valve closed
6/1/2012	12:16:38 PM	SiCl4 pre valve closed
6/1/2012	12:16:38 PM	SiCl4 post valve closed
6/1/2012	12:16:38 PM	Bypass valve closed
6/1/2012	12:16:38 PM	Bubbler valve closed
6/1/2012	12:16:38 PM	Helium valve opened
6/1/2012	12:16:38 PM	Main Vac valve opened
6/1/2012	12:16:38 PM	Helium MFC set to  20.000000
6/1/2012	12:16:38 PM	H2 MFC set to  0.000000
6/1/2012	12:16:38 PM	BCl3 MFC set to  0.000000
6/1/2012	12:16:38 PM	PH3 MFC set to  0.000000
6/1/2012	12:16:38 PM	SiCl4 MFC set to  0.000000
6/1/2012	12:16:38 PM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:16:38 PM	Tube furnace set to 0
6/1/2012	12:17:08 PM	Helium valve closed
6/1/2012	12:17:08 PM	H2 valve closed
6/1/2012	12:17:08 PM	BCl3 valve closed
6/1/2012	12:17:08 PM	PH3 valve closed
6/1/2012	12:17:08 PM	SiCl4 pre valve closed
6/1/2012	12:17:08 PM	SiCl4 post valve closed
6/1/2012	12:17:08 PM	Bypass valve closed
6/1/2012	12:17:08 PM	Bubbler valve closed
6/1/2012	12:17:08 PM	Main Vac valve opened
6/1/2012	12:17:08 PM	Helium MFC set to  0.000000
6/1/2012	12:17:08 PM	H2 MFC set to  0.000000
6/1/2012	12:17:08 PM	BCl3 MFC set to  0.000000
6/1/2012	12:17:08 PM	PH3 MFC set to  0.000000
6/1/2012	12:17:08 PM	SiCl4 MFC set to  0.000000
6/1/2012	12:17:08 PM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:17:08 PM	Tube furnace set to 200
6/1/2012	12:17:38 PM	H2 valve closed
6/1/2012	12:17:38 PM	BCl3 valve closed
6/1/2012	12:17:38 PM	PH3 valve closed
6/1/2012	12:17:38 PM	SiCl4 pre valve closed
6/1/2012	12:17:38 PM	SiCl4 post valve closed
6/1/2012	12:17:38 PM	Bypass valve closed
6/1/2012	12:17:38 PM	Bubbler valve closed
6/1/2012	12:17:38 PM	Helium valve opened
6/1/2012	12:17:38 PM	Main Vac valve opened
6/1/2012	12:17:38 PM	Helium MFC set to  20.000000
6/1/2012	12:17:38 PM	H2 MFC set to  0.000000
6/1/2012	12:17:38 PM	BCl3 MFC set to  0.000000
6/1/2012	12:17:38 PM	PH3 MFC set to  0.000000
6/1/2012	12:17:38 PM	SiCl4 MFC set to  0.000000
6/1/2012	12:17:38 PM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:17:38 PM	Tube furnace set to 200
6/1/2012	12:18:08 PM	Helium valve closed
6/1/2012	12:18:08 PM	H2 valve closed
6/1/2012	12:18:09 PM	BCl3 valve closed
6/1/2012	12:18:09 PM	PH3 valve closed
6/1/2012	12:18:09 PM	SiCl4 pre valve closed
6/1/2012	12:18:09 PM	SiCl4 post valve closed
6/1/2012	12:18:09 PM	Bypass valve closed
6/1/2012	12:18:09 PM	Bubbler valve closed
6/1/2012	12:18:09 PM	Main Vac valve opened
6/1/2012	12:18:09 PM	Helium MFC set to  0.000000
6/1/2012	12:18:09 PM	H2 MFC set to  0.000000
6/1/2012	12:18:09 PM	BCl3 MFC set to  0.000000
6/1/2012	12:18:09 PM	PH3 MFC set to  0.000000
6/1/2012	12:18:09 PM	SiCl4 MFC set to  0.000000
6/1/2012	12:18:09 PM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:18:09 PM	Tube furnace set to 200
6/1/2012	12:18:39 PM	H2 valve closed
6/1/2012	12:18:39 PM	BCl3 valve closed
6/1/2012	12:18:39 PM	PH3 valve closed
6/1/2012	12:18:39 PM	SiCl4 pre valve closed
6/1/2012	12:18:39 PM	SiCl4 post valve closed
6/1/2012	12:18:39 PM	Bypass valve closed
6/1/2012	12:18:39 PM	Bubbler valve closed
6/1/2012	12:18:39 PM	Helium valve opened
6/1/2012	12:18:39 PM	Main Vac valve opened
6/1/2012	12:18:39 PM	Helium MFC set to  20.000000
6/1/2012	12:18:39 PM	H2 MFC set to  0.000000
6/1/2012	12:18:39 PM	BCl3 MFC set to  0.000000
6/1/2012	12:18:39 PM	PH3 MFC set to  0.000000
6/1/2012	12:18:39 PM	SiCl4 MFC set to  0.000000
6/1/2012	12:18:39 PM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:18:39 PM	Tube furnace set to 200
6/1/2012	12:19:09 PM	Helium valve closed
6/1/2012	12:19:09 PM	H2 valve closed
6/1/2012	12:19:09 PM	BCl3 valve closed
6/1/2012	12:19:09 PM	PH3 valve closed
6/1/2012	12:19:09 PM	SiCl4 pre valve closed
6/1/2012	12:19:09 PM	SiCl4 post valve closed
6/1/2012	12:19:09 PM	Bypass valve closed
6/1/2012	12:19:09 PM	Bubbler valve closed
6/1/2012	12:19:09 PM	Main Vac valve opened
6/1/2012	12:19:09 PM	Helium MFC set to  0.000000
6/1/2012	12:19:09 PM	H2 MFC set to  0.000000
6/1/2012	12:19:09 PM	BCl3 MFC set to  0.000000
6/1/2012	12:19:09 PM	PH3 MFC set to  0.000000
6/1/2012	12:19:09 PM	SiCl4 MFC set to  0.000000
6/1/2012	12:19:09 PM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:19:09 PM	Tube furnace set to 200
6/1/2012	12:19:39 PM	H2 valve closed
6/1/2012	12:19:39 PM	BCl3 valve closed
6/1/2012	12:19:39 PM	PH3 valve closed
6/1/2012	12:19:39 PM	SiCl4 pre valve closed
6/1/2012	12:19:39 PM	SiCl4 post valve closed
6/1/2012	12:19:39 PM	Bypass valve closed
6/1/2012	12:19:39 PM	Bubbler valve closed
6/1/2012	12:19:39 PM	Helium valve opened
6/1/2012	12:19:39 PM	Main Vac valve opened
6/1/2012	12:19:39 PM	Helium MFC set to  20.000000
6/1/2012	12:19:39 PM	H2 MFC set to  0.000000
6/1/2012	12:19:39 PM	BCl3 MFC set to  0.000000
6/1/2012	12:19:39 PM	PH3 MFC set to  0.000000
6/1/2012	12:19:39 PM	SiCl4 MFC set to  0.000000
6/1/2012	12:19:39 PM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:19:39 PM	Tube furnace set to 200
6/1/2012	12:20:09 PM	Helium valve closed
6/1/2012	12:20:09 PM	H2 valve closed
6/1/2012	12:20:09 PM	BCl3 valve closed
6/1/2012	12:20:09 PM	PH3 valve closed
6/1/2012	12:20:09 PM	SiCl4 pre valve closed
6/1/2012	12:20:09 PM	SiCl4 post valve closed
6/1/2012	12:20:09 PM	Bypass valve closed
6/1/2012	12:20:09 PM	Bubbler valve closed
6/1/2012	12:20:09 PM	Main Vac valve opened
6/1/2012	12:20:09 PM	Helium MFC set to  0.000000
6/1/2012	12:20:09 PM	H2 MFC set to  0.000000
6/1/2012	12:20:09 PM	BCl3 MFC set to  0.000000
6/1/2012	12:20:09 PM	PH3 MFC set to  0.000000
6/1/2012	12:20:09 PM	SiCl4 MFC set to  0.000000
6/1/2012	12:20:09 PM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:20:10 PM	Tube furnace set to 200
6/1/2012	12:20:40 PM	H2 valve closed
6/1/2012	12:20:40 PM	BCl3 valve closed
6/1/2012	12:20:40 PM	PH3 valve closed
6/1/2012	12:20:40 PM	SiCl4 pre valve closed
6/1/2012	12:20:40 PM	SiCl4 post valve closed
6/1/2012	12:20:40 PM	Bypass valve closed
6/1/2012	12:20:40 PM	Bubbler valve closed
6/1/2012	12:20:40 PM	Helium valve opened
6/1/2012	12:20:40 PM	Main Vac valve opened
6/1/2012	12:20:40 PM	Helium MFC set to  20.000000
6/1/2012	12:20:40 PM	H2 MFC set to  0.000000
6/1/2012	12:20:40 PM	BCl3 MFC set to  0.000000
6/1/2012	12:20:40 PM	PH3 MFC set to  0.000000
6/1/2012	12:20:40 PM	SiCl4 MFC set to  0.000000
6/1/2012	12:20:40 PM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:20:40 PM	Tube furnace set to 200
6/1/2012	12:21:10 PM	Helium valve closed
6/1/2012	12:21:10 PM	H2 valve closed
6/1/2012	12:21:10 PM	BCl3 valve closed
6/1/2012	12:21:10 PM	PH3 valve closed
6/1/2012	12:21:10 PM	SiCl4 pre valve closed
6/1/2012	12:21:10 PM	SiCl4 post valve closed
6/1/2012	12:21:10 PM	Bypass valve closed
6/1/2012	12:21:10 PM	Bubbler valve closed
6/1/2012	12:21:10 PM	Main Vac valve opened
6/1/2012	12:21:10 PM	Helium MFC set to  0.000000
6/1/2012	12:21:10 PM	H2 MFC set to  0.000000
6/1/2012	12:21:10 PM	BCl3 MFC set to  0.000000
6/1/2012	12:21:10 PM	PH3 MFC set to  0.000000
6/1/2012	12:21:10 PM	SiCl4 MFC set to  0.000000
6/1/2012	12:21:10 PM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:21:10 PM	Tube furnace set to 200
6/1/2012	12:21:40 PM	H2 valve closed
6/1/2012	12:21:40 PM	BCl3 valve closed
6/1/2012	12:21:40 PM	PH3 valve closed
6/1/2012	12:21:40 PM	SiCl4 pre valve closed
6/1/2012	12:21:40 PM	SiCl4 post valve closed
6/1/2012	12:21:40 PM	Bypass valve closed
6/1/2012	12:21:40 PM	Bubbler valve closed
6/1/2012	12:21:40 PM	Helium valve opened
6/1/2012	12:21:40 PM	Main Vac valve opened
6/1/2012	12:21:40 PM	Helium MFC set to  20.000000
6/1/2012	12:21:40 PM	H2 MFC set to  0.000000
6/1/2012	12:21:40 PM	BCl3 MFC set to  0.000000
6/1/2012	12:21:40 PM	PH3 MFC set to  0.000000
6/1/2012	12:21:40 PM	SiCl4 MFC set to  0.000000
6/1/2012	12:21:40 PM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:21:40 PM	Tube furnace set to 200
6/1/2012	12:22:10 PM	Helium valve closed
6/1/2012	12:22:10 PM	H2 valve closed
6/1/2012	12:22:10 PM	BCl3 valve closed
6/1/2012	12:22:10 PM	PH3 valve closed
6/1/2012	12:22:10 PM	SiCl4 pre valve closed
6/1/2012	12:22:10 PM	SiCl4 post valve closed
6/1/2012	12:22:10 PM	Bypass valve closed
6/1/2012	12:22:10 PM	Bubbler valve closed
6/1/2012	12:22:10 PM	Main Vac valve opened
6/1/2012	12:22:10 PM	Helium MFC set to  0.000000
6/1/2012	12:22:10 PM	H2 MFC set to  0.000000
6/1/2012	12:22:10 PM	BCl3 MFC set to  0.000000
6/1/2012	12:22:10 PM	PH3 MFC set to  0.000000
6/1/2012	12:22:10 PM	SiCl4 MFC set to  0.000000
6/1/2012	12:22:10 PM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:22:11 PM	Tube furnace set to 200
6/1/2012	12:22:11 PM	H2 valve closed
6/1/2012	12:22:11 PM	BCl3 valve closed
6/1/2012	12:22:11 PM	PH3 valve closed
6/1/2012	12:22:11 PM	SiCl4 pre valve closed
6/1/2012	12:22:11 PM	SiCl4 post valve closed
6/1/2012	12:22:11 PM	Bypass valve closed
6/1/2012	12:22:11 PM	Bubbler valve closed
6/1/2012	12:22:11 PM	Helium valve opened
6/1/2012	12:22:11 PM	Main Vac valve opened
6/1/2012	12:22:11 PM	Helium MFC set to  20.000000
6/1/2012	12:22:11 PM	H2 MFC set to  0.000000
6/1/2012	12:22:11 PM	BCl3 MFC set to  0.000000
6/1/2012	12:22:11 PM	PH3 MFC set to  0.000000
6/1/2012	12:22:11 PM	SiCl4 MFC set to  0.000000
6/1/2012	12:22:11 PM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:22:11 PM	Tube furnace set to 200
6/1/2012	12:22:12 PM	Helium valve closed
6/1/2012	12:22:12 PM	H2 valve closed
6/1/2012	12:22:12 PM	BCl3 valve closed
6/1/2012	12:22:12 PM	PH3 valve closed
6/1/2012	12:22:12 PM	SiCl4 pre valve closed
6/1/2012	12:22:12 PM	SiCl4 post valve closed
6/1/2012	12:22:12 PM	Bypass valve closed
6/1/2012	12:22:12 PM	Bubbler valve closed
6/1/2012	12:22:12 PM	Main Vac valve opened
6/1/2012	12:22:12 PM	Helium MFC set to  0.000000
6/1/2012	12:22:12 PM	H2 MFC set to  0.000000
6/1/2012	12:22:12 PM	BCl3 MFC set to  0.000000
6/1/2012	12:22:12 PM	PH3 MFC set to  0.000000
6/1/2012	12:22:12 PM	SiCl4 MFC set to  0.000000
6/1/2012	12:22:12 PM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:22:12 PM	Tube furnace set to 0
6/1/2012	12:22:13 PM	Run finished at 12:22 PM
6/1/2012	12:22:55 PM	Recipe started at 12:22 PM
6/1/2012	12:22:55 PM	Helium valve closed
6/1/2012	12:22:55 PM	H2 valve closed
6/1/2012	12:22:56 PM	BCl3 valve closed
6/1/2012	12:22:56 PM	PH3 valve closed
6/1/2012	12:22:56 PM	SiCl4 pre valve closed
6/1/2012	12:22:56 PM	SiCl4 post valve closed
6/1/2012	12:22:56 PM	Bypass valve closed
6/1/2012	12:22:56 PM	Bubbler valve closed
6/1/2012	12:22:56 PM	Main Vac valve opened
6/1/2012	12:22:56 PM	Helium MFC set to  0.000000
6/1/2012	12:22:56 PM	H2 MFC set to  0.000000
6/1/2012	12:22:56 PM	BCl3 MFC set to  0.000000
6/1/2012	12:22:56 PM	PH3 MFC set to  0.000000
6/1/2012	12:22:56 PM	SiCl4 MFC set to  0.000000
6/1/2012	12:22:56 PM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:22:56 PM	Tube furnace set to 0
6/1/2012	12:23:26 PM	H2 valve closed
6/1/2012	12:23:26 PM	BCl3 valve closed
6/1/2012	12:23:26 PM	PH3 valve closed
6/1/2012	12:23:26 PM	SiCl4 pre valve closed
6/1/2012	12:23:26 PM	SiCl4 post valve closed
6/1/2012	12:23:26 PM	Bypass valve closed
6/1/2012	12:23:26 PM	Bubbler valve closed
6/1/2012	12:23:26 PM	Helium valve opened
6/1/2012	12:23:26 PM	Main Vac valve opened
6/1/2012	12:23:26 PM	Helium MFC set to  20.000000
6/1/2012	12:23:26 PM	H2 MFC set to  0.000000
6/1/2012	12:23:26 PM	BCl3 MFC set to  0.000000
6/1/2012	12:23:26 PM	PH3 MFC set to  0.000000
6/1/2012	12:23:26 PM	SiCl4 MFC set to  0.000000
6/1/2012	12:23:26 PM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:23:26 PM	Tube furnace set to 0
6/1/2012	12:23:56 PM	Helium valve closed
6/1/2012	12:23:56 PM	H2 valve closed
6/1/2012	12:23:56 PM	BCl3 valve closed
6/1/2012	12:23:56 PM	PH3 valve closed
6/1/2012	12:23:56 PM	SiCl4 pre valve closed
6/1/2012	12:23:56 PM	SiCl4 post valve closed
6/1/2012	12:23:56 PM	Bypass valve closed
6/1/2012	12:23:56 PM	Bubbler valve closed
6/1/2012	12:23:56 PM	Main Vac valve opened
6/1/2012	12:23:56 PM	Helium MFC set to  0.000000
6/1/2012	12:23:56 PM	H2 MFC set to  0.000000
6/1/2012	12:23:56 PM	BCl3 MFC set to  0.000000
6/1/2012	12:23:56 PM	PH3 MFC set to  0.000000
6/1/2012	12:23:56 PM	SiCl4 MFC set to  0.000000
6/1/2012	12:23:56 PM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:23:56 PM	Tube furnace set to 0
6/1/2012	12:24:26 PM	H2 valve closed
6/1/2012	12:24:26 PM	BCl3 valve closed
6/1/2012	12:24:26 PM	PH3 valve closed
6/1/2012	12:24:26 PM	SiCl4 pre valve closed
6/1/2012	12:24:26 PM	SiCl4 post valve closed
6/1/2012	12:24:26 PM	Bypass valve closed
6/1/2012	12:24:26 PM	Bubbler valve closed
6/1/2012	12:24:26 PM	Helium valve opened
6/1/2012	12:24:26 PM	Main Vac valve opened
6/1/2012	12:24:26 PM	Helium MFC set to  20.000000
6/1/2012	12:24:26 PM	H2 MFC set to  0.000000
6/1/2012	12:24:26 PM	BCl3 MFC set to  0.000000
6/1/2012	12:24:26 PM	PH3 MFC set to  0.000000
6/1/2012	12:24:26 PM	SiCl4 MFC set to  0.000000
6/1/2012	12:24:26 PM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:24:26 PM	Tube furnace set to 0
6/1/2012	12:24:56 PM	Helium valve closed
6/1/2012	12:24:56 PM	H2 valve closed
6/1/2012	12:24:56 PM	BCl3 valve closed
6/1/2012	12:24:56 PM	PH3 valve closed
6/1/2012	12:24:56 PM	SiCl4 pre valve closed
6/1/2012	12:24:56 PM	SiCl4 post valve closed
6/1/2012	12:24:56 PM	Bypass valve closed
6/1/2012	12:24:56 PM	Bubbler valve closed
6/1/2012	12:24:56 PM	Main Vac valve opened
6/1/2012	12:24:56 PM	Helium MFC set to  0.000000
6/1/2012	12:24:56 PM	H2 MFC set to  0.000000
6/1/2012	12:24:56 PM	BCl3 MFC set to  0.000000
6/1/2012	12:24:56 PM	PH3 MFC set to  0.000000
6/1/2012	12:24:56 PM	SiCl4 MFC set to  0.000000
6/1/2012	12:24:56 PM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:24:57 PM	Tube furnace set to 0
6/1/2012	12:25:27 PM	H2 valve closed
6/1/2012	12:25:27 PM	BCl3 valve closed
6/1/2012	12:25:27 PM	PH3 valve closed
6/1/2012	12:25:27 PM	SiCl4 pre valve closed
6/1/2012	12:25:27 PM	SiCl4 post valve closed
6/1/2012	12:25:27 PM	Bypass valve closed
6/1/2012	12:25:27 PM	Bubbler valve closed
6/1/2012	12:25:27 PM	Helium valve opened
6/1/2012	12:25:27 PM	Main Vac valve opened
6/1/2012	12:25:27 PM	Helium MFC set to  20.000000
6/1/2012	12:25:27 PM	H2 MFC set to  0.000000
6/1/2012	12:25:27 PM	BCl3 MFC set to  0.000000
6/1/2012	12:25:27 PM	PH3 MFC set to  0.000000
6/1/2012	12:25:27 PM	SiCl4 MFC set to  0.000000
6/1/2012	12:25:27 PM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:25:27 PM	Tube furnace set to 0
6/1/2012	12:25:57 PM	Helium valve closed
6/1/2012	12:25:57 PM	H2 valve closed
6/1/2012	12:25:57 PM	BCl3 valve closed
6/1/2012	12:25:57 PM	PH3 valve closed
6/1/2012	12:25:57 PM	SiCl4 pre valve closed
6/1/2012	12:25:57 PM	SiCl4 post valve closed
6/1/2012	12:25:57 PM	Bypass valve closed
6/1/2012	12:25:57 PM	Bubbler valve closed
6/1/2012	12:25:57 PM	Main Vac valve opened
6/1/2012	12:25:57 PM	Helium MFC set to  0.000000
6/1/2012	12:25:57 PM	H2 MFC set to  0.000000
6/1/2012	12:25:57 PM	BCl3 MFC set to  0.000000
6/1/2012	12:25:57 PM	PH3 MFC set to  0.000000
6/1/2012	12:25:57 PM	SiCl4 MFC set to  0.000000
6/1/2012	12:25:57 PM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:25:57 PM	Tube furnace set to 0
6/1/2012	12:26:27 PM	H2 valve closed
6/1/2012	12:26:27 PM	BCl3 valve closed
6/1/2012	12:26:27 PM	PH3 valve closed
6/1/2012	12:26:27 PM	SiCl4 pre valve closed
6/1/2012	12:26:27 PM	SiCl4 post valve closed
6/1/2012	12:26:27 PM	Bypass valve closed
6/1/2012	12:26:27 PM	Bubbler valve closed
6/1/2012	12:26:27 PM	Helium valve opened
6/1/2012	12:26:27 PM	Main Vac valve opened
6/1/2012	12:26:27 PM	Helium MFC set to  20.000000
6/1/2012	12:26:27 PM	H2 MFC set to  0.000000
6/1/2012	12:26:27 PM	BCl3 MFC set to  0.000000
6/1/2012	12:26:27 PM	PH3 MFC set to  0.000000
6/1/2012	12:26:27 PM	SiCl4 MFC set to  0.000000
6/1/2012	12:26:27 PM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:26:27 PM	Tube furnace set to 0
6/1/2012	12:26:57 PM	Helium valve closed
6/1/2012	12:26:57 PM	H2 valve closed
6/1/2012	12:26:57 PM	BCl3 valve closed
6/1/2012	12:26:57 PM	PH3 valve closed
6/1/2012	12:26:57 PM	SiCl4 pre valve closed
6/1/2012	12:26:57 PM	SiCl4 post valve closed
6/1/2012	12:26:57 PM	Bypass valve closed
6/1/2012	12:26:57 PM	Bubbler valve closed
6/1/2012	12:26:57 PM	Main Vac valve opened
6/1/2012	12:26:57 PM	Helium MFC set to  0.000000
6/1/2012	12:26:57 PM	H2 MFC set to  0.000000
6/1/2012	12:26:57 PM	BCl3 MFC set to  0.000000
6/1/2012	12:26:57 PM	PH3 MFC set to  0.000000
6/1/2012	12:26:57 PM	SiCl4 MFC set to  0.000000
6/1/2012	12:26:57 PM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:26:58 PM	Tube furnace set to 0
6/1/2012	12:27:28 PM	H2 valve closed
6/1/2012	12:27:28 PM	BCl3 valve closed
6/1/2012	12:27:28 PM	PH3 valve closed
6/1/2012	12:27:28 PM	SiCl4 pre valve closed
6/1/2012	12:27:28 PM	SiCl4 post valve closed
6/1/2012	12:27:28 PM	Bypass valve closed
6/1/2012	12:27:28 PM	Bubbler valve closed
6/1/2012	12:27:28 PM	Helium valve opened
6/1/2012	12:27:28 PM	Main Vac valve opened
6/1/2012	12:27:28 PM	Helium MFC set to  20.000000
6/1/2012	12:27:28 PM	H2 MFC set to  0.000000
6/1/2012	12:27:28 PM	BCl3 MFC set to  0.000000
6/1/2012	12:27:28 PM	PH3 MFC set to  0.000000
6/1/2012	12:27:28 PM	SiCl4 MFC set to  0.000000
6/1/2012	12:27:28 PM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:27:28 PM	Tube furnace set to 0
6/1/2012	12:27:58 PM	Helium valve closed
6/1/2012	12:27:58 PM	H2 valve closed
6/1/2012	12:27:58 PM	BCl3 valve closed
6/1/2012	12:27:58 PM	PH3 valve closed
6/1/2012	12:27:58 PM	SiCl4 pre valve closed
6/1/2012	12:27:58 PM	SiCl4 post valve closed
6/1/2012	12:27:58 PM	Bypass valve closed
6/1/2012	12:27:58 PM	Bubbler valve closed
6/1/2012	12:27:58 PM	Main Vac valve opened
6/1/2012	12:27:58 PM	Helium MFC set to  0.000000
6/1/2012	12:27:58 PM	H2 MFC set to  0.000000
6/1/2012	12:27:58 PM	BCl3 MFC set to  0.000000
6/1/2012	12:27:58 PM	PH3 MFC set to  0.000000
6/1/2012	12:27:58 PM	SiCl4 MFC set to  0.000000
6/1/2012	12:27:58 PM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:27:58 PM	Tube furnace set to 0
6/1/2012	12:28:28 PM	H2 valve closed
6/1/2012	12:28:28 PM	BCl3 valve closed
6/1/2012	12:28:28 PM	PH3 valve closed
6/1/2012	12:28:28 PM	SiCl4 pre valve closed
6/1/2012	12:28:28 PM	SiCl4 post valve closed
6/1/2012	12:28:28 PM	Bypass valve closed
6/1/2012	12:28:28 PM	Bubbler valve closed
6/1/2012	12:28:28 PM	Helium valve opened
6/1/2012	12:28:28 PM	Main Vac valve opened
6/1/2012	12:28:28 PM	Helium MFC set to  20.000000
6/1/2012	12:28:28 PM	H2 MFC set to  0.000000
6/1/2012	12:28:28 PM	BCl3 MFC set to  0.000000
6/1/2012	12:28:28 PM	PH3 MFC set to  0.000000
6/1/2012	12:28:28 PM	SiCl4 MFC set to  0.000000
6/1/2012	12:28:28 PM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:28:28 PM	Tube furnace set to 0
6/1/2012	12:28:58 PM	Helium valve closed
6/1/2012	12:28:58 PM	H2 valve closed
6/1/2012	12:28:58 PM	BCl3 valve closed
6/1/2012	12:28:58 PM	PH3 valve closed
6/1/2012	12:28:58 PM	SiCl4 pre valve closed
6/1/2012	12:28:58 PM	SiCl4 post valve closed
6/1/2012	12:28:58 PM	Bypass valve closed
6/1/2012	12:28:58 PM	Bubbler valve closed
6/1/2012	12:28:58 PM	Main Vac valve opened
6/1/2012	12:28:58 PM	Helium MFC set to  0.000000
6/1/2012	12:28:58 PM	H2 MFC set to  0.000000
6/1/2012	12:28:58 PM	BCl3 MFC set to  0.000000
6/1/2012	12:28:58 PM	PH3 MFC set to  0.000000
6/1/2012	12:28:58 PM	SiCl4 MFC set to  0.000000
6/1/2012	12:28:58 PM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:28:59 PM	Tube furnace set to 0
6/1/2012	12:29:28 PM	H2 valve closed
6/1/2012	12:29:28 PM	BCl3 valve closed
6/1/2012	12:29:28 PM	PH3 valve closed
6/1/2012	12:29:28 PM	SiCl4 pre valve closed
6/1/2012	12:29:28 PM	SiCl4 post valve closed
6/1/2012	12:29:28 PM	Bypass valve closed
6/1/2012	12:29:29 PM	Bubbler valve closed
6/1/2012	12:29:29 PM	Helium valve opened
6/1/2012	12:29:29 PM	Main Vac valve opened
6/1/2012	12:29:29 PM	Helium MFC set to  20.000000
6/1/2012	12:29:29 PM	H2 MFC set to  0.000000
6/1/2012	12:29:29 PM	BCl3 MFC set to  0.000000
6/1/2012	12:29:29 PM	PH3 MFC set to  0.000000
6/1/2012	12:29:29 PM	SiCl4 MFC set to  0.000000
6/1/2012	12:29:29 PM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:29:29 PM	Tube furnace set to 0
6/1/2012	12:29:59 PM	Helium valve closed
6/1/2012	12:29:59 PM	H2 valve closed
6/1/2012	12:29:59 PM	BCl3 valve closed
6/1/2012	12:29:59 PM	PH3 valve closed
6/1/2012	12:29:59 PM	SiCl4 pre valve closed
6/1/2012	12:29:59 PM	SiCl4 post valve closed
6/1/2012	12:29:59 PM	Bypass valve closed
6/1/2012	12:29:59 PM	Bubbler valve closed
6/1/2012	12:29:59 PM	Main Vac valve opened
6/1/2012	12:29:59 PM	Helium MFC set to  0.000000
6/1/2012	12:29:59 PM	H2 MFC set to  0.000000
6/1/2012	12:29:59 PM	BCl3 MFC set to  0.000000
6/1/2012	12:29:59 PM	PH3 MFC set to  0.000000
6/1/2012	12:29:59 PM	SiCl4 MFC set to  0.000000
6/1/2012	12:29:59 PM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:29:59 PM	Tube furnace set to 0
6/1/2012	12:30:29 PM	H2 valve closed
6/1/2012	12:30:29 PM	BCl3 valve closed
6/1/2012	12:30:29 PM	PH3 valve closed
6/1/2012	12:30:29 PM	SiCl4 pre valve closed
6/1/2012	12:30:29 PM	SiCl4 post valve closed
6/1/2012	12:30:29 PM	Bypass valve closed
6/1/2012	12:30:29 PM	Bubbler valve closed
6/1/2012	12:30:29 PM	Helium valve opened
6/1/2012	12:30:29 PM	Main Vac valve opened
6/1/2012	12:30:29 PM	Helium MFC set to  20.000000
6/1/2012	12:30:29 PM	H2 MFC set to  0.000000
6/1/2012	12:30:29 PM	BCl3 MFC set to  0.000000
6/1/2012	12:30:29 PM	PH3 MFC set to  0.000000
6/1/2012	12:30:29 PM	SiCl4 MFC set to  0.000000
6/1/2012	12:30:29 PM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:30:29 PM	Tube furnace set to 0
6/1/2012	12:30:59 PM	Helium valve closed
6/1/2012	12:30:59 PM	H2 valve closed
6/1/2012	12:30:59 PM	BCl3 valve closed
6/1/2012	12:30:59 PM	PH3 valve closed
6/1/2012	12:30:59 PM	SiCl4 pre valve closed
6/1/2012	12:30:59 PM	SiCl4 post valve closed
6/1/2012	12:30:59 PM	Bypass valve closed
6/1/2012	12:30:59 PM	Bubbler valve closed
6/1/2012	12:30:59 PM	Main Vac valve opened
6/1/2012	12:30:59 PM	Helium MFC set to  0.000000
6/1/2012	12:30:59 PM	H2 MFC set to  0.000000
6/1/2012	12:30:59 PM	BCl3 MFC set to  0.000000
6/1/2012	12:30:59 PM	PH3 MFC set to  0.000000
6/1/2012	12:30:59 PM	SiCl4 MFC set to  0.000000
6/1/2012	12:30:59 PM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:30:59 PM	Tube furnace set to 0
6/1/2012	12:31:29 PM	H2 valve closed
6/1/2012	12:31:29 PM	BCl3 valve closed
6/1/2012	12:31:29 PM	PH3 valve closed
6/1/2012	12:31:29 PM	SiCl4 pre valve closed
6/1/2012	12:31:29 PM	SiCl4 post valve closed
6/1/2012	12:31:29 PM	Bypass valve closed
6/1/2012	12:31:29 PM	Bubbler valve closed
6/1/2012	12:31:29 PM	Helium valve opened
6/1/2012	12:31:29 PM	Main Vac valve opened
6/1/2012	12:31:29 PM	Helium MFC set to  20.000000
6/1/2012	12:31:29 PM	H2 MFC set to  0.000000
6/1/2012	12:31:29 PM	BCl3 MFC set to  0.000000
6/1/2012	12:31:29 PM	PH3 MFC set to  0.000000
6/1/2012	12:31:29 PM	SiCl4 MFC set to  0.000000
6/1/2012	12:31:29 PM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:31:30 PM	Tube furnace set to 0
6/1/2012	12:32:00 PM	Helium valve closed
6/1/2012	12:32:00 PM	H2 valve closed
6/1/2012	12:32:00 PM	BCl3 valve closed
6/1/2012	12:32:00 PM	PH3 valve closed
6/1/2012	12:32:00 PM	SiCl4 pre valve closed
6/1/2012	12:32:00 PM	SiCl4 post valve closed
6/1/2012	12:32:00 PM	Bypass valve closed
6/1/2012	12:32:00 PM	Bubbler valve closed
6/1/2012	12:32:00 PM	Main Vac valve opened
6/1/2012	12:32:00 PM	Helium MFC set to  0.000000
6/1/2012	12:32:00 PM	H2 MFC set to  0.000000
6/1/2012	12:32:00 PM	BCl3 MFC set to  0.000000
6/1/2012	12:32:00 PM	PH3 MFC set to  0.000000
6/1/2012	12:32:00 PM	SiCl4 MFC set to  0.000000
6/1/2012	12:32:00 PM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:32:00 PM	Tube furnace set to 200
6/1/2012	12:32:30 PM	H2 valve closed
6/1/2012	12:32:30 PM	BCl3 valve closed
6/1/2012	12:32:30 PM	PH3 valve closed
6/1/2012	12:32:30 PM	SiCl4 pre valve closed
6/1/2012	12:32:30 PM	SiCl4 post valve closed
6/1/2012	12:32:30 PM	Bypass valve closed
6/1/2012	12:32:30 PM	Bubbler valve closed
6/1/2012	12:32:30 PM	Helium valve opened
6/1/2012	12:32:30 PM	Main Vac valve opened
6/1/2012	12:32:30 PM	Helium MFC set to  20.000000
6/1/2012	12:32:30 PM	H2 MFC set to  0.000000
6/1/2012	12:32:30 PM	BCl3 MFC set to  0.000000
6/1/2012	12:32:30 PM	PH3 MFC set to  0.000000
6/1/2012	12:32:30 PM	SiCl4 MFC set to  0.000000
6/1/2012	12:32:30 PM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:32:30 PM	Tube furnace set to 200
6/1/2012	12:33:00 PM	Helium valve closed
6/1/2012	12:33:00 PM	H2 valve closed
6/1/2012	12:33:00 PM	BCl3 valve closed
6/1/2012	12:33:00 PM	PH3 valve closed
6/1/2012	12:33:00 PM	SiCl4 pre valve closed
6/1/2012	12:33:00 PM	SiCl4 post valve closed
6/1/2012	12:33:00 PM	Bypass valve closed
6/1/2012	12:33:00 PM	Bubbler valve closed
6/1/2012	12:33:00 PM	Main Vac valve opened
6/1/2012	12:33:00 PM	Helium MFC set to  0.000000
6/1/2012	12:33:00 PM	H2 MFC set to  0.000000
6/1/2012	12:33:00 PM	BCl3 MFC set to  0.000000
6/1/2012	12:33:00 PM	PH3 MFC set to  0.000000
6/1/2012	12:33:00 PM	SiCl4 MFC set to  0.000000
6/1/2012	12:33:00 PM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:33:00 PM	Tube furnace set to 200
6/1/2012	12:33:30 PM	H2 valve closed
6/1/2012	12:33:30 PM	BCl3 valve closed
6/1/2012	12:33:30 PM	PH3 valve closed
6/1/2012	12:33:30 PM	SiCl4 pre valve closed
6/1/2012	12:33:30 PM	SiCl4 post valve closed
6/1/2012	12:33:30 PM	Bypass valve closed
6/1/2012	12:33:30 PM	Bubbler valve closed
6/1/2012	12:33:30 PM	Helium valve opened
6/1/2012	12:33:30 PM	Main Vac valve opened
6/1/2012	12:33:30 PM	Helium MFC set to  20.000000
6/1/2012	12:33:30 PM	H2 MFC set to  0.000000
6/1/2012	12:33:30 PM	BCl3 MFC set to  0.000000
6/1/2012	12:33:30 PM	PH3 MFC set to  0.000000
6/1/2012	12:33:30 PM	SiCl4 MFC set to  0.000000
6/1/2012	12:33:30 PM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:33:31 PM	Tube furnace set to 200
6/1/2012	12:34:01 PM	Helium valve closed
6/1/2012	12:34:01 PM	H2 valve closed
6/1/2012	12:34:01 PM	BCl3 valve closed
6/1/2012	12:34:01 PM	PH3 valve closed
6/1/2012	12:34:01 PM	SiCl4 pre valve closed
6/1/2012	12:34:01 PM	SiCl4 post valve closed
6/1/2012	12:34:01 PM	Bypass valve closed
6/1/2012	12:34:01 PM	Bubbler valve closed
6/1/2012	12:34:01 PM	Main Vac valve opened
6/1/2012	12:34:01 PM	Helium MFC set to  0.000000
6/1/2012	12:34:01 PM	H2 MFC set to  0.000000
6/1/2012	12:34:01 PM	BCl3 MFC set to  0.000000
6/1/2012	12:34:01 PM	PH3 MFC set to  0.000000
6/1/2012	12:34:01 PM	SiCl4 MFC set to  0.000000
6/1/2012	12:34:01 PM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:34:01 PM	Tube furnace set to 200
6/1/2012	12:34:31 PM	H2 valve closed
6/1/2012	12:34:31 PM	BCl3 valve closed
6/1/2012	12:34:31 PM	PH3 valve closed
6/1/2012	12:34:31 PM	SiCl4 pre valve closed
6/1/2012	12:34:31 PM	SiCl4 post valve closed
6/1/2012	12:34:31 PM	Bypass valve closed
6/1/2012	12:34:31 PM	Bubbler valve closed
6/1/2012	12:34:31 PM	Helium valve opened
6/1/2012	12:34:31 PM	Main Vac valve opened
6/1/2012	12:34:31 PM	Helium MFC set to  20.000000
6/1/2012	12:34:31 PM	H2 MFC set to  0.000000
6/1/2012	12:34:31 PM	BCl3 MFC set to  0.000000
6/1/2012	12:34:31 PM	PH3 MFC set to  0.000000
6/1/2012	12:34:31 PM	SiCl4 MFC set to  0.000000
6/1/2012	12:34:31 PM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:34:31 PM	Tube furnace set to 200
6/1/2012	12:35:01 PM	Helium valve closed
6/1/2012	12:35:01 PM	H2 valve closed
6/1/2012	12:35:01 PM	BCl3 valve closed
6/1/2012	12:35:01 PM	PH3 valve closed
6/1/2012	12:35:01 PM	SiCl4 pre valve closed
6/1/2012	12:35:01 PM	SiCl4 post valve closed
6/1/2012	12:35:01 PM	Bypass valve closed
6/1/2012	12:35:01 PM	Bubbler valve closed
6/1/2012	12:35:01 PM	Main Vac valve opened
6/1/2012	12:35:01 PM	Helium MFC set to  0.000000
6/1/2012	12:35:01 PM	H2 MFC set to  0.000000
6/1/2012	12:35:01 PM	BCl3 MFC set to  0.000000
6/1/2012	12:35:01 PM	PH3 MFC set to  0.000000
6/1/2012	12:35:01 PM	SiCl4 MFC set to  0.000000
6/1/2012	12:35:01 PM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:35:01 PM	Tube furnace set to 200
6/1/2012	12:35:31 PM	H2 valve closed
6/1/2012	12:35:31 PM	BCl3 valve closed
6/1/2012	12:35:31 PM	PH3 valve closed
6/1/2012	12:35:31 PM	SiCl4 pre valve closed
6/1/2012	12:35:31 PM	SiCl4 post valve closed
6/1/2012	12:35:31 PM	Bypass valve closed
6/1/2012	12:35:31 PM	Bubbler valve closed
6/1/2012	12:35:31 PM	Helium valve opened
6/1/2012	12:35:31 PM	Main Vac valve opened
6/1/2012	12:35:31 PM	Helium MFC set to  20.000000
6/1/2012	12:35:31 PM	H2 MFC set to  0.000000
6/1/2012	12:35:31 PM	BCl3 MFC set to  0.000000
6/1/2012	12:35:31 PM	PH3 MFC set to  0.000000
6/1/2012	12:35:31 PM	SiCl4 MFC set to  0.000000
6/1/2012	12:35:31 PM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:35:32 PM	Tube furnace set to 200
6/1/2012	12:36:02 PM	Helium valve closed
6/1/2012	12:36:02 PM	H2 valve closed
6/1/2012	12:36:02 PM	BCl3 valve closed
6/1/2012	12:36:02 PM	PH3 valve closed
6/1/2012	12:36:02 PM	SiCl4 pre valve closed
6/1/2012	12:36:02 PM	SiCl4 post valve closed
6/1/2012	12:36:02 PM	Bypass valve closed
6/1/2012	12:36:02 PM	Bubbler valve closed
6/1/2012	12:36:02 PM	Main Vac valve opened
6/1/2012	12:36:02 PM	Helium MFC set to  0.000000
6/1/2012	12:36:02 PM	H2 MFC set to  0.000000
6/1/2012	12:36:02 PM	BCl3 MFC set to  0.000000
6/1/2012	12:36:02 PM	PH3 MFC set to  0.000000
6/1/2012	12:36:02 PM	SiCl4 MFC set to  0.000000
6/1/2012	12:36:02 PM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:36:02 PM	Tube furnace set to 200
6/1/2012	12:36:32 PM	H2 valve closed
6/1/2012	12:36:32 PM	BCl3 valve closed
6/1/2012	12:36:32 PM	PH3 valve closed
6/1/2012	12:36:32 PM	SiCl4 pre valve closed
6/1/2012	12:36:32 PM	SiCl4 post valve closed
6/1/2012	12:36:32 PM	Bypass valve closed
6/1/2012	12:36:32 PM	Bubbler valve closed
6/1/2012	12:36:32 PM	Helium valve opened
6/1/2012	12:36:32 PM	Main Vac valve opened
6/1/2012	12:36:32 PM	Helium MFC set to  20.000000
6/1/2012	12:36:32 PM	H2 MFC set to  0.000000
6/1/2012	12:36:32 PM	BCl3 MFC set to  0.000000
6/1/2012	12:36:32 PM	PH3 MFC set to  0.000000
6/1/2012	12:36:32 PM	SiCl4 MFC set to  0.000000
6/1/2012	12:36:32 PM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:36:32 PM	Tube furnace set to 200
6/1/2012	12:37:02 PM	Helium valve closed
6/1/2012	12:37:02 PM	H2 valve closed
6/1/2012	12:37:02 PM	BCl3 valve closed
6/1/2012	12:37:02 PM	PH3 valve closed
6/1/2012	12:37:02 PM	SiCl4 pre valve closed
6/1/2012	12:37:02 PM	SiCl4 post valve closed
6/1/2012	12:37:02 PM	Bypass valve closed
6/1/2012	12:37:02 PM	Bubbler valve closed
6/1/2012	12:37:02 PM	Main Vac valve opened
6/1/2012	12:37:02 PM	Helium MFC set to  0.000000
6/1/2012	12:37:02 PM	H2 MFC set to  0.000000
6/1/2012	12:37:02 PM	BCl3 MFC set to  0.000000
6/1/2012	12:37:02 PM	PH3 MFC set to  0.000000
6/1/2012	12:37:02 PM	SiCl4 MFC set to  0.000000
6/1/2012	12:37:02 PM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:37:02 PM	Tube furnace set to 200
6/1/2012	12:37:32 PM	H2 valve closed
6/1/2012	12:37:32 PM	BCl3 valve closed
6/1/2012	12:37:32 PM	PH3 valve closed
6/1/2012	12:37:32 PM	SiCl4 pre valve closed
6/1/2012	12:37:32 PM	SiCl4 post valve closed
6/1/2012	12:37:32 PM	Bypass valve closed
6/1/2012	12:37:32 PM	Bubbler valve closed
6/1/2012	12:37:32 PM	Helium valve opened
6/1/2012	12:37:32 PM	Main Vac valve opened
6/1/2012	12:37:32 PM	Helium MFC set to  20.000000
6/1/2012	12:37:32 PM	H2 MFC set to  0.000000
6/1/2012	12:37:32 PM	BCl3 MFC set to  0.000000
6/1/2012	12:37:32 PM	PH3 MFC set to  0.000000
6/1/2012	12:37:32 PM	SiCl4 MFC set to  0.000000
6/1/2012	12:37:32 PM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:37:32 PM	Tube furnace set to 200
6/1/2012	12:38:03 PM	Helium valve closed
6/1/2012	12:38:03 PM	H2 valve closed
6/1/2012	12:38:03 PM	BCl3 valve closed
6/1/2012	12:38:03 PM	PH3 valve closed
6/1/2012	12:38:03 PM	SiCl4 pre valve closed
6/1/2012	12:38:03 PM	SiCl4 post valve closed
6/1/2012	12:38:03 PM	Bypass valve closed
6/1/2012	12:38:03 PM	Bubbler valve closed
6/1/2012	12:38:03 PM	Main Vac valve opened
6/1/2012	12:38:03 PM	Helium MFC set to  0.000000
6/1/2012	12:38:03 PM	H2 MFC set to  0.000000
6/1/2012	12:38:03 PM	BCl3 MFC set to  0.000000
6/1/2012	12:38:03 PM	PH3 MFC set to  0.000000
6/1/2012	12:38:03 PM	SiCl4 MFC set to  0.000000
6/1/2012	12:38:03 PM	Bypass solenoid MFC set to  0.000000
6/1/2012	12:38:03 PM	Tube furnace set to 0
6/1/2012	12:38:04 PM	Run finished at 12:38 PM
6/1/2012	1:07:24 PM	Main Vac valve closed
6/1/2012	1:07:41 PM	Main Vac valve opened
6/1/2012	1:08:23 PM	Recipe started at 1:08 PM
6/1/2012	1:08:23 PM	Helium valve closed
6/1/2012	1:08:23 PM	H2 valve closed
6/1/2012	1:08:23 PM	BCl3 valve closed
6/1/2012	1:08:23 PM	PH3 valve closed
6/1/2012	1:08:23 PM	SiCl4 pre valve closed
6/1/2012	1:08:23 PM	SiCl4 post valve closed
6/1/2012	1:08:23 PM	Main Vac valve closed
6/1/2012	1:08:23 PM	Bypass valve closed
6/1/2012	1:08:23 PM	Bubbler valve closed
6/1/2012	1:08:23 PM	Helium MFC set to  0.000000
6/1/2012	1:08:23 PM	H2 MFC set to  0.000000
6/1/2012	1:08:23 PM	BCl3 MFC set to  0.000000
6/1/2012	1:08:23 PM	PH3 MFC set to  0.000000
6/1/2012	1:08:23 PM	SiCl4 MFC set to  0.000000
6/1/2012	1:08:24 PM	Bypass solenoid MFC set to  0.000000
6/1/2012	1:08:24 PM	Tube furnace set to 0
6/1/2012	1:08:27 PM	Helium valve closed
6/1/2012	1:08:27 PM	BCl3 valve closed
6/1/2012	1:08:27 PM	PH3 valve closed
6/1/2012	1:08:27 PM	SiCl4 pre valve closed
6/1/2012	1:08:27 PM	SiCl4 post valve closed
6/1/2012	1:08:27 PM	Main Vac valve closed
6/1/2012	1:08:27 PM	Bypass valve closed
6/1/2012	1:08:27 PM	Bubbler valve closed
6/1/2012	1:08:27 PM	H2 valve opened
6/1/2012	1:08:27 PM	Helium MFC set to  0.000000
6/1/2012	1:08:27 PM	H2 MFC set to  500.000000
6/1/2012	1:08:27 PM	BCl3 MFC set to  0.000000
6/1/2012	1:08:27 PM	PH3 MFC set to  0.000000
6/1/2012	1:08:27 PM	SiCl4 MFC set to  0.000000
6/1/2012	1:08:27 PM	Bypass solenoid MFC set to  0.000000
6/1/2012	1:08:27 PM	Tube furnace set to 0
6/1/2012	1:09:39 PM	Helium valve closed
6/1/2012	1:09:39 PM	BCl3 valve closed
6/1/2012	1:09:39 PM	PH3 valve closed
6/1/2012	1:09:39 PM	SiCl4 pre valve closed
6/1/2012	1:09:39 PM	SiCl4 post valve closed
6/1/2012	1:09:39 PM	Main Vac valve closed
6/1/2012	1:09:39 PM	Bypass valve closed
6/1/2012	1:09:39 PM	H2 valve opened
6/1/2012	1:09:39 PM	Bubbler valve opened
6/1/2012	1:09:39 PM	Helium MFC set to  0.000000
6/1/2012	1:09:39 PM	H2 MFC set to  500.000000
6/1/2012	1:09:39 PM	BCl3 MFC set to  0.000000
6/1/2012	1:09:39 PM	PH3 MFC set to  0.000000
6/1/2012	1:09:39 PM	SiCl4 MFC set to  0.000000
6/1/2012	1:09:39 PM	Bypass solenoid MFC set to  0.000000
6/1/2012	1:09:40 PM	Tube furnace set to 0
6/1/2012	1:09:41 PM	Helium valve closed
6/1/2012	1:09:41 PM	BCl3 valve closed
6/1/2012	1:09:41 PM	PH3 valve closed
6/1/2012	1:09:41 PM	SiCl4 pre valve closed
6/1/2012	1:09:41 PM	SiCl4 post valve closed
6/1/2012	1:09:41 PM	Main Vac valve closed
6/1/2012	1:09:41 PM	Bypass valve closed
6/1/2012	1:09:41 PM	H2 valve opened
6/1/2012	1:09:41 PM	Bubbler valve opened
6/1/2012	1:09:41 PM	Helium MFC set to  0.000000
6/1/2012	1:09:41 PM	H2 MFC set to  500.000000
6/1/2012	1:09:41 PM	BCl3 MFC set to  0.000000
6/1/2012	1:09:41 PM	PH3 MFC set to  0.000000
6/1/2012	1:09:41 PM	SiCl4 MFC set to  0.000000
6/1/2012	1:09:41 PM	Bypass solenoid MFC set to  0.000000
6/1/2012	1:09:41 PM	Tube furnace set to 1000
6/1/2012	1:29:41 PM	Helium valve closed
6/1/2012	1:29:41 PM	BCl3 valve closed
6/1/2012	1:29:41 PM	Main Vac valve closed
6/1/2012	1:29:41 PM	Bypass valve closed
6/1/2012	1:29:41 PM	H2 valve opened
6/1/2012	1:29:41 PM	PH3 valve opened
6/1/2012	1:29:41 PM	SiCl4 pre valve opened
6/1/2012	1:29:41 PM	SiCl4 post valve opened
6/1/2012	1:29:41 PM	Bubbler valve opened
6/1/2012	1:29:41 PM	Helium MFC set to  0.000000
6/1/2012	1:29:41 PM	H2 MFC set to  500.000000
6/1/2012	1:29:41 PM	BCl3 MFC set to  0.000000
6/1/2012	1:29:41 PM	PH3 MFC set to  20.000000
6/1/2012	1:29:41 PM	SiCl4 MFC set to  25.000000
6/1/2012	1:29:41 PM	Bypass solenoid MFC set to  0.000000
6/1/2012	1:29:41 PM	Tube furnace set to 1000
6/1/2012	1:44:41 PM	Helium valve closed
6/1/2012	1:44:41 PM	BCl3 valve closed
6/1/2012	1:44:41 PM	PH3 valve closed
6/1/2012	1:44:41 PM	SiCl4 pre valve closed
6/1/2012	1:44:41 PM	SiCl4 post valve closed
6/1/2012	1:44:41 PM	Main Vac valve closed
6/1/2012	1:44:41 PM	Bypass valve closed
6/1/2012	1:44:41 PM	H2 valve opened
6/1/2012	1:44:41 PM	Bubbler valve opened
6/1/2012	1:44:41 PM	Helium MFC set to  0.000000
6/1/2012	1:44:41 PM	H2 MFC set to  500.000000
6/1/2012	1:44:41 PM	BCl3 MFC set to  0.000000
6/1/2012	1:44:41 PM	PH3 MFC set to  0.000000
6/1/2012	1:44:41 PM	SiCl4 MFC set to  0.000000
6/1/2012	1:44:41 PM	Bypass solenoid MFC set to  0.000000
6/1/2012	1:44:41 PM	Tube furnace set to 950
6/1/2012	1:46:41 PM	Helium valve closed
6/1/2012	1:46:41 PM	BCl3 valve closed
6/1/2012	1:46:41 PM	PH3 valve closed
6/1/2012	1:46:41 PM	SiCl4 pre valve closed
6/1/2012	1:46:41 PM	SiCl4 post valve closed
6/1/2012	1:46:41 PM	Main Vac valve closed
6/1/2012	1:46:41 PM	Bypass valve closed
6/1/2012	1:46:41 PM	H2 valve opened
6/1/2012	1:46:41 PM	Bubbler valve opened
6/1/2012	1:46:41 PM	Helium MFC set to  0.000000
6/1/2012	1:46:41 PM	H2 MFC set to  500.000000
6/1/2012	1:46:41 PM	BCl3 MFC set to  0.000000
6/1/2012	1:46:41 PM	PH3 MFC set to  0.000000
6/1/2012	1:46:41 PM	SiCl4 MFC set to  0.000000
6/1/2012	1:46:41 PM	Bypass solenoid MFC set to  0.000000
6/1/2012	1:46:42 PM	Tube furnace set to 900
6/1/2012	1:48:42 PM	Helium valve closed
6/1/2012	1:48:42 PM	BCl3 valve closed
6/1/2012	1:48:42 PM	PH3 valve closed
6/1/2012	1:48:42 PM	SiCl4 pre valve closed
6/1/2012	1:48:42 PM	SiCl4 post valve closed
6/1/2012	1:48:42 PM	Main Vac valve closed
6/1/2012	1:48:42 PM	Bypass valve closed
6/1/2012	1:48:42 PM	H2 valve opened
6/1/2012	1:48:42 PM	Bubbler valve opened
6/1/2012	1:48:42 PM	Helium MFC set to  0.000000
6/1/2012	1:48:42 PM	H2 MFC set to  500.000000
6/1/2012	1:48:42 PM	BCl3 MFC set to  0.000000
6/1/2012	1:48:42 PM	PH3 MFC set to  0.000000
6/1/2012	1:48:42 PM	SiCl4 MFC set to  0.000000
6/1/2012	1:48:42 PM	Bypass solenoid MFC set to  0.000000
6/1/2012	1:48:42 PM	Tube furnace set to 850
6/1/2012	1:50:42 PM	H2 valve closed
6/1/2012	1:50:42 PM	BCl3 valve closed
6/1/2012	1:50:42 PM	PH3 valve closed
6/1/2012	1:50:42 PM	SiCl4 pre valve closed
6/1/2012	1:50:42 PM	SiCl4 post valve closed
6/1/2012	1:50:42 PM	Main Vac valve closed
6/1/2012	1:50:42 PM	Bypass valve closed
6/1/2012	1:50:42 PM	Helium valve opened
6/1/2012	1:50:42 PM	Bubbler valve opened
6/1/2012	1:50:42 PM	Helium MFC set to  500.000000
6/1/2012	1:50:42 PM	H2 MFC set to  0.000000
6/1/2012	1:50:42 PM	BCl3 MFC set to  0.000000
6/1/2012	1:50:42 PM	PH3 MFC set to  0.000000
6/1/2012	1:50:42 PM	SiCl4 MFC set to  0.000000
6/1/2012	1:50:42 PM	Bypass solenoid MFC set to  0.000000
6/1/2012	1:50:42 PM	Tube furnace set to 800
6/1/2012	1:52:42 PM	H2 valve closed
6/1/2012	1:52:42 PM	BCl3 valve closed
6/1/2012	1:52:42 PM	PH3 valve closed
6/1/2012	1:52:42 PM	SiCl4 pre valve closed
6/1/2012	1:52:42 PM	SiCl4 post valve closed
6/1/2012	1:52:42 PM	Main Vac valve closed
6/1/2012	1:52:42 PM	Bypass valve closed
6/1/2012	1:52:42 PM	Helium valve opened
6/1/2012	1:52:42 PM	Bubbler valve opened
6/1/2012	1:52:42 PM	Helium MFC set to  500.000000
6/1/2012	1:52:42 PM	H2 MFC set to  0.000000
6/1/2012	1:52:42 PM	BCl3 MFC set to  0.000000
6/1/2012	1:52:42 PM	PH3 MFC set to  0.000000
6/1/2012	1:52:42 PM	SiCl4 MFC set to  0.000000
6/1/2012	1:52:42 PM	Bypass solenoid MFC set to  0.000000
6/1/2012	1:52:42 PM	Tube furnace set to 750
6/1/2012	1:54:42 PM	H2 valve closed
6/1/2012	1:54:42 PM	BCl3 valve closed
6/1/2012	1:54:42 PM	PH3 valve closed
6/1/2012	1:54:42 PM	SiCl4 pre valve closed
6/1/2012	1:54:42 PM	SiCl4 post valve closed
6/1/2012	1:54:42 PM	Main Vac valve closed
6/1/2012	1:54:42 PM	Bypass valve closed
6/1/2012	1:54:42 PM	Helium valve opened
6/1/2012	1:54:42 PM	Bubbler valve opened
6/1/2012	1:54:42 PM	Helium MFC set to  500.000000
6/1/2012	1:54:42 PM	H2 MFC set to  0.000000
6/1/2012	1:54:42 PM	BCl3 MFC set to  0.000000
6/1/2012	1:54:42 PM	PH3 MFC set to  0.000000
6/1/2012	1:54:42 PM	SiCl4 MFC set to  0.000000
6/1/2012	1:54:42 PM	Bypass solenoid MFC set to  0.000000
6/1/2012	1:54:43 PM	Tube furnace set to 0
6/1/2012	2:14:42 PM	Helium valve closed
6/1/2012	2:14:43 PM	H2 valve closed
6/1/2012	2:14:43 PM	BCl3 valve closed
6/1/2012	2:14:43 PM	PH3 valve closed
6/1/2012	2:14:43 PM	SiCl4 pre valve closed
6/1/2012	2:14:43 PM	SiCl4 post valve closed
6/1/2012	2:14:43 PM	Main Vac valve closed
6/1/2012	2:14:43 PM	Bypass valve closed
6/1/2012	2:14:43 PM	Bubbler valve closed
6/1/2012	2:14:43 PM	Helium MFC set to  0.000000
6/1/2012	2:14:43 PM	H2 MFC set to  0.000000
6/1/2012	2:14:43 PM	BCl3 MFC set to  0.000000
6/1/2012	2:14:43 PM	PH3 MFC set to  0.000000
6/1/2012	2:14:43 PM	SiCl4 MFC set to  0.000000
6/1/2012	2:14:43 PM	Bypass solenoid MFC set to  0.000000
6/1/2012	2:14:43 PM	Tube furnace set to 0
6/1/2012	2:14:44 PM	Run finished at 2:14 PM
6/1/2012	3:18:54 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/1/2012	3:18:55 PM	Recipe started at 3:18 PM
6/1/2012	3:18:55 PM	Helium valve closed
6/1/2012	3:18:55 PM	H2 valve closed
6/1/2012	3:18:55 PM	BCl3 valve closed
6/1/2012	3:18:55 PM	PH3 valve closed
6/1/2012	3:18:55 PM	SiCl4 pre valve closed
6/1/2012	3:18:55 PM	SiCl4 post valve closed
6/1/2012	3:18:55 PM	Main Vac valve closed
6/1/2012	3:18:55 PM	Bypass valve closed
6/1/2012	3:18:55 PM	Bubbler valve closed
6/1/2012	3:18:55 PM	Helium MFC set to  0.000000
6/1/2012	3:18:55 PM	H2 MFC set to  0.000000
6/1/2012	3:18:55 PM	BCl3 MFC set to  0.000000
6/1/2012	3:18:55 PM	PH3 MFC set to  0.000000
6/1/2012	3:18:55 PM	SiCl4 MFC set to  0.000000
6/1/2012	3:18:55 PM	Bypass solenoid MFC set to  0.000000
6/1/2012	3:18:55 PM	Tube furnace set to 0
6/1/2012	3:18:58 PM	H2 valve closed
6/1/2012	3:18:58 PM	BCl3 valve closed
6/1/2012	3:18:58 PM	PH3 valve closed
6/1/2012	3:18:58 PM	SiCl4 pre valve closed
6/1/2012	3:18:58 PM	SiCl4 post valve closed
6/1/2012	3:18:58 PM	Main Vac valve closed
6/1/2012	3:18:58 PM	Bypass valve closed
6/1/2012	3:18:58 PM	Bubbler valve closed
6/1/2012	3:18:58 PM	Helium valve opened
6/1/2012	3:18:58 PM	Helium MFC set to  500.000000
6/1/2012	3:18:58 PM	H2 MFC set to  0.000000
6/1/2012	3:18:58 PM	BCl3 MFC set to  0.000000
6/1/2012	3:18:58 PM	PH3 MFC set to  0.000000
6/1/2012	3:18:58 PM	SiCl4 MFC set to  0.000000
6/1/2012	3:18:58 PM	Bypass solenoid MFC set to  0.000000
6/1/2012	3:18:58 PM	Tube furnace set to 0
6/1/2012	3:19:02 PM	Helium valve closed
6/1/2012	3:19:02 PM	H2 valve closed
6/1/2012	3:19:02 PM	BCl3 valve closed
6/1/2012	3:19:02 PM	PH3 valve closed
6/1/2012	3:19:02 PM	SiCl4 pre valve closed
6/1/2012	3:19:02 PM	SiCl4 post valve closed
6/1/2012	3:19:02 PM	Main Vac valve closed
6/1/2012	3:19:02 PM	Bypass valve closed
6/1/2012	3:19:02 PM	Bubbler valve closed
6/1/2012	3:19:02 PM	Helium MFC set to  0.000000
6/1/2012	3:19:02 PM	H2 MFC set to  0.000000
6/1/2012	3:19:02 PM	BCl3 MFC set to  0.000000
6/1/2012	3:19:02 PM	PH3 MFC set to  0.000000
6/1/2012	3:19:02 PM	SiCl4 MFC set to  0.000000
6/1/2012	3:19:02 PM	Bypass solenoid MFC set to  0.000000
6/1/2012	3:19:03 PM	Tube furnace set to 0
6/1/2012	3:19:04 PM	Run finished at 3:19 PM
6/1/2012	3:19:04 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/1/2012	3:21:08 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/1/2012	3:21:09 PM	Recipe started at 3:21 PM
6/1/2012	3:21:09 PM	Helium valve closed
6/1/2012	3:21:09 PM	H2 valve closed
6/1/2012	3:21:09 PM	BCl3 valve closed
6/1/2012	3:21:09 PM	PH3 valve closed
6/1/2012	3:21:09 PM	SiCl4 pre valve closed
6/1/2012	3:21:09 PM	SiCl4 post valve closed
6/1/2012	3:21:09 PM	Main Vac valve closed
6/1/2012	3:21:09 PM	Bubbler valve closed
6/1/2012	3:21:09 PM	Bypass valve opened
6/1/2012	3:21:09 PM	Helium MFC set to  0.000000
6/1/2012	3:21:09 PM	H2 MFC set to  0.000000
6/1/2012	3:21:09 PM	BCl3 MFC set to  0.000000
6/1/2012	3:21:09 PM	PH3 MFC set to  0.000000
6/1/2012	3:21:09 PM	SiCl4 MFC set to  0.000000
6/1/2012	3:21:09 PM	Bypass solenoid MFC set to  0.000000
6/1/2012	3:21:09 PM	Tube furnace set to 0
6/1/2012	3:22:15 PM	Helium valve closed
6/1/2012	3:22:15 PM	H2 valve closed
6/1/2012	3:22:15 PM	BCl3 valve closed
6/1/2012	3:22:15 PM	PH3 valve closed
6/1/2012	3:22:15 PM	SiCl4 pre valve closed
6/1/2012	3:22:15 PM	SiCl4 post valve closed
6/1/2012	3:22:15 PM	Main Vac valve closed
6/1/2012	3:22:15 PM	Bubbler valve closed
6/1/2012	3:22:15 PM	Bypass valve opened
6/1/2012	3:22:15 PM	Helium MFC set to  0.000000
6/1/2012	3:22:15 PM	H2 MFC set to  0.000000
6/1/2012	3:22:15 PM	BCl3 MFC set to  0.000000
6/1/2012	3:22:15 PM	PH3 MFC set to  0.000000
6/1/2012	3:22:15 PM	SiCl4 MFC set to  0.000000
6/1/2012	3:22:15 PM	Bypass solenoid MFC set to  0.000000
6/1/2012	3:22:15 PM	Tube furnace set to 0
6/1/2012	3:23:15 PM	Helium valve closed
6/1/2012	3:23:15 PM	H2 valve closed
6/1/2012	3:23:15 PM	BCl3 valve closed
6/1/2012	3:23:15 PM	PH3 valve closed
6/1/2012	3:23:15 PM	SiCl4 pre valve closed
6/1/2012	3:23:15 PM	SiCl4 post valve closed
6/1/2012	3:23:15 PM	Bypass valve closed
6/1/2012	3:23:15 PM	Bubbler valve closed
6/1/2012	3:23:15 PM	Main Vac valve opened
6/1/2012	3:23:15 PM	Helium MFC set to  0.000000
6/1/2012	3:23:15 PM	H2 MFC set to  0.000000
6/1/2012	3:23:15 PM	BCl3 MFC set to  0.000000
6/1/2012	3:23:15 PM	PH3 MFC set to  0.000000
6/1/2012	3:23:15 PM	SiCl4 MFC set to  0.000000
6/1/2012	3:23:15 PM	Bypass solenoid MFC set to  0.000000
6/1/2012	3:23:15 PM	Tube furnace set to 0
6/1/2012	3:23:16 PM	Run finished at 3:23 PM
6/1/2012	3:23:16 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
